公开(公告)号：EP2997883A1

公开(公告)日：2016-03-23

申请号：EP14003225.1

申请日：2014-09-17

Applicant: Universität Stuttgart

Inventor： Körner, Klaus ,  Pruß, Christof ,  Herkommer, Alois ,  Osten, Wolfgang ,  Claus, Daniel

IPC: A61B5/00 ,  A61B10/02

CPC classification number: G01N21/35 ,  A61B5/0086 ,  A61B5/6848 ,  A61B10/0266 ,  G01N2201/06113

Abstract: Die vorliegende Erfindung betrifft eine Messsonde und eine Anordnung zur spektralen Absorptionsmessung, vorzugsweise im Infrarot. Des Weiteren betrifft die vorliegende Erfindung ein Verfahren zur spektroskopischen Absorptionsmessung. Die Messsonde (100) umfasst eine Schneideeinrichtung (13, 17), die ausgelegt ist, eine Schicht bzw. einen Lappen aus einer zu vermessenden Probe (16) abzuschneiden; einen Messspalt (12), der ausgelegt ist, die Probenschicht aufzunehmen; ein optisches Fensterelement (10) zum Ein- und Auskoppeln von Messlicht in den bzw. aus dem Messspalt (12); und einen Endreflektor (19), der ausgelegt und angeordnet ist, das durch den Messspalt propagierte Messlicht zurück in den Messspalt (12) zu reflektieren. Die Anordnung zur spektralen Absorptionsmessung umfasst die Messsonde, eine Lichtquelle und eine Einrichtung zur spektralen Analyse des von dem Messspalt ausgekoppelten Messlichts.

Abstract translation: 本文公开了一种测量探针和用于测量光谱吸收的装置，优选地在红外线中。 此外，本公开涉及用于光谱测量吸收的方法。 在一些实施例中，测量探针可以包括切割装置，其被配置为切割切片或分别从要测量的样品折回; 测量间隙，其被配置为容纳所述样品切片; 用于将测量光耦合到测量间隙中或分别离开测量间隙的光学窗口元件; 以及设计和布置成将通过测量间隙传播的测量光反射回到测量间隙中的端部反射器。 用于测量光谱吸收的布置可以包括测量探针，光源和用于对测量间隙耦合的测量光的光谱分析的装置。

公开(公告)号：EP3026426A1

公开(公告)日：2016-06-01

申请号：EP14003985.0

申请日：2014-11-26

Applicant: Universität Stuttgart

Inventor： Körner, Klaus ,  Claus, Daniel ,  Herkommer, Alois ,  Osten, Wolfgang

IPC: G01N21/552 ,  G01N21/85 ,  G01N21/43

CPC classification number: A61B5/0086 ,  A61B5/0035 ,  A61B5/0066 ,  A61B5/0075 ,  A61B5/4836 ,  A61B5/6848 ,  A61B2562/0238 ,  A61N2005/0612 ,  G01J3/0202 ,  G01J3/0213 ,  G01J3/42 ,  G01N21/552 ,  G01N21/8507 ,  G01N2021/434

Abstract: The present invention relates to a measuring probe for infrared spectroscopy, said measuring probe having an elongated form with a first end for coupling and decoupling infrared light into and out of the measuring probe and a second end. The measuring probe comprises an ATR prism arranged at the second end of the measuring probe. The ATR prism has at least one first surface having at least one measuring portion configured to be brought in optical contact with a measured object, at least one second surface having at least one reflective portion, and a cutting portion (53; 54) for cutting through the measured object, said cutting portion having a cutting tip or cutting blade with a cutting angle of equal to or less than 60°. The ATR prism is configured so that at least a portion of the infrared light entering the measuring probe undergoes an attenuated total reflection at the least one measuring portion of the first surface, at least a portion of the totally reflected light is reflected back towards the first surface by the at least one reflective portion of the second surface, and at least a portion of the light reflected back by the at least one reflective portion of the second surface undergoes an attenuated total reflection at the at least one measuring portion of the first surface and is decoupled from the ATR prism.
The invention relates further to an apparatus for infrared spectroscopy comprising the measuring probe and a method for infrared spectroscopy.

