利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

43 条记录 (耗时 0.033 秒)

    A pellicle for lithography
    2.
    发明公开
    A pellicle for lithography 有权
    薄皮光刻

    公开(公告)号：EP2333607A3

    公开(公告)日：2014-03-19

    申请号：EP10014421.1

    申请日：2010-11-09

    申请人： Shin-Etsu Chemical Co., Ltd.

    发明人： Shirasaki, Toru ,  Fukuda, Kenichi

    IPC分类号： G03F1/00 ,  G03F1/64 ,  G03F1/62

    CPC分类号： G03F1/64 ,  G03F1/62

    摘要： A pellicle (10) for lithography includes a pellicle frame (3), a pellicle membrane (1) adhered onto the upper end surface of the pellicle frame (3) and an agglutinant layer (4) formed on the lower surface of the pellicle frame (3) and the agglutinant layer (4) is formed by hardening a curable composition containing a straight chain perfluoro compound having a perfluoro structure in a main chain.
    The thus constituted pellicle (10) generates only a small amount of a decomposition gas even when it is used for a long time, thereby preventing solid-like foreign materials from separating out on a pattern region of a photomask (5) and can suppress degradation of the agglutinant agent contained in an agglutinant layer (4) to be used for fixing a photomask (5) to the pellicle frame (3). Further, this pellicle (10) can be easily peeled off from a photomask (5) and replaced with a new one.

    Curable perfluoropolyether gel composition and gel product produced by using cured perfluoropolyether gel composition
    3.
    发明公开
    Curable perfluoropolyether gel composition and gel product produced by using cured perfluoropolyether gel composition 有权
    Härtbare全氟聚醚 - Gelzusammensetzung und mitgehätteter全氟聚醚 - Gelzusammensetzung hergestelltes Gelprodukt

    公开(公告)号：EP2407500A1

    公开(公告)日：2012-01-18

    申请号：EP11173795.3

    申请日：2011-07-13

    申请人： Shin-Etsu Chemical Co., Ltd.

    发明人： Fukuda, Kenichi ,  Koike, Noriyuki ,  Shiono, Mikio

    IPC分类号： C08G65/00

    CPC分类号： C08G65/007 ,  C08G65/336 ,  C08G2650/48 ,  C08L71/00

    摘要： A curable perfluoropolyether gel composition is provided. The composition comprises (A) a straight chain fluorine-containing polymer represented by the following formula (1):

    (B) a polyfluoromonoalkenyl compound containing one alkenyl group per molecule and having a perfluoropolyether structure in its backbone, (C) an organosilicon compound containing at least two hydrogen atoms bonded to the silicon atom per molecule, and (D) a hydrosilylation catalyst. The composition can be produced into a cured product having excellent heat resistance, solvent resistance, chemical resistance, weatherability, releasability, water repellency, oil repellency, and the like as well as an improved acid resistance.

    摘要翻译： 提供可固化的全氟聚醚凝胶组合物。 该组合物包含（A）由下式（1）表示的直链含氟聚合物：（B）每分子含有一个烯基并在其主链上具有全氟聚醚结构的聚氟代烯基化合物，（C）含有 每分子与硅原子键合的至少两个氢原子，和（D）氢化硅烷化催化剂。 可以将该组合物制成具有优异的耐热性，耐溶剂性，耐化学性，耐候性，脱模性，防水性，拒油性等的固化产物，以及改善的耐酸性。

    Chain organopolysiloxane and process for producing the same
    5.
    发明公开
    Chain organopolysiloxane and process for producing the same 失效
    Lineare有机聚硅氧烷和Verfahren zu deren Herstellung。

    公开(公告)号：EP0611785A2

    公开(公告)日：1994-08-24

    申请号：EP94301073.6

    申请日：1994-02-15

    申请人： Shin-Etsu Chemical Co., Ltd.

    发明人： Inomata, Hiroshi ,  Fukuda, Kenichi ,  Kishita, Hirofumi ,  Saito, Yoshikazu ,  Yamaguchi, Kouichi ,  Kobayashi, Nobuyuki

    IPC分类号： C08G77/24 ,  C08G77/34

    CPC分类号： C08G77/34 ,  C08G77/24

    摘要： A chain organopolysiloxane is obtained by polymerizing a fluorine-containing cyclotrisiloxane of the general formula :
    (wherein R 1 is a monovalent hydrocarbon group, and Rf is a perfluoroalkyl group or perfluoroalkyl ether group)
    in the presence of a lithium silanolate catalyst, silylating the resulting polymerization product, and treating the silylated product at a temperature of not lower than 100°C under a reduced pressure of not higher than 10 -1 mmHg to remove volatile components therefrom. The organopolysiloxane is essentially free of volatile low-molecular siloxanes. Therefore, the chain organopolysiloxane can be used without the problems which might arise from the volatile low-molecular siloxanes, such as evaporation of low-molecular siloxanes from a cured rubber product with the result of electrical-contact troubles.

