METHOD FOR MANUFACTURING A FILM ON A SUPPORT HAVING A NON-FLAT SURFACE

    公开(公告)号:EP4415508A2

    公开(公告)日:2024-08-14

    申请号:EP24186129.3

    申请日:2018-10-31

    申请人: SOITEC

    IPC分类号: H10N30/073

    摘要: The invention relates to a method for manufacturing a film (12) on a support (20) having a non-flat surface, characterised in that it comprises:
    - the supply of a donor substrate (10) having a non-flat surface,
    - the formation of an embrittlement zone (11) in the donor substrate (10) so as to delimit said film (12) to transfer,
    - the formation of the support (20) by conformal deposition on the non-flat surface of the film (12) to transfer,
    - the detachment of the donor substrate (10) along the embrittlement zone (11), so as to transfer said film (12) onto the support (20).