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1.发明公开PLASMA PROCESSING CONTAINER INTERNAL MEMBER AND PRODUCTION METHOD THEREFOR 审中-公开INTERNES ELEMENTFÜRPLASMABEHANDLUNGSBEHTERLTER UND HERSTELLUNGSVERFAHREN
公开(公告)号：EP1156130A1
公开(公告)日：2001-11-21
申请号：EP00979084.1
申请日：2000-12-04
发明人： Harada, Yoshio , Takeuchi, Junichi , Hamaguchi, Tatsuya , Nagayama, Nobuyuki Tokyo Elect. Yamanashi Co. Ltd. , Mitsuhashi, Kouji Tokyo Elect. Yamanashi Co., Ltd.
CPC分类号： H01J37/32477 , B01J19/02 , B01J2219/0218 , B01J2219/0236 , B01J2219/024 , B01J2219/0263 , B01J2219/0286 , B01J2219/0894 , C09D1/00 , C23C4/00 , C23C4/02 , C23C4/11 , Y10T428/12458 , Y10T428/12479 , Y10T428/12549 , Y10T428/12618 , Y10T428/24999
摘要： It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al 2 O 3 film formed on the undercoat as a middle layer and Y 2 O 3 sprayed coating formed on the middle layer as a top coat.
摘要翻译： 本发明提供一种等离子体处理容器的内部构件，该等离子体处理容器在含有卤素气体的环境下具有优异的耐化学腐蚀和等离子体侵蚀性，以及制造该等离子体处理容器的有利方法，该方法是通过将基材的表面覆盖 由作为底涂层形成的金属涂层，在作为中间层的底涂层上形成的Al 2 O 3膜和在中间层上形成的作为顶涂层的Y 2 O 3喷涂层构成的多层复合层。
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公开(公告)号：EP0533105A1
公开(公告)日：1993-03-24
申请号：EP92115753.3
申请日：1992-09-15
发明人： Harada, Yoshio , Takeuchi, Junichi , Tojo, Tetsuro , Hiraiwa, Jiro , Kuroda, Koji , Okunishi, Shigeki
CPC分类号： C04B41/009 , C04B41/5133 , C04B41/88 , C23C4/08 , Y10T428/24479 , Y10T428/24521 , Y10T428/24545 , Y10T428/24942 , Y10T428/26 , Y10T428/30 , Y10T428/31678 , C04B35/52 , C04B41/4523 , C04B41/5346 , C04B41/4527 , C04B41/53
摘要： A carbon member having an excellent bonding property is provided at its surface with a metal spray coating layer, and comprises a carbon substrate and a spray coating layer made from at least one metal selected from Cr, Ti, V, W, Mo, Zr, Nb and Ta or an alloy thereof, in which the coating layer has a ratio of linear expansion coefficient to carbon of 0.73-1.44 and a large chemical affinity to carbon at its interface.
摘要翻译： 在金属喷涂层的表面设置具有优异粘合性的碳材料，并且包括由至少一种选自Cr，Ti，V，W，Mo，Zr等的金属制成的碳基板和喷涂层， Nb和Ta或其合金，其中涂层的线性膨胀系数与碳的比率为0.73-1.44，并且在其界面处与碳具有很大的化学亲和力。
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公开(公告)号：EP1308535A1
公开(公告)日：2003-05-07
申请号：EP02024301.0
申请日：2002-10-31
申请人： TOCALO CO. LTD.
CPC分类号： C23C28/321 , C23C4/02 , C23C4/04 , C23C4/073 , C23C14/16 , C23C28/3215 , C23C28/3455 , C23C30/00 , Y02T50/67 , Y10T428/12611 , Y10T428/12736 , Y10T428/12771 , Y10T428/12806 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12993
摘要： A high-temperature strength member comprises a substrate of Ni-based single crystal alloy or a Ni-based unidirectional solidified alloy and a coating of a B-containing alloy having a specified B content formed on the surface thereof by a spraying process or a vapor deposition process.
摘要翻译： 高温强度部件由Ni基单晶合金或Ni基单向凝固合金构成的基板，在其表面上通过喷射处理或蒸气形成规定B量的含B合金的被膜 沉积过程。
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公开(公告)号：EP0533105B1
公开(公告)日：1996-12-27
申请号：EP92115753.3
申请日：1992-09-15
发明人： Harada, Yoshio , Takeuchi, Junichi , Tojo, Tetsuro , Hiraiwa, Jiro , Kuroda, Koji , Okunishi, Shigeki
CPC分类号： C04B41/009 , C04B41/5133 , C04B41/88 , C23C4/08 , Y10T428/24479 , Y10T428/24521 , Y10T428/24545 , Y10T428/24942 , Y10T428/26 , Y10T428/30 , Y10T428/31678 , C04B35/52 , C04B41/4523 , C04B41/5346 , C04B41/4527 , C04B41/53
摘要： A carbon member having an excellent bonding property is provided at its surface with a metal spray coating layer, and comprises a carbon substrate and a spray coating layer made from at least one metal selected from Cr, Ti, V, W, Mo, Zr, Nb and Ta or an alloy thereof, in which the coating layer has a ratio of linear expansion coefficient to carbon of 0.73-1.44 and a large chemical affinity to carbon at its interface.
