公开(公告)号：EP1278068A2

公开(公告)日：2003-01-22

申请号：EP02015859.8

申请日：2002-07-16

申请人： STMicroelectronics S.r.l. ,  Hewlett-Packard Company

发明人： Lasalandra, Ernesto ,  Ungaretti, Tommaso ,  Baschirotto, Andrea

IPC分类号： G01P15/125 ,  G01P15/13

CPC分类号： G01D5/2417 ,  G01D3/066 ,  G01D5/24 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

摘要： A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations (ΔVc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

摘要翻译： 一种用于检测包括固定体（3）和移动块（4）的微机电传感器（101）的位移，形成至少一个第一感测电容器（107）和第二传感电容器（108），其方法 分别连接到第一输入端子（102）和，第一输出端子（104）和所述感测电路的第二输出端（105）和具有一个休息公共感测电容（CS）。 该方法包括如下步骤：关闭第一负反馈回路（136），其包括第一感测电容器（107）和第二感测电容器（108）和差分放大器（124）; 供给到差分放大器（124）的阶梯感测电压（Vs）通过驱动电容器（121，122），以便产生一个电驱动量的变化（DELTA Vc）的（VC），这些中的至少一个输入端（124B） 成反比公共感测电容（Cs）等 和驱动该传感器（101）与所述电驱动量（Vc）的。

公开(公告)号：EP1278068A3

公开(公告)日：2003-08-20

申请号：EP02015859.8

申请日：2002-07-16

申请人： STMicroelectronics S.r.l. ,  Hewlett-Packard Company

发明人： Lasalandra, Ernesto ,  Ungaretti, Tommaso ,  Baschirotto, Andrea

IPC分类号： G01P15/125 ,  G01P15/13 ,  G01D5/24 ,  G01R27/26

CPC分类号： G01D5/2417 ,  G01D3/066 ,  G01D5/24 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

摘要： A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations (ΔVc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

公开(公告)号：EP1278068B1

公开(公告)日：2010-04-21

申请号：EP02015859.8

申请日：2002-07-16

申请人： STMicroelectronics Srl ,  Hewlett-Packard Company

发明人： Lasalandra, Ernesto ,  Ungaretti, Tommaso ,  Baschirotto, Andrea

IPC分类号： G01P15/125 ,  G01P15/13 ,  G01D5/24 ,  G01R27/26

CPC分类号： G01D5/2417 ,  G01D3/066 ,  G01D5/24 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

公开(公告)号：EP1519197A1

公开(公告)日：2005-03-30

申请号：EP03425623.0

申请日：2003-09-26

申请人： STMicroelectronics S.r.l.

发明人： Zerbini, Sarah ,  Merassi, Angelo ,  Lasalandra, Ernesto ,  Vigna, Benedetto

IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H04M1/02

CPC分类号： G01P15/0891 ,  G01P15/125 ,  G01P2015/0857 ,  H04M2250/12

摘要： A planar inertial sensor (1), comprising a first region and a second region (3, 2) of semiconductor material, the second region (2) being capacitively coupled and being mobile with respect to the first region (3), which is fixed. The second region (2) extends in a plane and has second portions (4), which face respective first portions (11) of the first region (3) and are mobile with respect to these so as to modify the distance between them the second region (2) translate with respect to the first region (3) in any direction belonging to the plane of the second region (2).

摘要翻译： 一种平面惯性传感器（1），包括半导体材料的第一区域和第二区域（3,2），所述第二区域（2）电容耦合并且相对于所述第一区域（3）是可移动的，所述第一区域固定 。 第二区域（2）在平面中延伸并且具有面对第一区域（3）的相应的第一部分（11）的第二部分（4）并且可相对于它们移动，以便改变它们之间的距离第二区域 区域（2）在属于第二区域（2）的平面的任何方向上相对于第一区域（3）平移。

公开(公告)号：EP1811309B1

公开(公告)日：2009-10-07

申请号：EP06425026.9

申请日：2006-01-20

申请人： STMicroelectronics S.r.l.

发明人： Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

CPC分类号： G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

摘要： A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

公开(公告)号：EP1811309A9

公开(公告)日：2007-11-14

申请号：EP06425026.9

申请日：2006-01-20

申请人： STMicroelectronics S.r.l.

发明人： Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

CPC分类号： G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

摘要： A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

摘要翻译： 自由落体检测器装置包括惯性传感器（8），与惯性传感器（8）相关联的检测电路（21）以及用于向惯性传感器（8）提供读取信号的信号源（20）。 该装置还包括：存储元件（30），其可选择性地连接到检测电路（21），用于响应于提供给惯性传感器（8）的读取信号而存储由检测电路（21）产生的反馈信号（VFBX） ）; 和耦合到存储元件（30）的反馈电路（32a，32b，24,36），用于将反馈信号（VFBX）提供给惯性传感器（8），使得检测电路（21）产生至少一个检测信号 （VXO）以响应提供给惯性传感器（8）的反馈信号（VFBX）。

公开(公告)号：EP1624285A1

公开(公告)日：2006-02-08

申请号：EP04425599.0

申请日：2004-08-03

申请人： STMicroelectronics S.r.l.

