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    DREHRATENSENSOR MIT EINEM EINE HAUPTERSTRECKUNGSEBENE AUFWEISENDEN SUBSTRAT ZUR DETEKTION EINER DREHRATE
    3.
    发明公开
    DREHRATENSENSOR MIT EINEM EINE HAUPTERSTRECKUNGSEBENE AUFWEISENDEN SUBSTRAT ZUR DETEKTION EINER DREHRATE 审中-公开
    与延长密钥水平上具有基板检测转速旋转速率传感器

    公开(公告)号：EP2997330A1

    公开(公告)日：2016-03-23

    申请号：EP14724417.2

    申请日：2014-05-14

    申请人： Robert Bosch GmbH

    发明人： MAUL, Robert ,  KUHLMANN, Burkhard ,  HATTASS, Mirko ,  AMELING, Ralf ,  SCHMIDT, Benjamin ,  SCHEBEN, Rolf ,  BALSLINK, Thorsten

    IPC分类号： G01C19/5747

    CPC分类号： G01C19/5705 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

    摘要： The invention relates to a rotation rate sensor (100) for detecting a rotation rate, having a substrate (1) which has a main extension plane. The rotation rate extends in a direction either parallel or perpendicular to the main extension plane. The rotation rate sensor comprises a primary pair of seismic masses (11, 12) and a secondary pair of seismic masses (21, 22). The primary pair of seismic masses has a first primary mass (11) and a second primary mass (12), and the secondary pair of seismic masses has a first secondary mass (21) and a second secondary mass (22). The first primary mass and the second primary mass can be moved in relation to the substrate and with respect to each other in a primary deflection direction (P) parallel to the main extension plane of the rotation rate sensor, and the first secondary mass and the second secondary mass can be moved in relation to the substrate in a secondary deflection direction (S) parallel to the main extension plane of the rotation rate sensor. The first and second primary masses on the one hand and the first and second secondary masses on the other hand can be moved either antiparallel or parallel to each other in accordance with the particular deflection direction. The rotation rate sensor is characterized in that the primary deflection direction extends substantially perpendicularly to the secondary deflection direction. The primary pair of seismic masses and/or the secondary pair of seismic masses can be driven in such a way that, when the rotation rate sensor is rotated, the Coriolis force leads to the deflection of the first primary mass and the second primary mass and/or the deflection of the first secondary mass and the second secondary mass.

    DREHRATENSENSOR
    5.
    发明公开
    DREHRATENSENSOR 有权

    公开(公告)号：EP1478902A1

    公开(公告)日：2004-11-24

    申请号：EP02774413.5

    申请日：2002-09-25

    申请人： ROBERT BOSCH GMBH

    发明人： WILLIG, Rainer ,  FRANZ, Jochen ,  KUHLMANN, Burkhard ,  HAUER, Joerg ,  GOMEZ, Udo-Martin ,  MAURER, Dieter ,  DOERING, Christian ,  BAUER, Wolfram ,  BISCHOF, Udo ,  NEUL, Reinhard ,  CLASSEN, Johannes ,  LANG, Christoph ,  FREY, Jens

    IPC分类号： G01C19/56 ,  G01P3/14

    CPC分类号： G01C19/5747

    摘要： The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, the Coriolis element (2a, 2b) can be stimulated in such a way that it oscillates parallel to a first axis (X); a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is essentially perpendicular to the first axis (X), can be detected; and the first and second axes (X, Y) are parallel to the surface of the substrate. The inventive rotational rate sensor is characterised in that force-mediating means (19, 20) are provided for mediating the action of a force between the substrate and the Coriolis element (2a, 2b).

    摘要翻译： 本发明涉及一种旋转速率传感器，其包括衬底和科里奥利元件（2a，2b），所述科里奥利元件（2a，2b）布置在衬底的表面上。 根据本发明，科里奥利元件（2a，2b）可以以平行于第一轴（X）振荡的方式受到刺激; 可以检测由科里奥利力在基本上垂直于第一轴（X）的第二轴（Y）中引起的科里奥利元件（2a，2b）的偏差; 并且第一和第二轴线（X，Y）平行于基板的表面。 本发明的旋转速率传感器的特征在于，提供力介导装置（19,20）用于调节衬底与科里奥利元件（2a，2b）之间的力的作用。

    DREHRATENSENSOR
    8.
    发明公开
    DREHRATENSENSOR 有权

    公开(公告)号：EP1377797A1

    公开(公告)日：2004-01-07

    申请号：EP02708248.6

    申请日：2002-02-14

    申请人： ROBERT BOSCH GMBH

    发明人： WILLIG, Rainer ,  THOMAE, Andreas ,  KUHLMANN, Burkhard ,  HAUER, Joerg ,  GOMEZ, Udo-Martin ,  GOETZ, Siegbert ,  DOERING, Christian ,  FEHRENBACH, Michael ,  BAUER, Wolfram ,  BISCHOF, Udo ,  NEUL, Reinhard ,  FUNK, Karsten ,  LUTZ, Markus ,  WUCHER, Gerhard ,  FRANZ, Jochen

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5747

    摘要： The invention relates to a rotation rate sensor comprising a first and a second Coriolis element (100, 200) that are disposed side by side across the surface (1) of a substrate. Said Coriolis elements (100, 200) are induced to oscillate parallel to a first axis (Y). The Coriolis elements (100, 200) are deflected in a second axis (X) that is perpendicular to the first axis (Y) through the effect of a Coriolis force. The oscillations of the first and second Coriolis elements (100, 200) proceed in antiphase on trajectories that, without the effect of a Coriolis force, are two parallel straight lines.

    摘要翻译： 一种偏转速率传感器，包括在衬底表面上并排设置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。