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1.发明公开GAS ANALYSIS DEVICE, CONTROL SYSTEM AND CONTROL ASSISTANCE SYSTEM FOR COMBUSTION EQUIPMENT, AND GAS ANALYSIS METHOD 审中-公开燃烧设备的气体分析装置，控制系统和控制辅助系统以及气体分析方法
公开(公告)号：EP3246694A1
公开(公告)日：2017-11-22
申请号：EP15887752.2
申请日：2015-11-25
IPC分类号： G01N21/39 , F23N1/02 , F23N5/00 , F23N5/08 , G01K11/00 , G01N21/3504 , G01N21/3554
CPC分类号： F23N5/08 , F23N1/02 , F23N5/00 , G01K11/00 , G01N21/3504 , G01N21/3554 , G01N21/39 , G01N2021/3125
摘要： A gas analysis device is provided with: a measuremrnt unit that uses a plurality of measurement passes to measure the absorption amount of laser light including an absorption wavelength corresponding to at least two electron level transitions in the same component included in a combustion gas within a combustion furnace; a standard setting unit that sets a standard gas concentration distribution and a standard temperature distribution; and an analysis unit that determines a gas concentration distribution and a temperature distribution by solving a two-dimensional distribution function in which the gas concentration distribution and the temperature distribution are included as variables such that the minimum deviation between the actual measured absorption amount and a standard absorption amount is achieved.
摘要翻译： 本发明提供一种气体分析装置，该气体分析装置具有：测量单元，其使用多个测量路径来测量燃烧时的燃烧气体中所含的相同成分中包含与至少两个电子跃迁相对应的吸收波长的激光的吸收量 炉; 标准设定单元，其设定标准气体浓度分布和标准温度分布; 以及分析单元，其通过求解包括气体浓度分布和温度分布作为变量的二维分布函数来确定气体浓度分布和温度分布，使得实际测量的吸收量与标准之间的最小偏差 吸收量达到。
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2.发明公开PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING METHOD, PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING DEVICE, AND PHOTOELECTRIC CONVERSION DEVICE 审中-公开制造方法PHOTO电力变换装置，器具，用于产生相片电转换装置和光电转换装置
公开(公告)号：EP2421051A1
公开(公告)日：2012-02-22
申请号：EP09843359.2
申请日：2009-08-25
IPC分类号： H01L31/04
CPC分类号： H01L31/076 , B23K26/0006 , B23K26/0087 , B23K26/0624 , B23K26/064 , B23K26/0676 , B23K26/083 , B23K26/364 , B23K26/40 , B23K2203/172 , B23K2203/50 , B23K2203/56 , H01L31/0463 , H01L31/056 , Y02E10/52 , Y02E10/548
摘要： Provided is a method for manufacturing a photoelectric-conversion-device capable of controlling the groove depth of a processed groove to a desired value. The method for manufacturing a photoelectric conversion device (10) includes a groove forming step of irradiating an intermediate-contact-layer separating groove (93) constituting a photoelectric conversion device (10) with a picosecond laser and of moving the picosecond laser relative to the intermediate-contact-layer separating groove (15), thereby forming a processed groove (15) in a predetermined scanning direction. In the groove forming step, interference fringes arranged in parallel in one direction are formed in an irradiated area corresponding to a beam diameter of the picosecond laser, and the picosecond laser is relatively moved such that the interference fringes are joined in the scanning direction.
