公开(公告)号：EP1719012B9

公开(公告)日：2012-06-27

申请号：EP05722864.5

申请日：2005-02-09

申请人： Microvision, Inc.

发明人： SPRAGUE, Randall, B. ,  YAN, Jun ,  TAUSCHER, Jason, B. ,  DAVIS, Wyatt, O. ,  LEWIS, John, R. ,  BROWN, Dean, R. ,  MONTAGUE, Thomas, W. ,  BROWN, Chancellor, W.

IPC分类号： B81C1/00 ,  G02B26/08 ,  H01L21/78 ,  B81B3/00

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

摘要翻译： 诸如MEMS扫描仪（102）的MEMS振荡器具有改进和简化的驱动方案和结构。 驱动脉冲可以通过支撑臂（108a，108b）经由扭矩传递到振动体。 对于多轴振荡器，两个或更多轴（110,116）的驱动信号可以被驱动器电路叠加并传输到MEMS振荡器。 振荡器根据该轴的共振频率在每个轴上响应。 振荡器可以在一些或所有轴上共振地驱动。 改进的载荷分布可减少变形。 简化的结构使用单个移动体提供多轴振荡。 另一种结构直接驱动多个移动体。 另一种结构消除了来自一个或多个移动体的致动器，这些移动体由它们的支撑臂驱动。

公开(公告)号：EP1719010A2

公开(公告)日：2006-11-08

申请号：EP05713178.1

申请日：2005-02-09

申请人： Microvision, Inc.

发明人： DAVIS, Wyatt, O. ,  BROWN, Dean, R. ,  MONTAGUE, Thomas, W. ,  SPRAGUE, Randall, B.

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： A high performance MEMS scanner (202) is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms (206) allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions (208) couple the scan mirror to torsion arms (206), reducing dynamic mirror deformation by spreading the torque load. “leverage members” (212) at the distal ends of the torsion arms (206) help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads (214) against mounting structures.

公开(公告)号：EP1719012A2

公开(公告)日：2006-11-08

申请号：EP05722864.5

申请日：2005-02-09

申请人： Microvision, Inc.

发明人： SPRAGUE, Randall, B. ,  YAN, Jun ,  TAUSCHER, Jason, B. ,  DAVIS, Wyatt, O. ,  LEWIS, John, R. ,  BROWN, Dean, R. ,  MONTAGUE, Thomas, W. ,  BROWN, Chancellor, W.

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

公开(公告)号：EP1719012B1

公开(公告)日：2012-03-28

申请号：EP05722864.5

申请日：2005-02-09

申请人： Microvision, Inc.

发明人： SPRAGUE, Randall, B. ,  YAN, Jun ,  TAUSCHER, Jason, B. ,  DAVIS, Wyatt, O. ,  LEWIS, John, R. ,  BROWN, Dean, R. ,  MONTAGUE, Thomas, W. ,  BROWN, Chancellor, W.

IPC分类号： B81C1/00 ,  G02B26/08 ,  H01L21/78 ,  B81B3/00

CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

摘要： A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

公开(公告)号：EP1759375A2

公开(公告)日：2007-03-07

申请号：EP05736175.0

申请日：2005-04-14

申请人： Microvision, Inc.

发明人： SPRAGUE, Randall, B. ,  UREY, Hakan ,  BROWN, Dean, R. ,  BROWN, Margaret, K. ,  LEWIS, John, R. ,  WATSON, Mathew, D. ,  MONTAGUE, Thomas, W. ,  WILLEY, Stephen, R.

IPC分类号： G09G3/34

CPC分类号： G02B27/0172 ,  G02B5/10 ,  G02B26/101 ,  G02B2027/0123 ,  G02B2027/0132 ,  G02B2027/0178 ,  H04N5/7408 ,  H04N5/7491

摘要： A scanned light display system (100) includes a light source (102) operable to emit light and a curved mirror (108) positioned to receive at least a portion of the light. The curved mirror (108) is configured to substantially collimate the received light. The substantially collimated light is scanned to form an image by moving at least one of the light source (102) and the curved mirror (108) relative to each other. Alternatively, the scanned light display system (100) includes a light source (102) operable to emit light, a curved mirror (108) positioned to receive some of the light, and an optical element (124) positioned to receive light reflected from the curved mirror (108). The optical element (124) is configured to substantially collimate the reflected light. The substantially collimated light is scanned to form an image by moving at least one of the light source (102), the curved mirror (108), and the optical element (124). Scanning mirror assemblies and methods of making are also disclosed.