MAGNETORESISTIVES SENSORELEMENT UND VERFAHREN ZUR REDUKTION DES WINKELFEHLERS EINES MAGNETORESISTIVEN SENSORELEMENTS
    2.
    发明授权
    MAGNETORESISTIVES SENSORELEMENT UND VERFAHREN ZUR REDUKTION DES WINKELFEHLERS EINES MAGNETORESISTIVEN SENSORELEMENTS 有权
    磁阻传感器元件和方法,用于还原的磁阻传感器元件的误差角的

    公开(公告)号:EP1567878B1

    公开(公告)日:2008-02-27

    申请号:EP03769233.2

    申请日:2003-10-09

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01R33/09

    CPC分类号: B82Y25/00 G01R33/093

    摘要: The invention relates to a magnetoresistive sensor element (5) comprising a magnetoresistive system of layers (10), which is constructed according to the spin valve principle and operates on the basis of the GMR effect, at least some sections of said system being strip-shaped when viewed from above. Said strip-shaped system of layers (10) comprises a reference layer (35) with a magnetisation direction that remains practically unaffected by the direction of an external magnetic field acting on said system. During operation, the sensor element (5) provides a measuring signal, which, as a function of a measuring angle, fluctuates between the component of the field strength of the external magnetic field, said component lying on the plane of the system of layers (10), and the magnetisation direction, whereby the measuring angle can be determined from said signal. In addition, when the strip-shaped system of layers (10) is viewed from above, the angle formed by the magnetisation direction, in the absence of the external magnetic field, and the longitudinal direction of the strip-shaped system of layers (10) is adjusted in such a way that when the external magnetic field is acting with a defined field strength, selected from a predetermined working interval, the angular error of the system of layers (10) is practically minimal, as a function of said angle and the field strength. The invention also relates to a method for reducing the angular error of a magnetoresistive sensor element (5).

    GMR-STRUKTUR UND VERFAHREN ZU DEREN HERSTELLUNG
    3.
    发明授权
    GMR-STRUKTUR UND VERFAHREN ZU DEREN HERSTELLUNG 有权
    GMR结构及其制造方法

    公开(公告)号:EP1358502B1

    公开(公告)日:2005-10-26

    申请号:EP02701230.1

    申请日:2002-01-25

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01R33/09

    CPC分类号: B82Y25/00 G01R33/093

    摘要: The invention relates to a method for the production of a GMR structure, wherein a metal multilayer (12) is placed on a support (10, 12, 30, 34) and said metal multilayer (14) is structured to produce a GMR structure. The support (10, 12, 30, 34) has a structure before the metal layer is placed thereon and structuring is performed by means of CMP. The invention also relates to a GMR structure comprised of a support (10, 12, 30, 34) and a structured metal multilayer that is arranged on said support (10, 12, 30, 34), wherein the structured metal multilayer (14) is arranged in one or several recesses (50) in the support (10, 12, 30, 34). The invention further relates to the use of GMR structures.

    MAGNETORESISTIVES SENSORELEMENT UND VERFAHREN ZUR REDUKTION DES WINKELFEHLERS EINES MAGNETORESISTIVEN SENSORELEMENTS
    6.
    发明公开
    MAGNETORESISTIVES SENSORELEMENT UND VERFAHREN ZUR REDUKTION DES WINKELFEHLERS EINES MAGNETORESISTIVEN SENSORELEMENTS 有权
    磁阻传感器元件和方法,用于还原的磁阻传感器元件的误差角的

    公开(公告)号:EP1567878A2

    公开(公告)日:2005-08-31

    申请号:EP03769233.2

    申请日:2003-10-09

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01R33/09

    CPC分类号: B82Y25/00 G01R33/093

    摘要: The invention relates to a magnetoresistive sensor element (5) comprising a magnetoresistive system of layers (10), which is constructed according to the spin valve principle and operates on the basis of the GMR effect, at least some sections of said system being strip-shaped when viewed from above. Said strip-shaped system of layers (10) comprises a reference layer (35) with a magnetisation direction that remains practically unaffected by the direction of an external magnetic field acting on said system. During operation, the sensor element (5) provides a measuring signal, which, as a function of a measuring angle, fluctuates between the component of the field strength of the external magnetic field, said component lying on the plane of the system of layers (10), and the magnetisation direction, whereby the measuring angle can be determined from said signal. In addition, when the strip-shaped system of layers (10) is viewed from above, the angle formed by the magnetisation direction, in the absence of the external magnetic field, and the longitudinal direction of the strip-shaped system of layers (10) is adjusted in such a way that when the external magnetic field is acting with a defined field strength, selected from a predetermined working interval, the angular error of the system of layers (10) is practically minimal, as a function of said angle and the field strength. The invention also relates to a method for reducing the angular error of a magnetoresistive sensor element (5).