摘要翻译： 提供了一种用于制造光电转换装置能够控制加工槽的槽深度为期望的值的方法。 用于制造光电转换装置（10）的方法，包括：一个槽形成在中间接触层分离槽（93）照射构成的光电转换装置（10）配有一皮秒激光的，并且相对于所述皮秒激光移动的步骤 中间接触层分离槽（15），从而形成在预定的扫描方向上的加工槽（15）。 在槽形成工序中，在一个方向上平行布置的干涉条纹形成于照射区域对应于皮秒激光的光束直径，并且相对地移动检查的皮秒激光没的干涉条纹在扫描方向上接合。
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3.发明公开SYSTEM FOR CONTROLLING SOUNDNESS OF DIESEL ENGINE FUEL AND METHOD FOR ASSESSING SOUNDNESS OF DIESEL ENGINE FUEL 审中-公开监测系统的柴油机燃油和方法的安全用于验证柴油的安全
公开(公告)号：EP2366882A1
公开(公告)日：2011-09-21
申请号：EP09831910.6
申请日：2009-12-08
发明人： DEGUCHI, Yoshihiro , KAWAZOE, Kohei , YAMAMURA, Taketoshi , OSAFUNE, Shinnosuke , WATANABE, Kei
CPC分类号： F02D41/0025 , F02D19/0623 , F02D19/0634 , F02D19/0649 , F02D19/0657 , F02D41/22 , F02D2200/0611 , Y02T10/36 , Y02T10/40
摘要： A diesel engine fuel soundness control system includes: a density measuring instrument 11 that measures a density of a fuel F of a diesel engine (D/E) in real time; a micro carbon residue (MCR) measuring instrument 12 that measures an MCR in the fuel F of the diesel engine (D/E) in real time; and a control device (CPU) 13 that changes an operation mode of the diesel engine when values of the density and the micro carbon residue (MCR) of the fuel F are obtained and an obtained result is out of a range of soundness of a density-to-MCR characteristic map obtained in advance.
摘要翻译： 柴油发动机燃料健全性控制系统，包括：密度计测仪11个测量做的柴油发动机（D / E）在实时的燃料F的密度 微碳残留物（MCR）测量仪12个测量在柴油发动机（D / E）在实时的燃料F在没有MCR; 和控制装置（CPU）13也改变到柴油发动机的运转模式。当密度和燃料F的微碳残留物（MCR）的值被获得，并且在获得的结果是出的范围内的密度的健全性的 -to-MCR之间的特性映射预先获得。
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4.发明公开PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING METHOD AND PHOTOELECTRIC CONVERSION DEVICE 审中-公开方法用于产生电力变换装置及照片光电转换装置
公开(公告)号：EP2346088A1
公开(公告)日：2011-07-20
申请号：EP09824682.0
申请日：2009-10-02
IPC分类号： H01L31/04
CPC分类号： H01L31/1804 , H01L31/03921 , H01L31/077 , H01L31/182 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： Provided is a photoelectric conversion device fabrication method in which current leakage from an intermediate contact layer via an intermediate-contact-layer separating groove is prevented as much as possible. Included are a step of film-forming a top layer (91) having amorphous silicon as a main component; a step of film-forming, on the top layer (91), an intermediate contact layer (93) electrically and optically connected thereto; a step of separating the intermediate contact layer (93) by removing the intermediate contact layer (93) by irradiating it with a pulsed laser, forming an intermediate-contact-layer separating groove (14) that reaches the top layer (91); and a step of film-forming, on the intermediate contact layer (93) and inside the intermediate-contact-layer separating groove (14), a bottom layer (92) electrically and optically connected thereto and having microcrystalline silicon as a main component. A pulsed laser having a pulse width of 10 ps to 750 ps, inclusive, is used as the pulsed laser for separating the intermediate contact layer (93).