    摘要翻译： 通过在硅酸铝锂的存在下聚合具有以下通式的含氟环状三硅氧烷获得链有机聚硅氧烷：其中R 1为一价烃基，Rf为全氟烷基或全氟烷基醚基 催化剂，甲硅烷基化所得聚合产物，并在不低于10℃-1.0mmHg的减压下在不低于100℃的温度下处理甲硅烷基化产物，以从其中除去挥发性组分，有机聚硅氧烷基本上是无定形的 的挥发性低分子硅氧烷，因此可以使用链状有机聚硅氧烷，而不会由挥发性低分子量硅氧烷引起的问题，例如来自固化橡胶产物的低分子量硅氧烷的蒸发导致电接触问题 。

    Cyclotrisiloxane and process for producing the same
    6.
    发明公开
    Cyclotrisiloxane and process for producing the same 失效
    Cyclotrisiloxan和Verfahren zur Herstellung。

    公开(公告)号：EP0596730A1

    公开(公告)日：1994-05-11

    申请号：EP93308814.8

    申请日：1993-11-04

    申请人： SHIN-ETSU CHEMICAL CO., LTD.

    发明人： Kishita, Hirofumi ,  Yamaguchi, Kouichi ,  Fukuda, Kenichi ,  Kobayashi, Nobuyuki

    IPC分类号： C07F7/21 ,  C07F7/08

    CPC分类号： C07F7/21

    摘要： A cyclotrisiloxane represented by the general formula (1):

    wherein R¹, R², R³, R⁴ and R⁵ may be the same or different and are each an alkyl group of 1 to 3 carbon atoms and X is a cyclohexyl group or an alkyl group expressed by the formula:

            -C n H 2n+1


    where n is an integer of 4 to 15. The cyclotrisiloxane is useful as an intermediate for producing silicone oils and silicone rubbers, and the obtained silicone oils and silicone rubbers are excellent in lubricity.

    摘要翻译： 由通式（1）表示的环三硅氧烷：其中R 1，R 2，R 3，R 4和R 5可以相同或不同，并且各自为烷基 1至3个碳原子的基团，X是由下式表示的环己基或烷基：-C n H 2n + 1其中n是4至15的整数。环三硅氧烷可用作制备硅油和硅橡胶的中间体 所得到的硅油和硅橡胶的润滑性优异。

    Curable perfluoropolyether based gel composition and gel product using cured composition
    9.
    发明公开
    Curable perfluoropolyether based gel composition and gel product using cured composition 有权
    GELPRODUKT MIT DERGEHÄRTETENZUSAMMENSETZUNG HELRARE PERFLUORPOLYETHERBASIERTE GELZUSAMMENSETZUNG

    公开(公告)号：EP2927262A1

    公开(公告)日：2015-10-07

    申请号：EP15161023.5

    申请日：2015-03-26

    申请人： Shin-Etsu Chemical Co., Ltd.

    发明人： Fukuda, Kenichi ,  Muto, Mitsuo ,  Shiono, Mikio

    IPC分类号： C08G65/00 ,  C08G65/336 ,  C08L71/00 ,  C08L71/02

    CPC分类号： C08L43/04 ,  C08G65/007 ,  C08G65/336 ,  C08G2650/48 ,  C08L71/02 ,  C08L2201/02 ,  C08L2205/025 ,  C08L2205/03

    摘要： A curable perfluoropolyether based gel composition is provided comprising (A) a linear fluorinated polymer containing at least two alkenyl groups, (B) a polyfluoromonoalkenyl compound containing one alkenyl group and having a perfluoropolyether structure in its backbone, (C) a cyclic organohydrogenpolysiloxane having at least two silicon-bonded hydrogen atoms and at least one perfluoroalkyl group or perfluoropolyether structure-containing group, and (D) a hydrosilylation reaction catalyst. The composition cures into a gel having improved acid resistance as well as heat resistance, solvent resistance, chemical resistance, weatherability, parting property, and water/oil repellency.

    摘要翻译： 提供了一种可固化的全氟聚醚基凝胶组合物，其包含（A）含有至少两个烯基的线性氟化聚合物，（B）在其主链上含有一个烯基并具有全氟聚醚结构的聚氟多烯基化合物，（C）具有 至少两个硅键合的氢原子和至少一个全氟烷基或全氟聚醚结构的基团，和（D）氢化硅烷化反应催化剂。 该组合物固化成具有改善的耐酸性以及耐热性，耐溶剂性，耐化学性，耐候性，脱模性和防水拒油性的凝胶。

    Lithographic pellicle
    10.
    发明公开
    Lithographic pellicle 有权
    石版画

    公开(公告)号：EP2330462A1

    公开(公告)日：2011-06-08

    申请号：EP10014845.1

    申请日：2010-11-22

    申请人： Shin-Etsu Chemical Co., Ltd.

    发明人： Shirasaki, Toru ,  Fukuda, Kenichi

    IPC分类号： G03F1/14

    CPC分类号： G03F1/64

    摘要： A lithographic pellicle comprises a pellicle film (1), a pellicle frame (3), and a PSA layer (4). The pellicle film (1) is stretched across and mounted to the pellicle frame (3) at its top end. The PSA layer (4) is disposed on the bottom end of the frame (3) and is capable of attaching the frame (3) to a substrate (5). An inner PSA layer (8) made of a curable composition comprising a perfluoro compound having a perfluoro structure backbone is disposed on the inner wall of the frame (3).

    摘要翻译： 平版印刷防护薄膜组件包括防护薄膜（1），防护薄膜框架（3）和粘合剂层（4）。 防护薄膜（1）在其顶端被拉伸并安装到防护薄膜框架（3）上。 PSA层（4）设置在框架（3）的底端上，并且能够将框架（3）附接到基板（5）。 由包含具有全氟结构主链的全氟化合物的可固化组合物制成的内部PSA层（8）设置在框架（3）的内壁上。