公开(公告)号：EP1691340A4

公开(公告)日：2012-06-27

申请号：EP04820127

申请日：2004-11-26

申请人： OHMI TADAHIRO ,  ZEON CORP

发明人： OHMI TADAHIRO ,  MORIMOTO AKIHIRO ,  SUZUKI TERUHIKO ,  KATO TAKEYOSHI

IPC分类号： G09F9/30 ,  G02F1/1333 ,  G02F1/1368 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/77 ,  H01L27/12 ,  H01L29/417 ,  H01L29/786 ,  H05B33/14

CPC分类号： G02F1/1368 ,  G02F2001/133357 ,  H01L27/12 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/1285 ,  H01L27/1292 ,  H01L29/41733 ,  H01L29/66742 ,  H01L29/78636

公开(公告)号：EP1651018A4

公开(公告)日：2009-11-11

申请号：EP04735653

申请日：2004-06-01

申请人： OHMI TADAHIRO ,  ZEON CORP

发明人： OHMI TADAHIRO ,  MORIMOTO AKIHIRO ,  SUZUKI TERUHIKO ,  KATO TAKEYOSHI

IPC分类号： H05K3/10 ,  G09F9/30 ,  H05K3/00 ,  H05K3/14

CPC分类号： H05K3/107 ,  H05K3/0023 ,  H05K3/143 ,  H05K2201/0108

公开(公告)号：EP1238942A4

公开(公告)日：2005-07-06

申请号：EP00931707

申请日：2000-06-05

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAWADA KOUJI ,  IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO ,  MINAMI YUKIO ,  TUBOTA KENJI ,  HONIDEN TERUO ,  HIRAI TOURU ,  KOMEHANA KATUNORI ,  HIRAO KEIJI

IPC分类号： B01J8/02 ,  B01J10/00 ,  B01J12/00 ,  C01B5/00

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for moisture generation completely preventing hydrogen gas from being ignited, back fire to a gas feed source side from occurring, and a platinum coating catalyst layer from being peeled off inside a reactor main body for moisture generation so as to further increase the safety of the reactor for moisture generation and reduce a dead space of an internal space inside the reactor main body in order to further reduce the size of the reactor main body, wherein an inlet side reactor main body member (1) having a gas feed port (1a) and an outlet side reactor main body member (2) having a moisture gas outlet port (2a) are combined opposedly to each other, these both members are welded with each other so as to form a reactor main body A, a reflector is provided inside the internal space (V) of the reactor main body, a platinum coating catalyst layer (8) is formed on the inner wall surface of the outlet side reactor main body member (2), and hydrogen and oxygen fed from the gas feed port (1a) to the internal space (V) of the reactor main body A are brought into contact with the platinum coating film (8b) to activate its reactivity, whereby hydrogen and oxygen are reacted under noncombustion state so as to produce water.

公开(公告)号：EP0922667A4

公开(公告)日：2003-05-28

申请号：EP98924654

申请日：1998-06-12

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  MINAMI YUKIO ,  KAWADA KOJI ,  TANABE YOSHIKAZU ,  IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.

公开(公告)号：EP1167574A4

公开(公告)日：2007-10-24

申请号：EP00900373

申请日：2000-01-13

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  SHIRAI YASUYUKI ,  IKEDA NOBUKAZU ,  IDETA EIJI ,  MORIMOTO AKIHIRO ,  OGUSHI TETSUTARO ,  KONISHI TAKEHISA

IPC分类号： H01L21/28 ,  C23C8/02 ,  C23C26/00 ,  C23C30/00

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： A metallic material having, formed thereon, a chromium oxide passive film, characterized in that the metallic material has a surface roughness (Ra) of 1,5 mu m or less and the passive film is formed by a method comprising coating the metallic material with chromium and then subjecting the resultant coated material to a heat treatment in an oxidizing gas atmosphere. The present invention can be used for forming a chromium oxide film which contains no oxide film of another metal and is excellent in corrosion resistance on an arbitrary type of metal at a low cost in a short period of time, and thus for providing a system for supplying a highly corrosive fluid in safety.

公开(公告)号：EP1603190A4

公开(公告)日：2006-12-27

申请号：EP04711696

申请日：2004-02-17

申请人： OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  MORIMOTO AKIHIRO ,  NAKAMURA FUMIAKI

IPC分类号： H01Q1/38 ,  H01Q9/04

CPC分类号： H01Q9/0485

摘要： A dielectric resonator antenna which emits an electric wave by having a dielectric body resonate is disclosed. A magnetic material is contained in the electric body, thereby increasing the relative permeability to more than 1 and lowering the relative permittivity. Consequently, the Q-value of the resonance can be lowered while maintaining the rate of wavelength shortening. With this technique, a broadband dielectric resonator antenna can be realized.

公开(公告)号：EP0878443A4

公开(公告)日：2006-09-27

申请号：EP97901265

申请日：1997-01-27

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAWADA KOJI ,  TANABE YOSHIKAZU ,  NITTA TAKAHISA ,  IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO ,  HIRAO KEIJI ,  MOROKOSHI HIROSHI ,  MINAMI YUKIO

IPC分类号： C01B5/00 ,  B01J4/04 ,  B01J8/02 ,  B01J8/06 ,  B01J12/00 ,  B01J19/24

CPC分类号： C01B5/00

摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.

