公开(公告)号：EP1156130A4

公开(公告)日：2005-07-20

申请号：EP00979084

申请日：2000-12-04

申请人： TOCALO CO LTD ,  TOKYO ELECTRON LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI ,  HAMAGUCHI TATSUYA ,  NAGAYAMA NOBUYUKI ,  MITSUHASHI KOUJI

IPC分类号： H01L21/302 ,  B01J19/02 ,  C23C4/00 ,  C23C4/02 ,  C23C4/10 ,  C23C14/00 ,  C23C16/06 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/31

CPC分类号： H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

摘要： It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

公开(公告)号：EP0913496A4

公开(公告)日：2000-12-20

申请号：EP98909815

申请日：1998-03-23

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  SUIZU TATSUO ,  TERATANI TAKEMA

IPC分类号： C23C16/06 ,  C23C4/02 ,  C23C4/08 ,  C23C28/00 ,  C23C4/10 ,  C23C4/18

CPC分类号： C23C28/028 ,  C23C4/02 ,  C23C4/073 ,  C23C28/022 ,  C23C28/027 ,  Y10S428/937 ,  Y10T428/12861 ,  Y10T428/12931 ,  Y10T428/12937 ,  Y10T428/12944 ,  Y10T428/12979

摘要： To advantageously solve the problems of the drop of productivity, contamination of an alloy film due to the employment of different kinds of metals, the increase of the production cost by the employment of a different kind of a coating process, etc., an MCrAlX alloy is directly formed to a thickness of 10 to 300νm by an atmospheric plasma spray method to produce an atmospheric atmosphere or by a flame spray method (inclusive of a low speed flame spray method and a high speed flame spray method), and an MCrAlX alloy of the same kind is formed on the former to a thickness of 100 to 800 νm by a vacuum plasma spray method to produce a non-oxidizing atmosphere.

公开(公告)号：EP1780298A4

公开(公告)日：2009-01-07

申请号：EP05768739

申请日：2005-07-29

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  TERATANI TAKEMA

IPC分类号： C23C4/10 ,  B32B9/00 ,  C03C17/245 ,  C03C17/36 ,  C23C4/18

CPC分类号： C23C4/02 ,  C03C17/23 ,  C03C17/36 ,  C03C17/3615 ,  C03C17/3649 ,  C03C23/0025 ,  C03C23/004 ,  C03C2217/288 ,  C03C2218/112 ,  C03C2218/32 ,  C23C4/10 ,  C23C4/11 ,  C23C4/12 ,  C23C4/18 ,  C23C28/042 ,  C23C28/044 ,  C23C28/321 ,  C23C28/322 ,  C23C28/345 ,  C23C28/3455 ,  C23C28/347 ,  Y02T50/67

摘要： A member is obtained by forming a Y 2 O 3 black spray coating on a surface of a substrate or covering the surface of the substrate with a Y 2 O 3 black spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The Y 2 O 3 black spray coating is produced by subjecting white Y 2 O 3 powdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a Y 2 O 3 white spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

公开(公告)号：EP1258918A4

公开(公告)日：2006-12-06

申请号：EP01901396

申请日：2001-01-17

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI ,  TOGOE KENICHIRO

IPC分类号： B23Q3/15 ,  B23Q3/154 ,  B25J15/06 ,  H01L21/683 ,  H01L21/68

CPC分类号： B23Q3/154 ,  H01L21/6833

摘要： An electrostatic chuck member having a high adsorption force and superior in response performance (release property) when application of voltage is stopped, comprising an undercoat in the form of a metallic layer on at least one surface of a base member, a lower insulation layer of Al2O3 ceramics on the undercoat, a metallic electrode layer on the insulation layer, an upper insulation layer, which is a topcoat, of Al2O3 ceramics on the electrode layer.

