公开(公告)号：EP1156130A4

公开(公告)日：2005-07-20

申请号：EP00979084

申请日：2000-12-04

申请人： TOCALO CO LTD ,  TOKYO ELECTRON LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI ,  HAMAGUCHI TATSUYA ,  NAGAYAMA NOBUYUKI ,  MITSUHASHI KOUJI

IPC分类号： H01L21/302 ,  B01J19/02 ,  C23C4/00 ,  C23C4/02 ,  C23C4/10 ,  C23C14/00 ,  C23C16/06 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/31

CPC分类号： H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

摘要： It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

公开(公告)号：EP3266607A4

公开(公告)日：2018-02-14

申请号：EP16758934

申请日：2016-03-02

申请人： TOCALO CO LTD

发明人： HABU YOICHIRO ,  MIYAKE YASUO ,  ABE NAOKI ,  HAMAGUCHI TATSUYA

IPC分类号： B32B9/00 ,  C08J7/04 ,  C23C4/06 ,  C23C4/10 ,  C23C28/00

CPC分类号： B32B9/00 ,  C08J7/045 ,  C23C4/06 ,  C23C4/10 ,  C23C28/00

摘要： [Task] It is to provide a fiber-reinforced resin structure having improved surface properties and reinforced with carbon fibers or glass fibers while keeping lightweight properties. [Solution] A fiber-reinforced resin structure is constructed by forming a thermal sprayed coating composed mainly of boron carbide on a fiber-reinforced plastic substrate as a top coating.