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公开(公告)号：EP2115345A2
公开(公告)日：2009-11-11
申请号：EP08728370.1
申请日：2008-01-28
CPC分类号： C23C16/4409 , C23C16/4482 , F16J15/0887 , F16J15/128 , Y10T428/13
摘要： This invention relates to a vapor or liquid phase reagent dispensing apparatus comprising a vessel (40) which comprises a removable top wall member (20), a sidewall member (22) and a bottom wall member (26) configured to form an internal vessel compartment; said sidewall member (22) having a protuberance (24) that extends into the internal vessel compartment adjacent to the top wall member (20); said top wall member (20) and said protuberance (24) having opposing flat surfaces, wherein the opposing flat surfaces are not in contact with one another and at least a portion of the opposing flat surfaces are hardened (30); and a metal seal (10) aligned and in contact with the hardened opposing flat surfaces (30) of said top wall member (20) and said protuberance (24). The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
摘要翻译： 本发明涉及一种蒸气相或液相反应物分配装置，其包括容器（40），该容器包括可移除的顶壁构件（20），侧壁构件（22）和底壁构件（26），其构造成形成内部容器隔室 ; 所述侧壁构件具有突出部分，所述突出部分延伸到邻近所述顶壁构件的所述内部容器隔室中; 所述顶壁部件（20）和所述凸起（24）具有相对的平坦表面，其中所述相对的平坦表面不彼此接触，并且所述相对的平坦表面的至少一部分被硬化（30）。 以及与所述顶壁构件（20）和所述突起（24）的硬化的相对平坦表面（30）对准并接触的金属密封件（10）。 分配设备可以用于分配试剂，例如用于在制造半导体材料和装置中沉积材料的前体。
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公开(公告)号：EP3212392A1
公开(公告)日：2017-09-06
申请号：EP15791455.7
申请日：2015-10-28
发明人： SINHA, Ashwini, K. , GUO, Qiong , YARDIMCI, Ozlem , SMITH, Stanley, M. , SPOHN, Ronald, F. , BURSAC, Ranko
CPC分类号： F17C1/00 , B32B1/08 , B32B27/08 , B32B27/12 , B32B27/40 , C08J7/047 , C08J2333/04 , C08J2363/00 , C08J2367/00 , C08J2379/08 , C08J2475/02 , C08J2475/04 , F17C1/10 , F17C2201/0109 , F17C2201/0119 , F17C2203/0621 , F17C2203/0639 , F17C2203/0646 , F17C2203/066 , F17C2203/0665 , F17C2203/0673 , F17C2203/0675 , F17C2205/0329 , F17C2205/0394 , F17C2221/011 , F17C2221/012 , F17C2221/013 , F17C2221/016 , F17C2221/017 , F17C2221/03 , F17C2221/031 , F17C2221/033 , F17C2223/0123 , F17C2223/036 , F17C2260/012 , Y02E60/321
摘要： Disclosed are articles useful as the body of a container for containing gas under pressure, and containers which comprise the articles to which are affixed valves to control the flow of gas out of the container, wherein the articles comprise a hollow container body, having an external surface and having an opening through which gas can enter or leave the interior of the hollow container body; optionally but preferably a layer of fiber-reinforced polymer around the exterior of the container body, and an external layer of elastomer around and sealed to the external surface of the layer of fiber-reinforced polymer if present or else to the cylinder body.
摘要翻译： 本发明公开了一种用作包含压力气体的容器主体的物品，以及包括固定阀以控制气体流出容器的物品的容器，其中物品包括中空容器主体，其具有外部 表面并具有开口，气体可通过开口进入或离开中空容器主体的内部; 任选地但优选地在容器主体的外部周围的纤维增强聚合物层以及围绕并密封到纤维增强聚合物层的外表面（如果存在的话）或外部密封到圆筒体的外层的弹性体外层。
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公开(公告)号：EP3212392B1
公开(公告)日：2020-11-25
申请号：EP15791455.7
申请日：2015-10-28
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公开(公告)号：EP2115345B1
公开(公告)日：2016-08-24
申请号：EP08728370.1
申请日：2008-01-28
CPC分类号： C23C16/4409 , C23C16/4482 , F16J15/0887 , F16J15/128 , Y10T428/13
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公开(公告)号：EP2861779A1
公开(公告)日：2015-04-22
申请号：EP13735488.2
申请日：2013-06-14
IPC分类号： C23C16/448 , C23C8/06 , F17C1/10
CPC分类号： F17C1/00 , C23C16/448 , F17C2203/0607 , F17C2209/232 , F17C2223/0123 , F17C2270/0518
摘要： Novel cylinder passivation procedures to increase the room temperature stability of gaseous tin deuteride (SnD
4 ) are described. Incorporation of specific organic-containing materials, which when applied onto surfaces of a vessel and/or conduit extending therefrom, can increase the shelf life stability of thermodynamically unstable gases stored within such pretreated vessels.
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