公开(公告)号：EP0971046A4

公开(公告)日：2002-07-03

申请号：EP99900159

申请日：1999-01-11

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  SHIN HIDETOSHI

IPC分类号： C23C4/06 ,  C23C4/10 ,  C23C4/18 ,  C23C4/08

CPC分类号： C23C4/18

摘要： A member covered with a self-fluxing alloy sprayed coating is produced by previously forming a porous ceramic sprayed coating on a surface of a self-fluxing alloy sprayed coating prior to a refusing treatment of the coating formed on a substrate, heating the sprayed coating in an inert gas atmosphere controlled to 1 SIMILAR 300 hPa or by a high frequency induction heating system and thereafter removing the ceramic sprayed coating to expose the self-fluxing alloy sprayed coating. This member is uniform in the thickness, less in the retention of pores or oxide impurities and has a strong coating property.

公开(公告)号：EP0922784A4

公开(公告)日：2000-05-24

申请号：EP97935841

申请日：1997-08-20

申请人： TOCALO CO LTD ,  KASHIMA KITA ELECTRIC POWER CO

发明人： HARADA YOSHIO ,  KIMURA TATSUYUKI ,  SHIRATORI AKIO ,  YOKOBORI MORIO

IPC分类号： F23M5/08 ,  C23C4/18 ,  F22B37/10 ,  C23C4/08 ,  C23C4/10 ,  C23C28/00

CPC分类号： C23C28/321 ,  C23C4/18 ,  C23C28/3455 ,  F22B37/108

摘要： In order to minimize the deposition and formation of substances ascribed to boiler water and the oxidation scaling of a tube-forming material ascribed to overheated steam which occur on an inner surface of a heating tube for a boiler, a porous flame spray film is formed on an outer heat receiving surface, which a combustion gas contacts, of the heating tube for a boiler by using a metal or an alloy, the oxidation resistance and high temperature and corrosion resistance of which are higher than those of the heating tube-forming material, an oxide ceramic material and oxide cermet. The opened pores in this porous flame spray film are invasion-filled with solid inorganic sintered fine particles with a covering layer formed at the same time on an outer surface of this film, the resultant product being subjected to high melting point solidification to provide the same product with a heat shielding function, whereby excessive heat flux to the heating tube is prevented.

公开(公告)号：EP0919639A4

公开(公告)日：2000-12-20

申请号：EP98909816

申请日：1998-03-23

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  SUIZU TATSUO ,  TERATANI TAKEMA

IPC分类号： C23C10/48 ,  C23C4/02 ,  C23C4/06 ,  C23C28/00 ,  C23C4/10 ,  C23C4/08 ,  C23C4/18

CPC分类号： C23C28/3215 ,  C23C4/02 ,  C23C4/073 ,  C23C4/11 ,  C23C28/324 ,  C23C28/325 ,  C23C28/3455 ,  Y10T428/12493 ,  Y10T428/12611 ,  Y10T428/12618 ,  Y10T428/12861 ,  Y10T428/12931 ,  Y10T428/12937

摘要： To advantageously solve the problems of the drop of productivity, contamination of an alloy film due to the use of a different kind of metals, cost increase by the use of a different kind of a coating process, etc., a film of an MCrAlX alloy containing oxides such as CoO and NiO is directly formed to a thickness of 10 to 500 νm by vacuum plasma spraying not substantially containing oxygen, and the same MCrAlX alloy not containing oxides is formed to a thickness of 100 to 800 νm on the former film by a vacuum plasma spraying method to produce a non-oxidizing atmosphere so as to form a composite spray film.

摘要翻译： 为了有利地解决生产率降低，由于使用不同种类的金属导致的合金膜污染，通过使用不同种类的涂覆工艺等导致成本增加等问题，MCrAlX合金膜 通过实质上不含氧的真空等离子体喷涂，将含CoO，NiO等含氧化物的氧化物直接形成为10〜500νm的厚度，在前者的膜上形成100〜800νm的不含氧化物的同种MCrAlX合金， 真空等离子体喷涂法以产生非氧化性气氛以形成复合喷涂膜。

公开(公告)号：EP0762491A3

公开(公告)日：1998-07-29

申请号：EP96306130

申请日：1996-08-22

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI

IPC分类号： B23Q3/15 ,  C01G23/04 ,  C23C4/10 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/683 ,  H02N13/00 ,  H01L21/68

CPC分类号： B23Q3/15 ,  H01L21/6833 ,  Y10T279/23

摘要： An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al
2 O
3 ·TiO
2 based spray-coated layer containing a Ti
n O
2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality.