摘要:
A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要:
An electrophotographic printer includes an exposure unit having a MEMS scanner operable to scan a beam of light across a photoconductor. The MEMS scanner (302) includes a mirror (304) having an aspect ratio similar to the shape of the facets of a conventional rotating polygon scanner. In a preferred embodiment, the scan mirror (304) has a length of about 750 microns in a dimension parallel to its axis of rotation and a length of about 8 millimeters in a dimension perpendicular to its axis of rotation. The MEMS scanner (302) is operable to scan at a frequency of about 5 KHz and an angular displacement of about 20 degrees zero-to-peak mechanical scan angle.
摘要:
A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要:
A scanned light display system (100) includes a light source (102) operable to emit light and a curved mirror (108) positioned to receive at least a portion of the light. The curved mirror (108) is configured to substantially collimate the received light. The substantially collimated light is scanned to form an image by moving at least one of the light source (102) and the curved mirror (108) relative to each other. Alternatively, the scanned light display system (100) includes a light source (102) operable to emit light, a curved mirror (108) positioned to receive some of the light, and an optical element (124) positioned to receive light reflected from the curved mirror (108). The optical element (124) is configured to substantially collimate the reflected light. The substantially collimated light is scanned to form an image by moving at least one of the light source (102), the curved mirror (108), and the optical element (124). Scanning mirror assemblies and methods of making are also disclosed.
摘要:
A MEMS oscillator, such as a MEMS scanner (102), has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms (108a, 108b). For multi-axis oscillators drive signals for two or more axes (110, 116) may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要:
An integrated photonics module includes at least one light source and a MEMS scanner coupled to and held in alignment by an optical frame configured for mounting to a host system. According to some embodiments, the integrated photonics module may include a plurality of light sources and a beam combiner coupled to the optical frame. According to some embodiments, the integrated photonics module includes a selective fold mirror configured to direct at least a portion of emitted light toward the MEMS scanner in a normal direction and pass scanned light through to a field of view. The selective fold mirror may use beam polarization to select beam passing and reflection. The integrated photonics module may include a beam rotator such as a quarter-wave plate to convert the polarization of the emitted light to a different polarization adapted for passage through the fold mirror. The integrated photonics module may include one or more light detectors.
摘要:
A resonant MEMS scanning system operates a MEMS scanner at its resonant frequency to maximize scan angle and minimize power consumption. A controller includes a phase locked loop, an amplitude servo control loop, and a resonant frequency servo control loop. A microprocessor controls the loops and provides override during conditions such as start-up. Resonant frequency is dynamically thermally trimmed, allowing the device to be operated at higher Q. The phase lock loop operates in a pre-lock condition to allow faster start-up. Resonant frequency is controlled open loop during idle and start-up. Drive voltage is set high during start-up to achieve a rapid rise in scan angle.
摘要:
A laser- drive controller (1501) compensates for temperature-dependent effects of a temperature-sensitive laser (1520). Temperature variations in the laser (1520) may be measured and/or predicted based on variable pulsed output. The controller (1501) may drive the laser (1520) to maintain temperature and/or to compensate for variations in temperature. The techniques may be applied to a laser scanner, scanned beam display, laser printer, laser camera, scanned beam imager, etc.