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    Spectrometer
    2.
    发明公开
    Spectrometer 失效
    光谱仪

    公开(公告)号：EP0709659A3

    公开(公告)日：1997-01-08

    申请号：EP95117079.4

    申请日：1995-10-30

    申请人： VALTION TEKNILLINEN TUTKIMUSKESKUS ,  VAISALA OY

    发明人： Lehto, Ari ,  Lindblad, Stefan ,  Torkkeli, Altti ,  Blomberg, Martti

    IPC分类号： G01J3/26 ,  G01J3/10

    CPC分类号： G01J3/26 ,  G01J3/0256 ,  G01J3/0259

    摘要： The invention relates to a miniaturized spectrometer for gas concentration measurement. The spectrometer comprises a radiation source (3) for admitting electromagnetic radiation onto the gas to be measured, a detector (5) for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer (4) placed in the path of the radiation prior to the detector (5), control electronics circuitry (2) for controlling the radiation source (3), the interferometer (4) and the detector (5). According to the invention, the radiation source (3), the detector (5), the interferometer (4) and the control electronics (2) are integrated in a miniaturized fashion onto a common, planar substrate (1) and the radiation source (3) is an electrically modulatable micromechanically manufactured thermal radiation emitter.

    Spectrometer
    3.
    发明公开
    Spectrometer 失效
    光谱仪

    公开(公告)号：EP0709659A2

    公开(公告)日：1996-05-01

    申请号：EP95117079.4

    申请日：1995-10-30

    申请人： VALTION TEKNILLINEN TUTKIMUSKESKUS ,  VAISALA OY

    发明人： Lehto, Ari ,  Lindblad, Stefan ,  Torkkeli, Altti ,  Blomberg, Martti

    IPC分类号： G01J3/26 ,  G01J3/10

    CPC分类号： G01J3/26 ,  G01J3/0256 ,  G01J3/0259

    摘要： The invention relates to a miniaturized spectrometer for gas concentration measurement. The spectrometer comprises a radiation source (3) for admitting electromagnetic radiation onto the gas to be measured, a detector (5) for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer (4) placed in the path of the radiation prior to the detector (5), control electronics circuitry (2) for controlling the radiation source (3), the interferometer (4) and the detector (5). According to the invention, the radiation source (3), the detector (5), the interferometer (4) and the control electronics (2) are integrated in a miniaturized fashion onto a common, planar substrate (1) and the radiation source (3) is an electrically modulatable micromechanically manufactured thermal radiation emitter.

    摘要翻译： 本发明涉及用于气体浓度测量的小型化光谱仪。 光谱仪包括用于将电磁辐射进入待测气体的辐射源（3），用于检测透过或从气体发出的辐射的检测器（5），放置在所述气体中的电可调法布里 - 珀罗干涉仪（4） 在检测器（5）之前的辐射路径，用于控制辐射源（3），干涉仪（4）和检测器（5）的控制电子电路（2）。 根据本发明，辐射源（3），检测器（5），干涉仪（4）和控制电子器件（2）以小型化方式集成到共同的平面基板（1）和辐射源 3）是可电调制的微机械制造的热辐射发射器。