公开(公告)号：EP3071976B1

公开(公告)日：2017-09-13

申请号：EP14793472.3

申请日：2014-10-21

申请人： Safran Electronics & Defense

发明人： JEANROY, Alain

IPC分类号： G01P15/097 ,  G01P15/08 ,  G01P15/125

CPC分类号： G01P15/097 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0857

公开(公告)号：EP2131202A1

公开(公告)日：2009-12-09

申请号：EP09727029.2

申请日：2009-04-01

申请人： Panasonic Corporation

发明人： HATTORI, Isao ,  NOZOE, Toshiyuki

IPC分类号： G01P21/00 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0817 ,  G01P2015/0842 ,  G01P2015/0845 ,  G01P2015/0854 ,  G01P2015/0857

摘要： An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.

摘要翻译： 一种加速度传感器包括：驱动电路，用于输出具有可变偏置电压的偏置交流（AC）电压;检测器元件，具有设置在固定电极和可移动​​电极之间的电容，该电容根据施加到检测器元件的加速度而改变; （C / V）转换器，用于将从检测器元件的可动电极输出的电流转换成电压并输出该电压;第一运算放大器，输出取决于输入电压的电压;同步解调器，用于同步检测 以及缺陷检测器，用于当所述缺陷检测器确定从所述第一运算放大器输出的电压超出预定范围时输出缺陷检测信号，同时从所述驱动器电路输出的所述偏置的AC电压是从所述第一运算放大器输出的电压 预定电压。 该加速度传感器可以具有小尺寸。

公开(公告)号：EP3115789A1

公开(公告)日：2017-01-11

申请号：EP16169001.1

申请日：2016-05-10

申请人： Honeywell International Inc.

发明人： DWYER, Paul W. ,  STARZYNSKI, John Stanley

IPC分类号： G01P15/125 ,  G01P15/13

CPC分类号： G01P15/125 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/132 ,  G01P15/18 ,  G01P2015/0857

摘要： In some examples, the disclosure describes an accelerometer having improved hysteresis effects, the accelerometer including a proof mass assembly including a proof mass, a support structure, and a flexure flexibly connecting the proof mass to the support structure to allow the proof mass to move about the plane defined by the support structure. Some examples may include at least one thin film lead including an electrically conductive material on the flexure, where the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and where the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold.

摘要翻译： 在一些示例中，本公开描述了具有改善的滞后效应的加速度计，加速度计包括证明质量组件，其包括证明质量块，支撑结构以及将证明物质柔性地连接到支撑结构的挠曲件，以允许证明质量块围绕 由支撑结构限定的平面。 一些示例可以包括至少一个薄膜引线，其包括在挠曲件上的导电材料，其中所述至少一个薄膜引线提供支撑结构上的电气部件与检测质量块上的电气部件之间的电连接， 所述至少一个薄膜引线包括屈服强度大于纯金或小于纯金的热膨胀系数中的至少一种。

公开(公告)号：EP2131202A4

公开(公告)日：2014-07-30

申请号：EP09727029

申请日：2009-04-01

申请人： PANASONIC CORP

发明人： HATTORI ISAO ,  NOZOE TOSHIYUKI

IPC分类号： G01P21/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0817 ,  G01P2015/0842 ,  G01P2015/0845 ,  G01P2015/0854 ,  G01P2015/0857

摘要： An acceleration sensor includes a driver circuit for outputting a biased alternating-current (AC) voltage having a variable bias voltage, a detector element having a capacitance provided between a fixed electrode and a movable electrode changing depending on acceleration applied to the detector element, a current-voltage (C/V) converter for converting a current output from the movable electrode of the detector element into a voltage and outputting the voltage, a first operational amplifier outputting a voltage depending on the input voltage, a synchronous demodulator for synchronously detecting the voltage output from the first operational amplifier, and a defect detector for outputting a defect detection signal when the defect detector determines that the voltage output from the first operational amplifier is out of a predetermined range while the biased AC voltage output from the driver circuit is a predetermined voltage. This acceleration sensor can have a small size.