摘要翻译： 提供的是，其通过在中间接触层分离槽从中间接触层的电流漏电防止尽可能的光电转换装置的制造方法。 包括的是一个步骤的膜形成具有非晶质硅作为主要成分的顶层（91）; 的步骤成膜中，顶层（91）到中间接触层（93）上电连接及光学连接到其上; 通过用脉冲激光照射来将其去除中间接触层（93），在中间接触层形成分离槽（14）做了分离中间接触层（93）的步骤到达顶部层（91）; 和作为主要成分的膜形成，所述中间接触层（93）的中间接触层分离槽（14）上和内部，底部层（92）电气地和与其光学连接，并且具有由微晶硅的步骤。 具有10 ps至750皮秒，包容的脉冲宽度的脉冲激光，被用作所述脉冲激光用于分离中间接触层（93）。
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5.发明公开PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING METHOD AND PHOTOELECTRIC CONVERSION DEVICE 审中-公开方法用于产生电力变换装置及照片光电转换装置
公开(公告)号：EP2346087A1
公开(公告)日：2011-07-20
申请号：EP09824681.2
申请日：2009-10-02
IPC分类号： H01L31/04
CPC分类号： H01L31/03921 , H01L31/077 , H01L31/1804 , H01L31/182 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： Provided is a method for fabricating a photoelectric conversion device in which current is prevented as much as possible from leaking via an intermediate contact layer separating groove. The method includes: a process of forming a top layer (91) mainly containing amorphous silicon; a process of forming on the top layer (91) an intermediate contact layer (93) electrically and optically connected to the top layer (91); a process of removing the intermediate contact layer (93) through irradiation with a pulsed laser and forming an intermediate contact layer separating groove (14) that reaches the top layer (91) to separate the intermediate contact layer (93); and a process of forming, on the intermediate contact layer (93) and in the intermediate contact layer separating groove (14), a bottom layer (92) that mainly contains microcrystalline silicon and that is electrically and optically connected to the intermediate contact layer (93). The intermediate contact layer separating groove (14) is terminated in an i-layer of the top layer (91).
摘要翻译： 提供了一种用于制造在其中的电流的光电转换装置的方法是从经由中间接触层分离槽漏出尽可能。 该方法包括：形成顶部层（91）主要含有非晶硅的处理; 形成顶层（91）到中间接触层（93）上电连接及光学连接到所述顶层（91）的过程; 通过照射一个脉冲激光去除所述中间接触层（93），并在中间接触层分离槽（14）形成确实的处理到达顶部层（91）到中间接触层分离（93）; 和形成，中间接触层（93）上，并且所述中间接触层在分离槽（14），底层（92）的处理做了主要包含微晶硅，做电连接及光学连接的中间接触层（ 93）。 中间接触层分离槽（14）终止在所述顶层（91）的i层。
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6.发明公开METHOD AND APPARATUS FOR EVALUATING FILM QUALITY AND THIN FILM DEVICE MANUFACTURING SYSTEM 审中-公开VERFAHREN UND VORRICHTUNG ZURFILMQUALTÄTSBEWERTUNGUNDDÜNNFILMVORRICHTUNG-HERSTELLUNGSSYSTEM
公开(公告)号：EP2124037A1
公开(公告)日：2009-11-25
申请号：EP07830912.7
申请日：2007-10-31
CPC分类号： G01N21/8914 , G01N21/65 , G01N21/8422 , H01L22/12
摘要： An object is to improve production efficiency as well as reducing the burden on an operator. Light is radiated on a crystalline silicon film used for a thin-film silicon device, reflection light reflected by the crystalline silicon film is detected, a parameter of the luminance of the detected reflection light is measured, and film quality evaluation of the crystalline silicon film is performed in accordance with whether the parameter of the luminance is within a predetermined proper range or not.
摘要翻译： 目的是提高生产效率，减轻操作人员的负担。 将光照射在用于薄膜硅器件的结晶硅膜上，检测由结晶硅膜反射的反射光，测量检测到的反射光的亮度参数，以及晶体硅膜的膜质量评估 根据亮度的参数是否在预定的适当范围内进行。
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公开(公告)号：EP3252497A1
公开(公告)日：2017-12-06
申请号：EP15886490.0
申请日：2015-11-19
发明人： KAWAZOE, Kohei , KUBOTA, Takahiro
CPC分类号： G01S17/42 , B61L15/0081 , B61L23/00 , G01B11/24 , G01C3/06 , G01S7/481 , G01S7/4817 , G01S7/4865 , G01S17/89 , G01S17/93 , G08G1/16
摘要： The invention comprises: a laser light source 11; a light-transmission-side lens 12 that shapes a laser beam L emitted from the laser light source 11 into a dot shape; a scanner 13 that projects the dot-shaped laser beam L while scanning the same in a horizontal direction X and a perpendicular direction Y of a measurement-target area A; a light-reception-side lens 16 that receives reflected light R reflected from the measurement-target area A; a light-reception-side optical system 17 that gathers, in both the horizontal direction X and the perpendicular direction Y, the reflected light R received by the light-reception-side lens 16; a light reception element 18 that receives the reflected light R gathered by the light-reception-side optical system 17; and an information generating unit 21 that generates three-dimensional information of the measurement-target area A on the basis of a reception signal outputted by the light reception element 18.
