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公开(公告)号:EP4430933A1
公开(公告)日:2024-09-18
申请号:EP22797411.0
申请日:2022-09-28
申请人: SOITEC
IPC分类号: H10N30/082 , H10N30/072 , H10N30/853
CPC分类号: H10N30/073 , H10N30/072 , H10N30/082 , H10N30/086
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公开(公告)号:EP3776630B1
公开(公告)日:2024-09-04
申请号:EP19721698.9
申请日:2019-03-27
IPC分类号: H10N30/073
CPC分类号: H03H3/08 , H03H9/02574 , H03H9/02866 , H01L21/02002 , H10N30/073
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3.
公开(公告)号:EP3811402B1
公开(公告)日:2024-07-31
申请号:EP19745693.2
申请日:2019-06-19
IPC分类号: H01L21/78 , H01L21/02 , H10N30/073
CPC分类号: H01L21/02002 , H01L21/7806 , H10N30/2047 , H10N30/8554 , H10N30/073
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公开(公告)号:EP3525347B1
公开(公告)日:2024-08-07
申请号:EP17858489.2
申请日:2017-10-05
IPC分类号: H10N30/072 , H10N30/073 , H10N30/04 , H03H3/08 , H03H9/02
CPC分类号: H03H3/08 , C30B29/22 , C30B31/22 , C30B33/06 , H03H9/02574 , H03H9/02559 , H10N30/04 , H10N30/072 , H10N30/073
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公开(公告)号:EP3776641B1
公开(公告)日:2024-05-15
申请号:EP19718438.5
申请日:2019-03-21
IPC分类号: H10N30/073 , H03H3/02 , H01L21/762
CPC分类号: H03H3/02 , H03H2003/02520130101 , H01L21/76254 , H10N30/073
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公开(公告)号:EP3776632B1
公开(公告)日:2024-08-21
申请号:EP19719549.8
申请日:2019-03-26
IPC分类号: H10N30/073 , H03H9/02 , H01L21/20
CPC分类号: H01L21/2007 , H03H9/02574 , H10N30/073
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公开(公告)号:EP3943292B1
公开(公告)日:2024-07-10
申请号:EP20772561.5
申请日:2020-03-10
IPC分类号: H10N30/87 , H10N30/853 , B32B27/06
CPC分类号: H10N30/877 , H10N30/878 , H10N30/853 , H10N30/073 , H10N30/076 , H10N30/06 , H10N30/079 , H10N30/706 , H10N30/708
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公开(公告)号:EP3704736B1
公开(公告)日:2024-07-03
申请号:EP18795628.9
申请日:2018-10-31
IPC分类号: H01L21/762 , H10N30/072 , H10N30/073
CPC分类号: H01L21/76254 , H01L21/76264 , H01L21/76283 , H10N30/073 , H10N30/072
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公开(公告)号:EP4415508A2
公开(公告)日:2024-08-14
申请号:EP24186129.3
申请日:2018-10-31
申请人: SOITEC
IPC分类号: H10N30/073
CPC分类号: H01L21/76254 , H01L21/76264 , H01L21/76283 , H10N30/073 , H10N30/072
摘要: The invention relates to a method for manufacturing a film (12) on a support (20) having a non-flat surface, characterised in that it comprises:
- the supply of a donor substrate (10) having a non-flat surface,
- the formation of an embrittlement zone (11) in the donor substrate (10) so as to delimit said film (12) to transfer,
- the formation of the support (20) by conformal deposition on the non-flat surface of the film (12) to transfer,
- the detachment of the donor substrate (10) along the embrittlement zone (11), so as to transfer said film (12) onto the support (20).-
公开(公告)号:EP4374672A1
公开(公告)日:2024-05-29
申请号:EP22754801.3
申请日:2022-07-19
申请人: SOITEC
IPC分类号: H10N30/073
CPC分类号: H10N30/073
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