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5.发明授权
公开(公告)号：EP0499656B1
公开(公告)日：1995-10-25
申请号：EP91102282.0
申请日：1991-02-18
申请人： TOCALO CO. LTD.
CPC分类号： C23C28/321 , B21B27/00 , B21B39/008 , C21D9/0012 , C22C1/10 , C22C2204/00 , C23C4/06 , C23C4/08 , C23C4/18 , C23C28/324 , C23C28/345 , F27D1/0006 , F27D3/026
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6.发明公开
公开(公告)号：EP0499656A1
公开(公告)日：1992-08-26
申请号：EP91102282.0
申请日：1991-02-18
申请人： TOCALO CO. LTD.
CPC分类号： C23C28/321 , B21B27/00 , B21B39/008 , C21D9/0012 , C22C1/10 , C22C2204/00 , C23C4/06 , C23C4/08 , C23C4/18 , C23C28/324 , C23C28/345 , F27D1/0006 , F27D3/026
摘要： In order to prevent production of build-up resistance and wear resistance on a roll for use in heat treating furnace effectively, an alloy layer, a cermet sprayed layer having reinforced zone and a chemical conversion coating are provide in this order on a roll substrate to form a multi-coating layer.
摘要翻译： 为了防止生产积聚性和耐磨性上在热利用热处理炉有效地，在合金层的辊，金属陶瓷喷涂具有增强区和一个化学转化膜以该顺序被提供在辊上的基材对层 形成多涂层。
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公开(公告)号：EP1156130B1
公开(公告)日：2019-02-20
申请号：EP00979084.1
申请日：2000-12-04
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8.发明公开Y2O3 Spray-coated member and production method thereof 审中-公开Y2O3-sprühbeschichtetes元素和Herstellungsverfahrendafür
公开(公告)号：EP2071049A1
公开(公告)日：2009-06-17
申请号：EP09001522.3
申请日：2005-07-29
申请人： TOCALO CO. LTD.
发明人： Harada, Yoshio , Teratani, Takema
CPC分类号： C23C4/02 , C03C17/23 , C03C17/36 , C03C17/3615 , C03C17/3649 , C03C23/0025 , C03C23/004 , C03C2217/288 , C03C2218/112 , C03C2218/32 , C23C4/10 , C23C4/11 , C23C4/12 , C23C4/18 , C23C28/042 , C23C28/044 , C23C28/321 , C23C28/322 , C23C28/345 , C23C28/3455 , C23C28/347 , Y02T50/67
摘要： A member is obtained by forming a Y 2 O 3 black spray coating on a surface of a substrate or covering the surface of the substrate with a Y 2 O 3 black spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The Y 2 O 3 black spray coating is produced by subjecting white Y 2 O 3 powdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a Y 2 O 3 white spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.
摘要翻译： 通过在基材的表面上形成Y 2 O 3黑色喷涂或者通过底涂层或中间层用Y 2 O 3黑色喷涂覆盖基材的表面而获得成员。 该涂层具有良好的热特性，并且通过高硬度具有良好的耐损坏性。 Y 2 O 3黑色喷涂是通过使白色Y 2 O 3粉末材料在基本上不含氧的惰性气体气氛中进行等离子体喷涂，或者通过形成Y 2 O 3白色喷雾涂层，然后照射电子束或 激光束到该涂层以在加热下熔化至少一部分白色涂层，从而平滑致密度并使涂层的表面变黑。
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9.发明授权Method of forming carbide-base composite coatings, the composite coatings formed by that method, and members having thermally sprayed chromium carbide coatings 失效一种制备碳化硅的基础上的复合涂层工艺; 复合涂层产生和体碳化铬的基础上热喷涂层
公开(公告)号：EP0690144B1
公开(公告)日：2001-11-21
申请号：EP95110026.2
申请日：1995-06-27
申请人： EBARA CORPORATION , TOCALO CO. LTD.
发明人： Nakahama, Syuhei , Nagahara, Hisamichi , Kawasaki, Masamichi , Harada, Yoshio , Takeuchi, Junichi
CPC分类号： C23C4/18 , C23C10/02 , Y10T428/265 , Y10T428/31678
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10.发明公开Electrostatic chuck member and a method of producing the same 失效Elektrostatische Haltevorrichtung und Herstellungsverfahren derselben
公开(公告)号：EP0762491A2
公开(公告)日：1997-03-12
申请号：EP96306130.4
申请日：1996-08-22
申请人： TOCALO CO. LTD.
发明人： Harada, Yoshio , Takeuchi, Junichi
CPC分类号： B23Q3/15 , H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al 2 O 3 ·TiO 2 based spray-coated layer containing a Ti n O 2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality.
摘要翻译： 静电吸盘构件包括金属基底，金属喷涂层的底涂层和含有TinO2n-1（n = 1-9）型化合物的Al 2 O 3·TiO 2基喷涂层的顶涂层，并且具有大体积 电阻率和较少的散射性和稳定的质量。
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