Abstract translation: 本发明涉及一种用于红外光谱的测量探针，所述测量探针具有细长形式，其具有第一端，用于将红外光耦合和分离出测量探针和从测量探针中分离出来以及第二端。 测量探头包括布置在测量探头第二端的ATR棱镜。 所述ATR棱镜具有至少一个第一表面，所述至少一个第一表面具有至少一个测量部分，所述至少一个测量部分被配置为与所测量的物体进行光学接触，至少一个第二表面具有至少一个反射部分，以及切割部分（53; 54） 通过测量对象，所述切割部分具有切割角度等于或小于60°的切割尖端或切割刀片。 ATR棱镜被配置为使得进入测量探针的红外光的至少一部分在第一表面的至少一个测量部分处经历衰减的全反射，全反射光的至少一部分被反射回第一 由第二表面的至少一个反射部分表面，并且由第二表面的至少一个反射部分反射回的光的至少一部分在第一表面的至少一个测量部分处经历衰减的全反射 并与ATR棱镜分离。 本发明还涉及一种用于红外光谱的装置，其包括测量探针和用于红外光谱的方法。

公开(公告)号：EP3026422B1

公开(公告)日：2018-02-14

申请号：EP14003984.3

申请日：2014-11-26

Applicant: Universität Stuttgart

Inventor： Körner, Klaus ,  Röseler, Arnulf ,  Claus, Daniel ,  Osten, Wolfgang

IPC: G01N21/21 ,  G01N21/65 ,  G01B9/02

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: The present invention relates to an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. The apparatus comprises a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). The measuring probe comprises an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX). The ATR prism (50) is configured so that at least a portion of polarized light entering the measuring probe (10) undergoes an attenuated total reflection at the least one measuring portion (M) of the first surface (M), at least a portion of the totally reflected light is reflected back towards the first surface by the at least one reflective portion (RX) of the second surface, and at least a portion of the light reflected back by the at least one reflective portion (RX) of the second surface undergoes an attenuated total reflection by the at least one measuring portion (M) of the first surface and is decoupled from the ATR prism (50). Further, the difference between the magnitude of the angle (alpha_p) between the first surface and the second surface and the magnitude of the critical total reflection angle is less than 12°.

公开(公告)号：EP3026422A1

公开(公告)日：2016-06-01

申请号：EP14003984.3

申请日：2014-11-26

Applicant: Universität Stuttgart

Inventor： Körner, Klaus ,  Röseler, Arnulf ,  Claus, Daniel ,  Osten, Wolfgang

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: The present invention relates to an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. The apparatus comprises a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). The measuring probe comprises an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX). The ATR prism (50) is configured so that
at least a portion of polarized light entering the measuring probe (10) undergoes an attenuated total reflection at the least one measuring portion (M) of the first surface (M),
at least a portion of the totally reflected light is reflected back towards the first surface by the at least one reflective portion (RX) of the second surface, and
at least a portion of the light reflected back by the at least one reflective portion (RX) of the second surface undergoes an attenuated total reflection by the at least one measuring portion (M) of the first surface and is decoupled from the ATR prism (50).
Further, the difference between the magnitude of the angle (alpha_p) between the first surface and the second surface and the magnitude of the critical total reflection angle is less than 12°.

Abstract translation: 本发明涉及一种用于光谱椭偏仪装置中，优选为红外光谱椭偏仪，以及用于椭圆偏振光谱法的方法用人装置。 该装置包括一个光源（12），检测器（30），分析器（41）的偏振器（40），和一测量探针（10）。 具有具有被配置在与测量对象（72）光学接触，从而至少一个测量部分（M）的至少一个第一表面测量探头ATR棱镜的方法包括：（50），以及至少一个第二表面具有至少一个 反射部（RX）。 作为试验做至少偏振光进入测量（10）的一部分之下进入衰减至少，一个测量部分的第一表面的（M）（M），至少一部分全反射ATR棱镜（50）被配置 该全反射的光被反射回朝向由所述至少一个反射部分的第二表面的（RX）的第一表面上，并且至少光的一部分反射回所述第二的至少一个反射部分（RX） 表面由第一表面的至少一个测量部分（M）下的推移衰减全反射，并从ATR棱镜（50）分离。 此外，第一表面和第二表面和所述临界全反射角的量值之间的角度（alpha_p）的大小之间的差小于12°。