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公开(公告)号:EP4415508A2
公开(公告)日:2024-08-14
申请号:EP24186129.3
申请日:2018-10-31
申请人: SOITEC
IPC分类号: H10N30/073
CPC分类号: H01L21/76254 , H01L21/76264 , H01L21/76283 , H10N30/073 , H10N30/072
摘要: The invention relates to a method for manufacturing a film (12) on a support (20) having a non-flat surface, characterised in that it comprises:
- the supply of a donor substrate (10) having a non-flat surface,
- the formation of an embrittlement zone (11) in the donor substrate (10) so as to delimit said film (12) to transfer,
- the formation of the support (20) by conformal deposition on the non-flat surface of the film (12) to transfer,
- the detachment of the donor substrate (10) along the embrittlement zone (11), so as to transfer said film (12) onto the support (20).-
公开(公告)号:EP3394324A1
公开(公告)日:2018-10-31
申请号:EP16819558.4
申请日:2016-12-21
申请人: Soitec
IPC分类号: C30B25/18 , C30B29/22 , H01L21/762 , H01L41/312
CPC分类号: C30B29/22 , C30B25/186 , H01L21/76254 , H01L41/1873 , H01L41/312 , H01L41/316 , H01L41/319
摘要: The invention relates to a method for the production of a single-crystal film (10), characterised in that it comprises the following successive steps: the provision of a donor substrate (100) comprising a piezoelectric material of composition ABO
3 , wherein A consists of at least one element from among Li, Na, K, H, Ca, and B consists of at least one element from among Nb, Ta, Sb, V; the provision of a receiver substrate (110); the transfer of a so-called "seed layer" from the donor substrate (100) to the receiver substrate (110), by means of bonding the donor substrate to the receiver substrate such that the seed layer (102) is located at the bonding interface, and the subsequent thinning of the donor substrate (100) as far as the seed layer (102); the epitaxial growth of a single-crystal film (103) on the piezoelectric material ABO
3 of the seed layer (102), said film having composition A'B'O
3 , wherein: A' consists of at least one element from among Li, Na, K, H; B' consists of at least one element from among Nb, Ta, Sb, V; and A' is different from A or B' is different from B.-
公开(公告)号:EP4033531A1
公开(公告)日:2022-07-27
申请号:EP22161925.7
申请日:2018-03-14
申请人: SOITEC
发明人: SOTTA, David , LEDOUX, Olivier , BONNIN, Olivier , BETHOUX, Jean-Marc , LOGIOU, Morgane , CAULMILONE, Raphaël
IPC分类号: H01L25/075 , H01L21/02 , H01L33/00 , H01L33/02
摘要: L'invention porte sur un substrat de croissance (1) pour la formation de dispositifs optoélectroniques comprenant un support de croissance (2) et, disposée sur le support de croissance (2), un premier groupe d'îlots semi-conducteurs cristallins (3a) présentant un premier paramètre de maille et un deuxième groupe d'îlots semi-conducteur cristallin (3b) présentant un deuxième paramètre de maille, différent du premier. L'invention porte également sur un procédé de fabrication du substrat de croissance, sur un procédé de fabrication collective d'une pluralité de dispositifs optoélectroniques sur le substrat de croissance. Elle s'applique pour fournir un micro panneau monolithique de diodes électroluminescentes ou un micro-écran d'affichage.
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公开(公告)号:EP3776633A1
公开(公告)日:2021-02-17
申请号:EP19718440.1
申请日:2019-03-22
申请人: SOITEC
IPC分类号: H01L21/268 , H01L21/762
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公开(公告)号:EP3704735A1
公开(公告)日:2020-09-09
申请号:EP18795627.1
申请日:2018-10-31
申请人: Soitec
IPC分类号: H01L21/762
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公开(公告)号:EP3394323A1
公开(公告)日:2018-10-31
申请号:EP16819091.6
申请日:2016-12-21
申请人: Soitec
发明人: GHYSELEN, Bruno , RADU, Ionut , BETHOUX, Jean-Marc
IPC分类号: C30B25/18 , C30B29/22 , H01L21/762 , H01L41/312
CPC分类号: C30B25/186 , C30B29/22 , H01L21/76254 , H01L41/312 , H01L41/316 , H01L41/319
摘要: The invention relates to a method for manufacturing a monocrystalline piezoelectric material layer (10). Said method is characterized in that it includes: providing a donor substrate (100) made of said piezoelectric material, providing a receiving substrate (110), transferring a so-called "seed layer" (102) of said donor substrate (100) onto the receiving substrate (110), and using epitaxy of the piezoelectric material on the seed layer (102) until the desired thickness is obtained for the monocrystalline piezoelectric layer (10).
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公开(公告)号:EP3031074B1
公开(公告)日:2019-01-02
申请号:EP14758608.5
申请日:2014-08-05
申请人: Soitec
IPC分类号: H01L21/268 , H01L31/0687 , H01L33/00
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