摘要翻译： 本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层 反应器主体的在一段长时间内保持高的催化活性。 具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上 主体的壁面上。 氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。 该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧 的氢气和氧气。 在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成 ，以及形成在该阻挡涂层的铂涂层。

公开(公告)号：EP1593888A4

公开(公告)日：2006-02-01

申请号：EP04709363

申请日：2004-02-09

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  KITANO MASAFUMI ,  MORIMOTO AKIHIRO

IPC分类号： H01L21/205 ,  F16K7/14 ,  F16K27/00 ,  F16K51/02 ,  F16K7/12

CPC分类号： F16K7/14 ,  F16K27/003 ,  F16K51/02

摘要： A valve in accordance with the reduction in diameter of piping in a vacuum discharge system, the reduction realizing downsizing of apparatuses for a vacuum discharge system and resultant reduced costs and shortened time for vacuum discharge. In the valve, inside corrosion, clogging, seat leakage, etc. by accumulation of dissociated products produced by decomposition of gas can be prevented from occurring. Specifically, passive aluminum is used for piping components, such as the valve, adapted for a vacuum discharge system so as to control decomposition of gas caused by rise in temperature during baking, so that components suitable for the reduction in diameter sizes in the vacuum discharge system are provided. Corrosion, clogging, seat leakage, etc. caused by decomposition of gas are prevented from occurring.

公开(公告)号：EP1096351A4

公开(公告)日：2004-12-15

申请号：EP00913087

申请日：2000-04-03

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAGATSUME SATOSHI ,  SUGIYAMA KAZUHIKO ,  MINAMI YUKIO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  YONEHANA KATSUNORI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  HIROSE JUN ,  FUKAZAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI ,  MORIMOTO AKIHIRO ,  UNO TOMIO ,  IDETA EIJI ,  MATSUMOTO ATSUSHI ,  UENOYAMA TOYOMI ,  HIROSE TAKASHI

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.

摘要翻译： 用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有 在其它流动通道的稳流瞬态效应。 为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道达在一个特定的延迟时间ΔT的一组流量Qs 从起点。 这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式 理论上推导做了与压力比不低于临界压力比更高流动。 从做过公式，则流程因数被定义，所以做了式可以被应用到许多用流动因素气体类型。 该方法包括：在下游侧计算通过传递到孔口雅丁式QC = KP1（K =常数）具有压力P1的气体的QC流量上设置节流孔上游侧的两次或更多次高于压力P2 ，worin流量因数FF为每种气体的计算如下： FF =（K /伽马S）A2 /（卡帕+ 1）U <1 /（卡帕-1）>是κ/ A（卡帕 + 1）RUU <1.2> 和worin，如果气体类型A的计算的流速是QA，并且，当将B型气体被允许在相同的压力下，通过相同的孔中流动的上游侧 并在上游侧相同的温度，流率QB的计算公式如下： QB =（FFB / FFA）QA 其中YS =标准状态的气体的浓度; Kappa值=气体的比热的比值; R为气体的=常数; K =比例常数不依赖于气体的类型; FFA =气体类型A的流动系数; 气体类型B. 的和FFB =流量系数

公开(公告)号：EP1707858A4

公开(公告)日：2008-10-08

申请号：EP05703504

申请日：2005-01-13

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  MINAMI YUKIO ,  TUBOTA KENJI ,  SHINOHARA TSUTOMU ,  YAMAJI MICHIO ,  IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO ,  KAWADA KOJI ,  NARIAI TOSHIRO

IPC分类号： F16K51/00 ,  F16L59/06 ,  F16K27/00 ,  F16K51/02

CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

摘要： A vacuum heat insulation valve that can be used in high-temperature conditions in a gas supply system and gas discharge system and that can be drastically reduced in size and made compact because of excellent heat insulating performance of the valve. A vacuum heat insulation valve constructed from a valve that has a valve body and an actuator and from a vacuum insulation box that receives the valve. The vacuum heat insulation box (S) is constructed from a rectangular lower vacuum jacket (S5) that has on its side face a tubular vacuum insulation piping receiving section (J) and whose upper face is opened, and from a rectangular upper vacuum jacket (S4) that is air-tightly fitted to the lower vacuum jacket (S5) from the above and whose lower face is opened.

摘要翻译： 一种真空绝热阀，可用于供气系统和排气系统的高温条件下，由于阀门具有优异的绝热性能，可大幅度减小尺寸并制成紧凑的结构。 由阀门构成的真空隔热阀，该阀门具有阀体和致动器，以及来自容纳阀门的真空绝热箱。 真空隔热箱（S）由矩形的下部真空夹套（S5）构成，其侧面具有管状真空隔热管接收部分（J）并且其上表面开口，并且从矩形上部真空夹套 S4）从上方气密地装配到下部真空夹套（S5）并且其下表面打开。