公开(公告)号：EP1205967A3

公开(公告)日：2005-03-02

申请号：EP01130911.9

申请日：1996-04-08

Applicant: NORTH CAROLINA STATE UNIVERSITY

Inventor： Russell, Phillip E. ,  Griffis, Dieter P. ,  Shedd, Gordon M. ,  Stark, Terrence J. ,  Vitarelli, James

IPC: H01L21/306 ,  H01L21/311 ,  H01J37/32 ,  H01L21/04

CPC classification number: H01L21/31127 ,  H01J37/3056 ,  H01J2237/31744 ,  H01L21/3065 ,  H01L21/31138 ,  H01L21/32131

Abstract: Water vapour enhanced focused particle-beam-machining speeds up the removal of polymer-based dielectric materials from areas surrounding metallic interconnects on integrated circuits while at the same time decreasing the rate of removal of aluminium. Selective material removal protects metal interconnects from machining damage and greatly reduces the time that protective material is exposed to the particle beam.

公开(公告)号：EP1205967A2

公开(公告)日：2002-05-15

申请号：EP01130911.9

申请日：1996-04-08

Applicant: NORTH CAROLINA STATE UNIVERSITY

Inventor： Russell, Phillip E. ,  Griffis, Dieter P. ,  Shedd, Gordon M. ,  Stark, Terrence J. ,  Vitarelli, James

IPC: H01L21/306 ,  H01L21/311

CPC classification number: H01L21/31127 ,  H01J37/3056 ,  H01J2237/31744 ,  H01L21/3065 ,  H01L21/31138 ,  H01L21/32131

Abstract: Water vapour enhanced focused particle-beam-machining speeds up the removal of polymer-based dielectric materials from areas surrounding metallic interconnects on integrated circuits while at the same time decreasing the rate of removal of aluminium. Selective material removal protects metal interconnects from machining damage and greatly reduces the time that protective material is exposed to the particle beam.

Abstract translation: 水蒸气增强的聚焦粒子束加工加速了从集成电路上的金属互连周围的区域去除基于聚合物的电介质材料，同时降低了铝的去除速率。 选择性材料去除保护金属互连免受加工损伤，并大大减少保护材料暴露于粒子束的时间。

公开(公告)号：EP1205967B1

公开(公告)日：2009-07-22

申请号：EP01130911.9

申请日：1996-04-08

Applicant: NORTH CAROLINA STATE UNIVERSITY

Inventor： Russell, Phillip E. ,  Griffis, Dieter P. ,  Shedd, Gordon M. ,  Stark, Terrence J. ,  Vitarelli, James

IPC: H01L21/306 ,  H01L21/311 ,  H01J37/32 ,  H01L21/04

CPC classification number: H01L21/31127 ,  H01J37/3056 ,  H01J2237/31744 ,  H01L21/3065 ,  H01L21/31138 ,  H01L21/32131