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公开(公告)号:EP1417042B1
公开(公告)日:2013-01-23
申请号:EP02748647.1
申请日:2002-03-28
申请人: Schott AG
发明人: KUHR, Markus , WOLFF, Detlef , WALTHER, Marten , BEHLE, Stephan , BAUER, Stefan , KLIPPE, Lutz , MOELLE, Christoph , BEWIG, Lars , KOPPE, Frank , KÜPPER, Thomas , MARING, Wolfram , HEINZ, Jochen;
IPC分类号: B05D7/24
CPC分类号: G02B1/111 , B05D1/62 , B05D7/02 , B05D7/52 , C23C16/029 , C23C16/515 , G02B1/10
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公开(公告)号:EP1472195B1
公开(公告)日:2009-07-15
申请号:EP03704480.7
申请日:2003-01-28
申请人: Schott AG
CPC分类号: C03C17/3417 , H01J61/35
摘要: In order to improve the energy balance of an HID lamp, the quartz burner, preferably the inside thereof, is coated with a UV reflecting layer system by alternatingly applying amorphous thin layers made at least of titanium oxide and silicon oxide having the respective general stoichiometry TiOy and SiOx by means of a plasma impulse chemical vapor deposition (PICVD) method at a high power density and increased substrate temperatures ranging from 100 DEG to 400 DEG C, using small growth rates ranging from 1 nm/sec to 100 nm/sec so as to form an interference layer system having a thickness of less than 1200 nm and a minimized UV-active defective spot rate ranging from 0.1 to 1 percent.
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公开(公告)号:EP1415321B1
公开(公告)日:2005-05-11
申请号:EP02767344.1
申请日:2002-08-07
申请人: SCHOTT AG
发明人: BEHLE, Stephan , BEWIG, Lars , KÜPPER, Thomas , MARING, Wolfram , MÖLLE, Christoph , WALTHER, Marten
IPC分类号: H01J37/32
CPC分类号: H01J37/32229 , C23C16/511 , H01J37/32192
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