摘要:
A filter using an air gap type film bulk acoustic resonator is provided. The present filter includes a substrate on which a first port, a second port, and a ground port are formed to be connected to an external terminal; at least one first film bulk acoustic resonator serially connecting the first port to the second port on the substrate; at least one second film bulk acoustic resonator parallel connected to an interconnection node formed between the first port and the second port; and at least one inductor serially connecting the second film bulk acoustic resonator to the ground port. The inductor included in the filter is fabricated with the first and second film bulk acoustic resonators as one body. Accordingly, a small-sized filter may be fabricated through a simplified process.
摘要:
A method for manufacturing a magnetic field detecting element comprises the steps of: forming a well (211) of a predetermined depth on the semiconductor substrate (200). A first coil (250) is formed in an inside of the well (211) and a soft magnetic core (220) is formed on an upper part of the first coil (250) with a first insulating film (230) intervened. A second coil (260) is formed on an upper part of the soft magnetic core (220) with a second insulating film (240) intervened.
摘要:
A filter using an air gap type film bulk acoustic resonator is provided. The present filter includes a substrate on which a first port, a second port, and a ground port are formed to be connected to an external terminal; at least one first film bulk acoustic resonator serially connecting the first port to the second port on the substrate; at least one second film bulk acoustic resonator parallel connected to an interconnection node formed between the first port and the second port; and at least one inductor serially connecting the second film bulk acoustic resonator to the ground port. The inductor included in the filter is fabricated with the first and second film bulk acoustic resonators as one body. Accordingly, a small-sized filter may be fabricated through a simplified process.
摘要:
A method for manufacturing a metal structure using a trench includes etching a semiconductor substrate to form a trench (105), depositing a seed layer (102) over the semiconductor substrate including in the trench, stacking an insulating layer (103) over the seed layer, removing a portion of the insulating layer to expose a portion of the seed layer at a bottom of the trench, filling the trench with a metal material (104), and removing the seed layer and the insulating layer on the semiconductor substrate. As a result, a subsequent process in forming a multi-layered structure may be easily carried out, thereby simplifying a manufacturing process.
摘要:
An infrared detector may include a substrate (110), a resonant unit (120)spaced apart from the substrate 110), the resonant unit configured to generate heat by inducing resonance at a plurality of wavelengths of incident infrared light, a thermistor layer (130) configured to support the resonant unit and be spaced apart from the resonant unit (120), the thermistor layer having a resistance value that varies according to the heat generated in the resonant unit, and a connection unit (150) configured to support the thermistor layer (130) such that the thermistor layer is spaced apart from the substrate and electrically connect the thermistor layer to the substrate.
摘要:
Disclosed is a method for manufacturing a magnetic field detecting element, capable of simplifying the manufacturing process and providing a thin-type magnetic field detecting element. The disclosed method for manufacturing a magnetic field detecting element according to the present invention, is characterized in forming a seed film on the semiconductor substrate, then partially removing the seed film using a predetermined pattern in advance, for insulation of a plurality of coil lines that would be formed on the seed film, forming a soft magnetic core, and cutting off edges of the semiconductor substrate so that a plurality of the coil lines may be insulated.
摘要:
Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core (40) formed to construct a closed-magnetic circuit on a semiconductor substrate (10), a magnetic field sensing coil (20) formed by a metal film in a shape that winds the soft magnetic core, and a drive line (50) for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.