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1.发明公开Method for synthesizing compound semiconductor polycrystals and apparatus therefor 失效一种生产化合物半导体和装置的多晶体其实施过程。
公开(公告)号：EP0186213A2
公开(公告)日：1986-07-02
申请号：EP85116615.7
申请日：1985-12-27
CPC分类号： C22C1/007 , B01J3/04 , C01B19/007 , C01B25/087 , C01G9/08 , Y10T117/1052
摘要： Herein disclosed are apparatuses for manufacturing compound semiconductor polycrystals comprises a pressure vessel, an upper shaft, a container for first component fixed to the upper shaft, a heater around the container, a lower shaft, a susceptor and a crucible for charging second component, a heater for the crucible and a communicating means for spatially connecting the container and the crucible optionally provided with a porous member at the lower extremity and/or a cylindrical member for confining a space over a part of melt surface contained in the crucible from the remaining inner space of the vessel, the apparatuses permitting the substantial reduction of reaction time and the improvement of the yield of the polycrystals due to the presence of the porous member and/or the cylindrical member separating the inner space of the vessel into two portions.
摘要翻译： 来游离缺失盘是用于制造化合物半导体多晶体装置包括压力容器中，在上轴，用于固定到所述上轴第一组分的容器，该容器中，下轴，基座和用于充电第二组分的坩埚，一个围绕一个加热器 加热器的坩埚和用于在空间一个通信装置连接的容器中，在下肢和/或用于在从所述剩余的内部的坩埚所含熔体表面的一部分限定的空间的筒状构件可选地设置有多孔构件的坩埚 该容器的空间中，由于在多孔构件和/或筒状构件的容器的内部空间分隔成两个部分的存在的装置，允许反应时间的显着减少和多晶体的产率的提高。
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2.发明授权Method for synthesizing compound semiconductor polycrystals and apparatus therefor 失效用于合成化合物半导体多晶体的方法及其装置
公开(公告)号：EP0186213B1
公开(公告)日：1990-05-02
申请号：EP85116615.7
申请日：1985-12-27
CPC分类号： C22C1/007 , B01J3/04 , C01B19/007 , C01B25/087 , C01G9/08 , Y10T117/1052
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3.发明公开Method for synthesizing compound semiconductor polycrystals and apparatus therefor 失效用于合成化合物半导体多晶体的方法及其装置
公开(公告)号：EP0186213A3
公开(公告)日：1987-11-04
申请号：EP85116615
申请日：1985-12-27
CPC分类号： C22C1/007 , B01J3/04 , C01B19/007 , C01B25/087 , C01G9/08 , Y10T117/1052
摘要： Herein disclosed are apparatuses for manufacturing compound semiconductor polycrystals comprises a pressure vessel, an upper shaft, a container for first component fixed to the upper shaft, a heater around the container, a lower shaft, a susceptor and a crucible for charging second component, a heater for the crucible and a communicating means for spatially connecting the container and the crucible optionally provided with a porous member at the lower extremity and/or a cylindrical member for confining a space over a part of melt surface contained in the crucible from the remaining inner space of the vessel, the apparatuses permitting the substantial reduction of reaction time and the improvement of the yield of the polycrystals due to the presence of the porous member and/or the cylindrical member separating the inner space of the vessel into two portions.
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公开(公告)号：EP0104559A1
公开(公告)日：1984-04-04
申请号：EP83109194.7
申请日：1983-09-16
发明人： Kotani, Toshihiro
摘要： Pulling method of single crystals (6) by the Czochralski technique using a single-crystal pulling apparatus having a furnace (2) consisting of separately controlled heaters (7, 8), wherein the temperature at the seed holder (11) is measured and power is supplied to the heaters (7, 8) so that the temperature difference (ΔT) between the crucible (1) and the seed holder (11) follows a predetermined pattern as a function of the pulled-up length (Δx).
摘要翻译： 使用具有由单独控制的加热器（7,8）组成的炉（2）的单晶拉制装置，通过切克劳斯基技术拉制单晶（6）的方法，其中测量种子保持器（11）的温度和功率 被供应到加热器（7,8），使得坩埚（1）和种子保持器（11）之间的温差（DELTA T）作为上拉长度（DELTA x）的函数遵循预定图案。
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