公开(公告)号：EP1519197A1

公开(公告)日：2005-03-30

申请号：EP03425623.0

申请日：2003-09-26

申请人： STMicroelectronics S.r.l.

发明人： Zerbini, Sarah ,  Merassi, Angelo ,  Lasalandra, Ernesto ,  Vigna, Benedetto

IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H04M1/02

CPC分类号： G01P15/0891 ,  G01P15/125 ,  G01P2015/0857 ,  H04M2250/12

摘要： A planar inertial sensor (1), comprising a first region and a second region (3, 2) of semiconductor material, the second region (2) being capacitively coupled and being mobile with respect to the first region (3), which is fixed. The second region (2) extends in a plane and has second portions (4), which face respective first portions (11) of the first region (3) and are mobile with respect to these so as to modify the distance between them the second region (2) translate with respect to the first region (3) in any direction belonging to the plane of the second region (2).

摘要翻译： 一种平面惯性传感器（1），包括半导体材料的第一区域和第二区域（3,2），所述第二区域（2）电容耦合并且相对于所述第一区域（3）是可移动的，所述第一区域固定 。 第二区域（2）在平面中延伸并且具有面对第一区域（3）的相应的第一部分（11）的第二部分（4）并且可相对于它们移动，以便改变它们之间的距离第二区域 区域（2）在属于第二区域（2）的平面的任何方向上相对于第一区域（3）平移。

公开(公告)号：EP3151018A1

公开(公告)日：2017-04-05

申请号：EP16190692.0

申请日：2016-09-26

申请人： NXP USA, Inc.

发明人： Naumann, Michael

IPC分类号： G01P15/125 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0857 ,  G01P2015/0874

摘要： A MEMS sensor includes a movable element positioned in spaced apart relationship above a surface of a substrate and a single centrally located suspension anchor formed on the surface of the substrate. First and second rigid beams are coupled to opposing sides of the suspension anchor and are suspended above the surface of the substrate. A first torsion spring is interconnected between the movable element and the first rigid beam, and a second torsion spring is interconnected between the movable element and the first rigid beam. The rigid beams and the torsion springs are stiff in a lateral direction relative to the surface of the substrate so as to limit slide displacement of the movable element under the condition of a multi-directional overload situation.

摘要翻译： MEMS传感器包括位于衬底表面上方间隔开的关系的可移动元件以及形成在衬底表面上的单个位于中心的悬挂锚。 第一刚性梁和第二刚性梁联接到悬挂锚的相对侧并且悬挂在基板的表面上方。 第一扭转弹簧在可移动元件和第一刚性梁之间互连，并且第二扭转弹簧在可移动元件和第一刚性梁之间互连。 刚性梁和扭转弹簧在相对于基板的表面的横向上是刚性的，以便在多方向过载情况下限制可移动元件的滑动位移。

公开(公告)号：EP3136052A1

公开(公告)日：2017-03-01

申请号：EP15306336.7

申请日：2015-08-31

申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Politecnico di Milano

发明人： REY, Patrice ,  JOURDAN, Guillaume ,  ROBERT, Philippe ,  LANGFELDER, Giacomo ,  LONGONI, Antonio F ,  DELLEA, Stefano

IPC分类号： G01C19/5755 ,  G01P15/09 ,  G01P15/08

CPC分类号： G01L1/183 ,  G01C19/5607 ,  G01C19/5755 ,  G01P15/123 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/0857

摘要： Piezoresistive detection resonant device comprising a substrate (4), a mobile part (2) configured to move with respect the substrate (4), suspension means (6) suspending the mobile part (2) to the substrate (4), a piezoresistive detection device (10) to detect the motions of the mobile part (2), said piezoresistive detection device (10) comprising at least one strain gauge (12), wherein the piezoresistive detection resonant device also comprises a folded spring (20) with at least two spring arms, connected to the mobile part (2) and configured to be deformed by the motion of the mobile part (2), the at least one gauge (12) being suspended between the substrate (4) and the folded spring (20) in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