摘要翻译： 本发明包括：激光光源11; 将从激光光源11射出的激光L成形为点状的透光侧透镜12， 扫描仪13，其在测量目标区域A的水平方向X和垂直方向Y上扫描点状激光束L同时进行扫描; 接收从测定对象区域A反射的反射光R的受光侧透镜16， 光接收侧光学系统17，其在水平方向X和垂直方向Y两者上聚集由光接收侧透镜16接收的反射光R; 接收由光接收侧光学系统17聚集的反射光R的光接收元件18; 以及信息生成单元21，其基于由光接收元件18输出的接收信号来生成测量对象区域A的三维信息。
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8.发明公开FILM THICKNESS MEASURING METHOD, ITS APPARATUS, AND MANUFACTURING SYSTEM FOR THIN-FILM DEVICE 审中-公开FIDMDICKEMESSVERFAHREN，VORRICHTUNGDAFÜRUND HERSTELLUNGSSYSTEMFÜREINDÜNNFILM-BAUELEMENT
公开(公告)号：EP2124016A1
公开(公告)日：2009-11-25
申请号：EP07830914.3
申请日：2007-10-31
CPC分类号： G01B11/06 , G01B11/0625 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： Objects are to reduce the burden on an operator and to improve fabrication efficiency. A transparent conductive film or a transparent optical film formed on a substrate W is irradiated with line illumination light by means of a line illumination device 3, line reflected light reflected at the transparent conductive film or the transparent optical film is detected with a camera, a color evaluation value of the detected reflected light is measured, and a film thickness corresponding to the measured color evaluation value is obtained using a film-thickness characteristic in which the color evaluation value is associated with the film thickness.
摘要翻译： 对象是减轻操作员的负担并提高制造效率。 用线照明装置3照射在基板W上形成的透明导电膜或透明光学膜，利用照相机检测在透明导电膜或透明光学膜上反射的线反射光， 测量检测到的反射光的颜色评估值，并且使用其中颜色评估值与膜厚度相关联的膜厚特性获得与测量的颜色评估值相对应的膜厚度。
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公开(公告)号：EP4269991A1
公开(公告)日：2023-11-01
申请号：EP22746078.9
申请日：2022-01-31
发明人： YANO, Yuki , KAMIHARA, Nobuyuki , MORITAKE, Takayuki , KAWAZOE, Kohei , NAKAJIMA, Kiwamu , MURAKI, Toshinobu , HASHIDA, Yusuke , FUJII, Kanata
IPC分类号： G01N21/958
摘要： This inspection device comprises an infrared acquisition unit for acquiring infrared light detected by an infrared camera for detecting infrared light from an inspected object that includes an electroconductive member, an intensity-determining unit for determining the detection intensity of the infrared light, and a scratch-determining unit for determining whether or not there is a scratch on the electroconductive member on the basis of the detection intensity of the infrared light.
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10.发明公开
公开(公告)号：EP3739359A1
公开(公告)日：2020-11-18
申请号：EP20155723.8
申请日：2020-02-05
发明人： KAWAZOE, Kohei
摘要： A laser radar device includes a scanner unit for scanning a measurement target area along a second direction orthogonal to a predetermined first direction by irradiating the measurement target area with a line-shaped laser beam as a light-transmitting angle is changed, the line-shaped laser beam being a laser beam formed into a line shape so as to extend in the first direction, a received signal generation unit for generating a received signal according to received reflected light of the line-shaped laser beam with which the measurement target area is irradiated, a storage unit for storing shape distortion information of the line-shaped laser beam in the second direction, and a three-dimensional information generation unit for generating three-dimensional information of the measurement target area based on corrected position information in the second direction which is obtained by correcting position information in the second direction calculated based on the received signal and the light-transmitting angle, with the shape distortion information.
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