    MAGNETORESISTIVES SCHICHTSYSTEM UND SENSORELEMENT MIT DIESEM SCHICHTSYSTEM
    7.
    发明公开
    MAGNETORESISTIVES SCHICHTSYSTEM UND SENSORELEMENT MIT DIESEM SCHICHTSYSTEM 审中-公开
    磁阻层系统和传感器元件与此系统层

    公开(公告)号:EP1527351A1

    公开(公告)日:2005-05-04

    申请号:EP03787611.7

    申请日:2003-06-26

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01R33/09

    摘要: Disclosed is a magnetoresistive layer system (5), wherein a layer arrangement (15) is provided in the vicinity of a magnetoresistive layer stack (14), particularly one working on the basis of the GMR or AMR effect. Said layer arrangement produces a magnetic field, which acts upon the magnetoresistive layer stack (14), and contains at least one soft-magnetic layer (13). The invention also relates to a sensor element especially used for the detection of magnetic fields in relation to intensity and/or direction, comprising said layer system (5).

    MAGNETORESISTIVE SCHICHTANORDNUNG UND GRADIOMETER MIT EINER DERARTIGEN SCHICHTANORDNUNG
    8.
    发明公开
    MAGNETORESISTIVE SCHICHTANORDNUNG UND GRADIOMETER MIT EINER DERARTIGEN SCHICHTANORDNUNG 审中-公开
    磁阻层排列和梯度仪这样的层排列

    公开(公告)号:EP1399750A1

    公开(公告)日:2004-03-24

    申请号:EP02742751.7

    申请日:2002-05-16

    申请人: Robert Bosch GmbH

    IPC分类号: G01R33/09 G01R33/022

    摘要: A magneto-resistive layer arrangement (5) with a layer sequence (16), comprising at least two magnetic layers (12, 12') is disclosed, between which a non-magnetic electrically conducting intermediate layer (13) is arranged, whereby the electrical resistance of the layer arrangement (5) may change in relation to an external magnetic field acting on said layer arrangement (5). Furthermore, at least one magnetically hard layer (15) is at least partly integrated in the layer arrangement (5), affecting at least one region of a boundary region between the magnetic layers (12, 12') and the intermediate layer with a magnetic field. Said magneto-resistive layer arrangement (5) is particularly suitable for application in a GMR sensor element with coupled multi-layers or an AMR sensor element with a barbers-pole structure. In addition a gradiometer (30) with a number of said layer arrangements (5) is disclosed.

    VERFAHREN ZUR KORREKTUR VON WINKELMESSUNGEN MITTELS WENIGSTENS ZWEIER CODESPUREN
    9.
    发明公开
    VERFAHREN ZUR KORREKTUR VON WINKELMESSUNGEN MITTELS WENIGSTENS ZWEIER CODESPUREN 审中-公开
    法修正角测至少两条轨道CODE

    公开(公告)号:EP1314004A1

    公开(公告)日:2003-05-28

    申请号:EP01971624.0

    申请日:2001-08-21

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01D18/00 G01B7/30

    摘要: The invention relates to a method for the computational correction of angular position measurements, using two coded wheels (1a, 1b). The method allows assembly and production errors, in particular, to be retrospectively corrected. The method is essentially characterised in that during an initial calibration, the errors of the input variables, or signals derived therefrom, are determined and stored by means of a reference angle sensor. The errors (Δα(ζ1), Δβ(ζ1)) are filtered using a Fourier analysis. During operation, the filtered errors are deducted from the measured angle values, depending on the rotational angle. This correction can be iteratively repeated, in such a way that the error angle is reduced to a minimum.

    MAGNETORESISTIVER SENSOR ZUR ABTASTUNG EINES MAGNETISCHEN MULTIPOLRADES
    10.
    发明公开
    MAGNETORESISTIVER SENSOR ZUR ABTASTUNG EINES MAGNETISCHEN MULTIPOLRADES 有权
    磁阻传感器用于检测磁性的多

    公开(公告)号:EP1314003A1

    公开(公告)日:2003-05-28

    申请号:EP01971625.7

    申请日:2001-08-21

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01D5/16 G01D5/245

    CPC分类号: G01D5/145 G01D5/2451

    摘要: The invention relates to a magneto-resistive sensor for scanning a magnetic multipole wheel, said sensor scanning a large number of uniformly arranged magnetic pole pairs. The sensor has four magneto-resistive resistances, which are electrically connected as a Wheatstone-bridge comprising two half-bridges and emit a sinusoidal or cosinusoidal signal. To suppress the third and/or the fifth harmonic wave of the scanning signal, the distance between the two half-bridges is selected in such a way that it is not equal to half the wavelength (&lambda).