VERFAHREN ZUM BESCHICHTEN EINES QUARZBRENNERS EINER HID-LAMPE
    2.
    发明授权
    VERFAHREN ZUM BESCHICHTEN EINES QUARZBRENNERS EINER HID-LAMPE 有权
    方法用于涂覆的石英灯头HID灯

    公开(公告)号:EP1472195B1

    公开(公告)日:2009-07-15

    申请号:EP03704480.7

    申请日:2003-01-28

    申请人: Schott AG

    IPC分类号: C03C17/34 H01J61/35

    CPC分类号: C03C17/3417 H01J61/35

    摘要: In order to improve the energy balance of an HID lamp, the quartz burner, preferably the inside thereof, is coated with a UV reflecting layer system by alternatingly applying amorphous thin layers made at least of titanium oxide and silicon oxide having the respective general stoichiometry TiOy and SiOx by means of a plasma impulse chemical vapor deposition (PICVD) method at a high power density and increased substrate temperatures ranging from 100 DEG to 400 DEG C, using small growth rates ranging from 1 nm/sec to 100 nm/sec so as to form an interference layer system having a thickness of less than 1200 nm and a minimized UV-active defective spot rate ranging from 0.1 to 1 percent.