Abstract:
A pressure sensor assembly (100) includes a pressure sensor (101) having a pressure sensing transducer connected to a plurality of electrode pins (103) via a plurality of electrode pads (105) disposed on the transducer, an inner casing (107) configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels (111) having the electrode pins disposed therein. The pressure sensor further includes an outer casing (115) holding the inner casing therein having a capsule header (117) with a plurality of capsule header electrode pin channels (119) defined therein which can include a ceramic seal (133) disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate (127) including an isolator plate fluid port (129) defined therein and a pressure isolator (131) disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.
Abstract:
A capacitive pressure sensor (100) includes a substrate wafer (114) and a diaphragm wafer (112). The substrate wafer defines a substrate recess (R") with a first depth (D2). The diaphragm wafer defines a diaphragm recess (R"') with a second depth (D3). The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber (126).
Abstract:
A transducer baseplate (100) includes a base (102), a protrusion (104) extending from the base along a longitudinal axis (A), a pair of opposed transducer receptacles (106) defined within the protrusion, and respective pressure plena (108). The pressure plena are separated by a plenum wall (110), each plenum being in fluid connection with an area external to the protrusion through a respective pressure line (112). The pressure lines provide a direct fluid path to their respective receptacles.
Abstract:
A dielectric header sub-assembly includes a header body (202) with opposed first (208) and second (210) surfaces and a side wall (212). The first and second surfaces define a header axis (A) extending therebetween. The side wall extends from the first surface to the second surface. The second surface includes a tapered portion (214). A dielectric header sub-assembly includes a bore (213). The bore extends from the first surface to the second surface. A first bore opening (224) of the bore proximate to the first surface is greater in area than a second bore opening (226) of the bore proximate the second surface. A method of assembling a header sub-assembly includes inserting an electrical connector (215) into a bore of a header body, applying an active braze filler material (228) into the bore and applying heat to braze the active braze filler material to the header body and the electrical connector.