公开(公告)号：EP1996002A1

公开(公告)日：2008-11-26

申请号：EP07715091.0

申请日：2007-02-22

申请人： Panasonic Corporation

发明人： TANIGUCHI, Yasushi, c/o Matsushita Electric Industrial Co., Ltd. ,  NAKATANI, Seiichi, c/o Matsushita Electric Industrial Co., Ltd. ,  KARASHIMA, Seiji, c/o Matsushita Electric Industrial Co., Ltd. ,  KITAE, Takahashi, c/o Matsushita Electric Industrial Co., Ltd. ,  MATSUOKA, Susumu, c/o Matsushita Electric Industrial Co., Ltd. ,  KOYAMA, Masayoshi, c/o Matsushita Electric Industrial Co., Ltd.

IPC分类号： H05K3/34 ,  H01L21/60

CPC分类号： H05K3/3484 ,  H01L21/4853 ,  H01L21/6835 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/742 ,  H01L24/81 ,  H01L2224/11003 ,  H01L2224/11005 ,  H01L2224/11522 ,  H01L2224/13099 ,  H01L2224/16 ,  H01L2224/81801 ,  H01L2224/83886 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01009 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01087 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/15787 ,  H01L2924/15788 ,  H05K2203/0278 ,  H05K2203/043 ,  H05K2203/0776 ,  H05K2203/087 ,  Y10T29/49124 ,  Y10T29/49147 ,  Y10T29/49149 ,  Y10T29/49155 ,  Y10T29/532 ,  Y10T29/53204 ,  H01L2924/00

摘要： In a method for forming bumps 19 on electrodes 32 of a wiring board 31, a fluid 14 containing conductive particles 16 and a gas bubble generating agent is supplied onto a first region 17 including the electrodes 32 on the wiring board 31. Then, a substrate 40 which has a protruding surface 13 having the same area as that of the first region 17 and formed on a main surface 18 of the substrate 40 having a larger area than that of the first region 17 is disposed so that the protruding surface 13 faces the first region 17 of the wiring board 31 . Then, the fluid 14 is heated to generate gas bubbles 30 from the gas bubble generating agent contained in the fluid 14.