MEMS SCANNER ADAPTED TO A LASER PRINTER
    2.
    发明公开
    MEMS SCANNER ADAPTED TO A LASER PRINTER 有权
    FOR激光打印机大小的MEMS扫描

    公开(公告)号:EP1723460A1

    公开(公告)日:2006-11-22

    申请号:EP05713179.9

    申请日:2005-02-09

    IPC分类号: G02B26/08 B81B3/00

    CPC分类号: G02B26/0858

    摘要: An electrophotographic printer includes an exposure unit having a MEMS scanner operable to scan a beam of light across a photoconductor. The MEMS scanner (302) includes a mirror (304) having an aspect ratio similar to the shape of the facets of a conventional rotating polygon scanner. In a preferred embodiment, the scan mirror (304) has a length of about 750 microns in a dimension parallel to its axis of rotation and a length of about 8 millimeters in a dimension perpendicular to its axis of rotation. The MEMS scanner (302) is operable to scan at a frequency of about 5 KHz and an angular displacement of about 20 degrees zero-to-peak mechanical scan angle.

    MEMS SCANNING SYSTEM WITH IMPROVED PERFORMANCE
    6.
    发明授权
    MEMS SCANNING SYSTEM WITH IMPROVED PERFORMANCE 有权
    具有改进性能的MEMS扫描系统

    公开(公告)号:EP1719012B9

    公开(公告)日:2012-06-27

    申请号:EP05722864.5

    申请日:2005-02-09

    申请人: Microvision, Inc.

    摘要: A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

    摘要翻译: 诸如MEMS扫描仪(102)的MEMS振荡器具有改进和简化的驱动方案和结构。 驱动脉冲可以通过支撑臂(108a,108b)经由扭矩传递到振动体。 对于多轴振荡器,两个或更多轴(110,116)的驱动信号可以被驱动器电路叠加并传输到MEMS振荡器。 振荡器根据该轴的共振频率在每个轴上响应。 振荡器可以在一些或所有轴上共振地驱动。 改进的载荷分布可减少变形。 简化的结构使用单个移动体提供多轴振荡。 另一种结构直接驱动多个移动体。 另一种结构消除了来自一个或多个移动体的致动器,这些移动体由它们的支撑臂驱动。

    METHOD AND APPARATUS FOR SCANNING A BEAM OF LIGHT
    8.
    发明公开
    METHOD AND APPARATUS FOR SCANNING A BEAM OF LIGHT 审中-公开
    方法和设备,用于扫描BEAM

    公开(公告)号:EP1719011A2

    公开(公告)日:2006-11-08

    申请号:EP05722862.9

    申请日:2005-02-09

    申请人: Microvision, Inc.

    IPC分类号: G02B26/08 B81B3/00

    摘要: A resonant MEMS scanning system operates a MEMS scanner at its resonant frequency to maximize scan angle and minimize power consumption. A controller includes a phase locked loop, an amplitude servo control loop, and a resonant frequency servo control loop. A microprocessor controls the loops and provides override during conditions such as start-up. Resonant frequency is dynamically thermally trimmed, allowing the device to be operated at higher Q. The phase lock loop operates in a pre-lock condition to allow faster start-up. Resonant frequency is controlled open loop during idle and start-up. Drive voltage is set high during start-up to achieve a rapid rise in scan angle.