专利检索 ap:("NAMIKI PRECISION JEWEL CO LTD" OR "DISCO CORP") AND inv:"HAMAMOTO TOMOSABURO" 第 1 页

1.

发明公开
CRYSTALLINE FILM, DEVICE, AND PRODUCTION METHODS FOR CRYSTALLINE FILM AND DEVICE 审中-公开
标题翻译：水晶胶片，设备和方法结晶薄膜与器件

公开(公告)号：EP2544221A4

公开(公告)日：2015-06-03

申请号：EP11750819

申请日：2011-03-04

申请人： NAMIKI PRECISION JEWEL CO LTD , DISCO CORP

发明人： AIDA HIDEO , AOTA NATSUKO , HOSHINO HITOSHI , FURUTA KENJI , HAMAMOTO TOMOSABURO , HONJO KEIJI

IPC分类号： H01L21/20 , C30B33/04 , H01L21/02 , H01L21/205 , H01L21/268

CPC分类号： H01L21/268 , C30B33/04 , H01L21/0237 , H01L21/0242 , H01L21/02428 , H01L21/02458 , H01L21/0254 , H01L21/02686 , H01L21/02691

2.

发明公开
SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, AND DEVICE PRODUCTION METHOD 审中-公开
标题翻译： WITH A多层膜晶体衬底，METHOD FOR WITH多层膜和器件POSITION RATHER PROCEDURE晶体衬底

公开(公告)号：EP2544219A4

公开(公告)日：2015-06-03

申请号：EP11750812

申请日：2011-03-04

申请人： NAMIKI PRECISION JEWEL CO LTD , DISCO CORP

发明人： AIDA HIDEO , AOTA NATSUKO , HOSHINO HITOSHI , FURUTA KENJI , HAMAMOTO TOMOSABURO , HONJO KEIJI

IPC分类号： H01L21/20 , C30B29/20 , C30B33/02 , H01L21/02 , H01L21/268 , H01L23/00 , H01L29/04

CPC分类号： H01L23/564 , C30B29/20 , C30B33/02 , H01L21/0237 , H01L21/0242 , H01L21/02428 , H01L21/0254 , H01L21/02686 , H01L21/268 , H01L29/045 , H01L2924/0002 , H01L2924/00

3.

发明公开
INTERNAL REFORMING SUBSTRATE FOR EPITAXIAL GROWTH, INTERNAL REFORMING SUBSTRATE WITH MULTILAYER FILM, SEMICONDUCTOR DEVICE, BULK SEMICONDUCTOR SUBSTRATE, AND PRODUCTION METHODS THEREFOR 审中-公开
标题翻译：与内部重整的外延生长，衬底，内部重整和多层薄膜，半导体元件，化合物半导体衬底及其制造方法衬底

公开(公告)号：EP2543752A4

公开(公告)日：2015-12-02

申请号：EP11750807

申请日：2011-03-04

申请人： NAMIKI PRECISION JEWEL CO LTD , DISCO CORP

发明人： AIDA HIDEO , AOTA NATSUKO , HOSHINO HITOSHI , FURUTA KENJI , HAMAMOTO TOMOSABURO , HONJO KEIJI

IPC分类号： C30B29/20 , B23K26/00 , B23K26/40 , C30B33/02 , C30B33/04 , H01L21/02 , H01L21/20 , H01L21/268 , H01L21/324 , H01L31/18 , H01L33/00

CPC分类号： C30B33/04 , B23K26/0006 , B23K26/0057 , B23K2203/56 , H01L21/0237 , H01L21/0242 , H01L21/02428 , H01L21/0254 , H01L21/02658 , H01L21/02686 , H01L21/268 , H01L31/184 , H01L33/007

4.

发明公开
SINGLE CRYSTAL SUBSTRATE, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, AND DEVICE PRODUCTION METHOD 审中-公开
标题翻译：晶体衬底，METHOD FOR晶体衬底，METHOD FOR WITH A多层膜和器件POSITION RATHER PROCEDURE的单晶衬底

公开(公告)号：EP2544220A4

公开(公告)日：2015-12-02

申请号：EP11750815

申请日：2011-03-04

申请人： NAMIKI PRECISION JEWEL CO LTD , DISCO CORP

发明人： AIDA HIDEO , AOTA NATSUKO , HOSHINO HITOSHI , FURUTA KENJI , HAMAMOTO TOMOSABURO , HONJO KEIJI

IPC分类号： H01L21/20 , C30B29/20 , C30B33/02 , C30B33/04 , H01L21/268 , H01L29/205

CPC分类号： C30B33/04 , H01L21/268 , H01L29/205