发明人： Caminada, Carlo ,  Lasalandra, Ernesto ,  Prandi, Luciano

IPC分类号： G01C19/56

CPC分类号： G01C19/5726

摘要： A resonant micro-electro-mechanical system includes: a microstructure (102) having a mass (107), which is free to oscillate in accordance with a predetermined degree of freedom (X); and a driving device (103), coupled to the mass (107) for maintaining the mass (107) itself in oscillation at a resonance frequency (ω R ). The driving device (103) is provided with a differential sense amplifier (109), supplying first signals (V RD1 , V RD2 ) indicative of a velocity of oscillation of the mass (107), and an actuation and control stage (111, 112, 113, 116) supplying second signals (V FBD1 , V FBD2 ) for driving the mass (107) on the basis of the first signals (V RD1 , V RD2 ). The driving device (103) moreover includes a filtering circuit (110) of a high-pass type, which is connected between the differential sense amplifier (109) and the actuation and control stage (111, 112, 113, 116) and has a bandpass (B) that includes the resonance frequency (ω R ).

摘要翻译： 共振微机电系统包括：具有质量（107）的微结构（102），其根据预定自由度（X）自由振荡; 以及驱动装置（103），其联接到质量块（107），用于将质量（107）本身以共振频率（ÉR）自身振荡。 驱动装置（103）设置有差分读出放大器（109），提供指示质量（107）的振荡速度的第一信号（V RD1，V RD2）和驱动和控制级（111,112 ，113,116）根据第一信号（V RD1，V RD2）提供用于驱动质量（107）的第二信号（V FBD1，V FBD2）。 驱动装置（103）还包括高通型滤波电路（110），其连接在差动读出放大器（109）和驱动与控制级（111,112,113,116）之间，并具有 带通（B），包括谐振频率（ÉR）。

公开(公告)号：EP1959233A8

公开(公告)日：2009-03-11

申请号：EP07425076.2

申请日：2007-02-13

申请人： STMicroelectronics S.r.l.

发明人： Prandi, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

IPC分类号： G01C19/56

CPC分类号： G01C23/005 ,  G01C19/5726 ,  G01C19/5762

摘要： A microelectromechanical gyroscope includes a microstructure (102), comprising a first mass (107) and a second mass (108), wherein the first mass (107) is oscillatable according to a first axis (X) and the second mass (108) is constrained to the first mass (107) so as to be drawn along by the first mass (107) according to the first axis (X) and to oscillate according to a second axis (Y), in response to a rotation (Ω) of the microstructure (102). A driving device (103) is coupled to the microstructure (102) to maintain the first mass (107) in oscillation at the driving frequency (ω R ), and a reading device (104) detects displacements of the second mass (108) according to the second axis (Y). The gyroscope is provided with a self-test actuation system (6d, 6e, 6h, 106) coupled to the second mass (108) for applying an electrostatic force (F E ) at the driving frequency (ω R ) so as to move the second mass (108) according to the second axis (Y).

公开(公告)号：EP1715580A1

公开(公告)日：2006-10-25

申请号：EP05425185.5

申请日：2005-03-31

申请人： STMicroelectronics S.r.l.

发明人： Prandi, Luciano ,  Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC分类号： H03H9/02

CPC分类号： H03H9/02409 ,  G01C19/5726 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814 ,  H03H2009/02496

摘要： A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (ω R ) a relative displacement (ΔY) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (ΔY). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).

摘要翻译： 用于控制振荡微机电系统的共振频率的装置包括：具有电容耦合到第一主体（10）的第一主体（10）和第二主体（11）的微结构（2）和 以可校准的共振频率（ÉR）相对于其弹性振荡，第二主体（11）和第一主体（10）之间的相对位移（“Y”）可从外部检测; 以及与微结构（2）相关联的用于检测相对位移（“Y”）的放大器（21）。 DC去耦元件（23）布置在放大器（21）和微结构（2）之间。

公开(公告)号：EP1624286A1

公开(公告)日：2006-02-08

申请号：EP04425600.6

申请日：2004-08-03

申请人： STMicroelectronics S.r.l.

发明人： Caminada, Carlo ,  Lasalandra, Ernesto ,  Prandi, Luciano

IPC分类号： G01C19/56

CPC分类号： G01C19/5726

摘要： A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detecting a displacement of the mass (108) according to the predetermined degree of freedom (Y). The displacement-detecting device (104, 106) includes a force feedback loop (106) of a purely analog type, which supplies electrostatic forces tending to bring back the mass into the rest position (Y 0 ), in response to a displacement of the mass (108) itself according to the predetermined degree of freedom (Y).

摘要翻译： 微机电传感器包括具有根据预定自由度（Y）相对于静止位置（Y 0）可移动的质量块（108）的微结构（102）。 以及用于根据所述预定自由度（Y）检测所述质量块（108）的位移的位移检测装置（104,106）。 位移检测装置（104,106）包括纯模拟类型的力反馈回路（106），其响应于所述位移检测装置的位移而提供倾向于将质量带回静止位置（Y 0）的静电力 质量（108）本身根据预定的自由度（Y）。