摘要翻译： 压阻检测共振装置，包括基板（4），被配置为相对于基板（4）移动的可移动部件（2），将可移动部件（2）悬挂到基板（4）的悬挂装置（6），压阻检测 用于检测可移动部分（2）的运动的装置（10），所述压阻检测装置（10）包括至少一个应变仪（12），其中所述压阻检测共振装置还包括至少具有折叠弹簧（20） 两个弹簧臂，连接到可移动部件（2）并且被配置为通过可移动部件（2）的运动而变形，所述至少一个量规（12）悬挂在基板（4）和折叠弹簧（20）之间 ），使得与可移动部件的运动相比，量规的变形减小。

公开(公告)号：EP3071976A1

公开(公告)日：2016-09-28

申请号：EP14793472.3

申请日：2014-10-21

申请人： Safran Electronics & Defense

发明人： JEANROY, Alain

IPC分类号： G01P15/097 ,  G01L9/00

CPC分类号： G01P15/097 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0857

摘要： The invention relates to a sensor comprising: a frame; a first body moving along a sensitive axis; two pairs of second bodies positioned symmetrically relative to the first body along the sensitive axis; transducers for detecting a position of the first body relative to the frame, vibrating the second bodies along a vibration axis, and detecting a vibration frequency of the second bodies; and means for surface electrostatic coupling connecting each second body to the first body such that a movement of the first body relative to the frame along the sensitive axis respectively causes an increase and a decrease in the electrostatic torque for one and the other of the pairs of second bodies. The invention also relates to methods for controlling such a sensor.

摘要翻译： 一种传感器，包括：一个支架; 沿着感应轴的第一可动体; 2双对称相对于所述第一本体和沿着感测轴线布置第二本体; 换能器，用于检测第一主体相对于的位置到支架，用于设置第二本体成振动沿着振动轴，和用于检测所述第二机构的respectivement振动频率; 和表面静电耦合装置，每个第二主体与第一主体的第一主体相对于的移动连接在寻求的方式并沿感应轴支架产生了分别增加和减少中的静电耦合为一个和所述 另一对第二机构的。 寻求控制传感器的方法。

公开(公告)号：EP2707728A1

公开(公告)日：2014-03-19

申请号：EP12731177.7

申请日：2012-05-09

申请人： Ramot at Tel-Aviv University Ltd.

发明人： KRYLOV, Viacheslav ,  AMIR, Emil ,  RABANIM, Shila

IPC分类号： G01P15/097 ,  G01L1/10

CPC分类号： G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0857

摘要： A technique is provided for determining a force/acceleration acting on a proof mass of a bistable device. According to a first aspect of the invention, the location of a boundary of one of the stable configurations of the device is monitored and compared to a predetermined location of the same boundary corresponding to a condition in which the force/ acceleration is absent, to detect a deviation of said location. The deviation is used to determine the force/acceleration. According to another aspect of the invention, the resonance frequency of the proof mass oscillation in one of the stable regions is monitored, and compared to a predetermined resonance frequency of the proof mass oscillation in the same region corresponding to a condition in which the force/acceleration is absent, to determine a deviation of the resonance frequency due to the presence of force/acceleration. The deviation in the resonance frequency is used to determine the force/acceleration.

公开(公告)号：EP2707728B1

公开(公告)日：2016-03-23

申请号：EP12731177.7

申请日：2012-05-09

申请人： Ramot at Tel-Aviv University Ltd.

发明人： KRYLOV, Viacheslav ,  AMIR, Emil ,  RABANIM, Shila

IPC分类号： G01P15/097 ,  G01P15/08 ,  G01P15/125

CPC分类号： G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0857