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公开(公告)号：EP2907588A2
公开(公告)日：2015-08-19
申请号：EP14178357.1
申请日：2014-07-24
IPC分类号： B06B1/02
CPC分类号： H04R23/00 , B06B1/0292 , B06B1/0685 , G10K11/002 , H04R2201/003
摘要： An electro-acoustic transducer includes a conductive substrate provided with at least one cell and at least one electrode, and a pad substrate disposed corresponding to the conductive substrate and provided with at least one pad corresponding to the electrode, in which at least one of the electrode and the pad includes an electric pattern for electric connection and at least one dummy pattern that is provided around the electric pattern to be separated the electric pattern.
摘要翻译： 电声换能器包括设置有至少一个电池和至少一个电极的导电衬底以及与导电衬底相对设置并且设置有至少一个对应于电极的焊盘的焊盘衬底，其中，至少一个电极 电极和焊盘包括用于电连接的电图案和设置在电图案周围以分离电图案的至少一个虚设图案。
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2.发明授权Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them 有权薄膜的微结构的MEMS开关具有这样的薄膜的微结构和对应Herstellunsverfahren
公开(公告)号：EP1653494B1
公开(公告)日：2011-03-23
申请号：EP05022713.1
申请日：2005-10-18
发明人： Kweon, Soon-cheol , Shin, Hyung-jae , Jeon, Byung-hee , Hong, Seok-kwan , Kim, Che-heung , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H1/0036
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公开(公告)号：EP1672662B1
公开(公告)日：2008-06-25
申请号：EP05025063.8
申请日：2005-11-16
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
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4.发明公开Seesaw MEMS switch for radio frequency and its manufacturing method 有权Mikroelektromechanischer WippenschalterfürFunkfrequenzsystem und dessen Herstellungsverfahren
公开(公告)号：EP1486999A2
公开(公告)日：2004-12-15
申请号：EP04252608.7
申请日：2004-05-05
发明人： Shin, Hyung-jae
IPC分类号： H01H23/02
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： In a seesaw-type MEMS switch for radio frequency (RF) and a method for manufacturing the same, the seesaw-type MEMS switch for radio frequency (RF) includes a substrate, a transmission line formed on the substrate having a gap therein to provide a circuit open condition, an intermittent part formed a predetermined distance from the substrate, the intermittent part being operable to contact the transmission line on both sides of the gap by performing a seesaw movement about a seesaw movement axis, and a driving part to drive the seesaw movement of the intermittent part in response to a driving signal.
摘要翻译： 在用于射频（RF）的跷跷板型MEMS开关及其制造方法中，用于射频（RF）的跷跷板型MEMS开关包括基板，形成在基板上的传输线，其中具有间隙以提供 电路打开状态，与基板形成预定距离的间歇部分，所述间歇部分可操作以通过围绕跷跷板运动轴线进行跷跷板运动而接触所述间隙的两侧的传输线;以及驱动部件， 响应于驱动信号的间歇部分的跷跷板运动。
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5.发明授权
公开(公告)号：EP1486999B1
公开(公告)日：2008-10-22
申请号：EP04252608.7
申请日：2004-05-05
发明人： Shin, Hyung-jae
IPC分类号： H01H59/00
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
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6.发明公开
公开(公告)号：EP1672662A1
公开(公告)日：2006-06-21
申请号：EP05025063.8
申请日：2005-11-16
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译： 微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且在基板的上表面和多个信号线之间包括开关接触点和多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推动杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外部致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。
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7.发明公开Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them 有权薄膜的微结构的MEMS开关具有这样的薄膜的微结构和对应Herstellunsverfahren
公开(公告)号：EP1653494A2
公开(公告)日：2006-05-03
申请号：EP05022713.1
申请日：2005-10-18
发明人： Kweon, Soon-cheol , Shin, Hyung-jae , Jeon, Byung-hee , Hong, Seok-kwan , Kim, Che-heung , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H1/0036
摘要： A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.
摘要翻译： 一种微薄膜结构，微机电系统（MEMS）开关，以及制造它们的方法。 微薄膜结构包括具有不同的性质和顺序层叠以形成在上层和下层，worin上部和下部层之间界面处形成的至少两个薄薄膜以在至少两个方向上取向。 微薄膜结构，以及形成的方法，可以被应用到一个MEMS开关的可动电极。 薄膜结构可以通过通孔在下层中形成，并且在被接合在通孔的形式沉积的上层形成。 可替代地，薄膜结构可以通过对下层的顶侧上形成凸起和凹陷部分，然后沉积在具有凹凸部分的下层的顶侧上的上层进行。
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公开(公告)号：EP1672661A3
公开(公告)日：2007-08-29
申请号：EP05024606.5
申请日：2005-11-10
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.
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9.发明公开
公开(公告)号：EP1486999A3
公开(公告)日：2006-03-22
申请号：EP04252608.7
申请日：2004-05-05
发明人： Shin, Hyung-jae
IPC分类号： H01H59/00
CPC分类号： H01P1/127 , H01H59/0009 , H01H2059/0054
摘要： In a seesaw-type MEMS switch for radio frequency (RF) and a method for manufacturing the same, the seesaw-type MEMS switch for radio frequency (RF) includes a substrate, a transmission line formed on the substrate having a gap therein to provide a circuit open condition, an intermittent part formed a predetermined distance from the substrate, the intermittent part being operable to contact the transmission line on both sides of the gap by performing a seesaw movement about a seesaw movement axis, and a driving part to drive the seesaw movement of the intermittent part in response to a driving signal.
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公开(公告)号：EP2907588A3
公开(公告)日：2015-12-16
申请号：EP14178357.1
申请日：2014-07-24
IPC分类号： B06B1/02
CPC分类号： H04R23/00 , B06B1/0292 , B06B1/0685 , G10K11/002 , H04R2201/003
摘要： An electro-acoustic transducer includes a conductive substrate provided with at least one cell and at least one electrode, and a pad substrate disposed corresponding to the conductive substrate and provided with at least one pad corresponding to the electrode, in which at least one of the electrode and the pad includes an electric pattern for electric connection and at least one dummy pattern that is provided around the electric pattern to be separated the electric pattern.
摘要翻译： 一种电声换能器包括：导电衬底，其设置有至少一个单元和至少一个电极;以及衬垫衬底，其对应于所述导电衬底而设置并且设置有与所述电极相对应的至少一个衬垫，其中至少一个 电极，并且所述垫包括用于电连接的电图案和至少一个虚设图案，所述虚设图案围绕所述电图案设置以与所述电图案分离。
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