公开(公告)号：EP3246685A4

公开(公告)日：2018-05-23

申请号：EP15747084

申请日：2015-01-14

Applicant: NIPPON MEKTRON KK

Inventor： IWASE MASAYUKI ,  TOYAMA KEIZO ,  OZAKI KAZUYUKI ,  OHDATE HIROKAZU ,  KIMURA TAISUKE ,  TOYOSHIMA RYOICHI

IPC: G01L1/20 ,  A61B5/00 ,  G01L1/22 ,  G01L5/00 ,  G01L5/22

CPC classification number: G01L1/2287 ,  A61B5/447 ,  A61B2562/0247 ,  A61B2562/046 ,  A61B2562/12 ,  A61B2562/164 ,  G01L1/205 ,  G01L5/00 ,  G01L5/228

Abstract: Provided is a pressure sensing element capable of demonstrating a good initial detection sensitivity both in the flat state and the bent state, and is prevented from causing short-circuiting in the initial state; a pressure sensor equipped with the pressure sensing element; and a method of manufacturing a pressure sensing element. A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).

公开(公告)号：EP3244179A4

公开(公告)日：2018-08-01

申请号：EP14890459

申请日：2014-12-24

Applicant: NIPPON MEKTRON KK

Inventor： IWASE MASAYUKI ,  TOYAMA KEIZO ,  OZAKI KAZUYUKI ,  OHDATE HIROKAZU ,  KIMURA TAISUKE ,  TOYOSHIMA RYOICHI

IPC: G01L1/20 ,  G01L5/00 ,  H01L29/84

CPC classification number: G01L1/2287 ,  A61B5/1036 ,  A61B5/1117 ,  A61B2562/0247 ,  A61B2562/125 ,  G01L1/205 ,  G01L1/2206

Abstract: Provided is a pressure sensing element configured to be flexible, and capable of demonstrating a stable electrical reliability over a long period; and, a pressure sensor having such pressure sensing element. A pressure sensing element 100 has an electro-conductive pressure sensing film 14, a sensor electrode 12 provided at a position faced to the pressure sensing film 14, and an insulating layer 13 which creates a predetermined distance "A" between the pressure sensing film 14 and the sensor electrode 12 so as to keep them apart from each other, the pressure sensing film 14 being a resin film containing carbon particles 140; and, a pressure sensor 200 has the pressure sensing element 100, and a detection unit 210 which is electrically connected with the pressure sensing element 100 so as to detect contact resistance between the pressure sensing film 14 and the sensor electrode 12.

公开(公告)号：EP2031944A4

公开(公告)日：2009-12-09

申请号：EP08704242

申请日：2008-01-31

Applicant: NIPPON MEKTRON KK

Inventor： TOYOSHIMA RYOICHI

IPC: H05K1/02

CPC classification number: H05K1/0224 ,  H05K1/0245 ,  H05K1/0253 ,  H05K1/0393 ,  H05K2201/09236 ,  H05K2201/09272