公开(公告)号：EP2873958A1

公开(公告)日：2015-05-20

申请号：EP14193262.4

申请日：2014-11-14

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Zhang, Weibin ,  Fink, Anita ,  Fahimi, Saeed ,  Childress, Kimiko J.

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/06

CPC classification number: G01L1/14 ,  G01L9/0047 ,  G01L9/0075 ,  G01L19/0076 ,  G01L19/0618

Abstract: A capacitive pressure sensor (100) includes a substrate wafer (114) and a diaphragm wafer (112). The substrate wafer defines a substrate recess (R") with a first depth (D2). The diaphragm wafer defines a diaphragm recess (R"') with a second depth (D3). The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber (126).

Abstract translation: 电容式压力传感器（100）包括衬底晶片（114）和光阑晶片（112）。 衬底晶片限定具有第一深度（D2）的衬底凹槽（R“）。膜片晶片限定具有第二深度（D3）的隔膜凹部（R”'）。 隔膜晶片结合到基板晶片，使得基板和隔膜凹槽形成高度差分压力室（126）。

公开(公告)号：EP2873958B1

公开(公告)日：2019-08-07

申请号：EP14193262.4

申请日：2014-11-14

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Zhang, Weibin ,  Fink, Anita ,  Fahimi, Saeed ,  Childress, Kimiko J.

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/06

公开(公告)号：EP3726245A1

公开(公告)日：2020-10-21

申请号：EP19216017.4

申请日：2019-12-13

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Ramthun, Kent Allan ,  Zhang, Weibin

IPC: G01S7/484 ,  G01S17/89 ,  G01S17/933

Abstract: Apparatus and associated methods relate to an array of independently-controllable laser diode bars 44A - 44Z configured to scan a linearly-structured beam of light upon a scene. Each of the independently-controllable laser diode bars is distributed along a common axis. Each of the independently-controllable laser diode bars is configured to emit a beam of light in an emission direction D E orthogonal to the common axis. Each of the independently-controllable laser diode bars can be energized in a sequence, thereby scanning the scene in the direction of the common axis. Linear projector 22C has thus electronic scanning capability. Linear projector 22C includes an array of laser diode bar 72 that includes rows of laser diodes 44A - 44Z. Each of the laser diodes in a particular row 44A - 44Z is aligned along a fast-axis direction with the other laser diodes in that particular row 44A - 44Z. Each of the laser diode rows 44A - 44Z can be independently energized in turn. In the depicted embodiment laser diode row 44N is energized. Each of the laser diode rows 44A - 44Z are configured to generate a linear beam 32C of light that is collimated and/or focused by cylindrical lenses 45A - 45N, 46 and 50 in a fast-axis direction D FA . The linear beam emitted by each row of laser diodes 44A - 44Z is then diverged in a slow axis direction DSA, by cylindrical lens 48. For example, the laser diode rows 44A - 44Z can be energized in a sequence from top row 44A to bottom row 44Z, so as to generate a corresponding sequence of linear beams focused at different angles of elevation with respect to linear projector 22C.