公开(公告)号：EP0192294A1

公开(公告)日：1986-08-27

申请号：EP86200176.5

申请日：1986-02-10

申请人： Philips Electronics N.V.

发明人： Van Gorkom, Gerardus Gregorius Petrus ,  Hoeberechts, Arthur Marie Eugene ,  Van der Mast, Karel Diederick ,  Tolner, Harm

IPC分类号： H01J1/30 ,  H01J3/02 ,  H01J37/073

CPC分类号： H01J1/308 ,  H01J37/073

摘要： An electron beam apparatus comprising a semiconductor electron emitter whose emissive surface dimensions are determined by dimensions of a p-n junction provided in the semiconductor element. By optimizing the dimensions of the emissive surface in relation to the electron-optical properties of the apparatus, an emitter is realized which combines optimum beam formation or imaging with a sufficiently large beam current and a high beam current density as required by the apparatus.

公开(公告)号：EP1102304A2

公开(公告)日：2001-05-23

申请号：EP01200763.9

申请日：1997-12-08

申请人： Koninklijke Philips Electronics N.V.

发明人： Bormans, Bernardus Jacobus Marie ,  De Jong, Alan Frank ,  Van der Mast, Karel Diederick ,  Wagner, Raymond ,  Asselbergs, Peter Emile Stephan Joseph

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/2001

摘要： In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end 20 of the specimen holder 7 by means of a separate transport unit 13, 36 so that it is not necessary to remove the specimen holder 7 in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source 22, 28 can take place via a flexible cooling conduit 30 which extends directly to the end 20 to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations.

摘要翻译： 在电子显微镜中，有时重要的是可以在非常低的温度下（例如液态氦）进行研究。 在已知的样品架的情况下，通过在样品架中的孔供给冷却介质来冷却试样; 这样每次当样品被更换时，导致移除的标本夹持器的热漂移，并且与连接到试样夹持器的杜瓦瓶一起存在声耦合（即振动的传递）。 根据本发明，试样通过单独的运输单元13,36布置在试样架7的端部20上，从而不需要移除样品架7以便更换试样， 导致样品架不加热。 此外，与冷源22,28的联接可以经由柔性冷却导管30进行，柔性冷却导管30直接延伸到待冷却的端部20并且可以永久地连接到其上，从而避免了振动的传递。

公开(公告)号：EP0314216A1

公开(公告)日：1989-05-03

申请号：EP88202232.0

申请日：1988-10-06

申请人： Philips Electronics N.V.

发明人： Van der Mast, Karel Diederick

IPC分类号： H01J37/30

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3177

摘要： A charged-particle beam apparatus comprises a beam splitting/alignment system whereby individual beams or groups of individual beams can be independently aligned so that they can be brought out of focus in a focal plane of the individual beams, so that a beam limiting diaphragm arranged at that area is irradiated more uniformly with a smaller beam loss.

摘要翻译： 带电粒子束装置包括一个分束/对准系统，其中单个光束或各组光束可以独立对准，使得它们可以在各个光束的焦平面中脱离焦点，使得光束限制膜排列 在该区域以更小的光束损耗更均匀地照射。