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1.发明公开Optically black absorption or emission surface and method for producing the same 有权Optisch schwarze Absorptions-oderEmissionsflächeund Herstellungsverfahren
公开(公告)号：EP0922972A1
公开(公告)日：1999-06-16
申请号：EP98660137.5
申请日：1998-12-08
CPC分类号： G02B5/22
摘要： The invention relates to a structure suitable for manufacturing by the fabrication techniques of microelectronics so as to include an optically black surface adapted to function as an absorber or emitter, respectively, over a predetermined wavelength range, said structure comprising a electrically nonconducting support layer (1), a metallic mirror layer (2) made on said support layer (1), and a lossy layer (4) made on the support layer (1) and the metallic mirror layer (2) superimposed thereon. According to the invention, the mirror layer (2) is made on the upper surface of said support layer (1) and the lossy layer (4) is made from a doped semiconductor material. The thickness of the multilayer structure (3, 4, 7) and the doping of the lossy layer (4) are proportioned to each other so that the mirror layer (2) will be optically matched over the predetermined wavelength range of absorption or emission, respectively, to the medium surrounding the structure. The invention also concerns a method for manufacturing said surfaces.
摘要翻译： 本发明涉及一种适用于通过微电子学制造技术制造的结构，以便包括分别在预定波长范围上用作吸收体或发射体的光学黑色表面，所述结构包括电非导电支撑层（1 ），在所述支撑层（1）上形成的金属镜层（2）和在支撑层（1）上形成的有损耗层（4）和叠置在其上的金属镜层（2）。 根据本发明，镜面层（2）制成在所述支撑层（1）的上表面上，并且有损层（4）由掺杂的半导体材料制成。 多层结构（3,4,7）的厚度和有损层（4）的掺杂彼此成比例，使得镜层（2）在预定的吸收或发射波长范围内将被光学匹配， 分别围绕结构的介质。 本发明还涉及制造所述表面的方法。
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2.发明授权Optically black absorption or emission surface and method for producing the same 有权光学黑色的吸收或发射表面和制造工艺
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公开(公告)号：EP0709659B1
公开(公告)日：2000-08-16
申请号：EP95117079.4
申请日：1995-10-30
CPC分类号： G01J3/26 , G01J3/0256 , G01J3/0259
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4.发明公开
公开(公告)号：EP1160567A3
公开(公告)日：2004-01-21
申请号：EP01660066.0
申请日：2001-04-11
发明人： Blomberg, Martti , Lehto, Ari , Saarilahti, Jaakko
CPC分类号： G01N25/32
摘要： The invention concerns a method and a sensor for measuring gas concentrations. The sensor according to the invention comprises an element (A1, 5) which is sensitive to a chemical reaction of the gas being measured and means for measuring (13) the temperature of the element (A1, 5) sensitive to a chemical reaction of the gas being measured. According to the invention, the temperature-measuring means (TP1, TP2) are constituted by several series-connected thermopairs (13).
摘要翻译： 本发明涉及用于测量气体浓度的方法和传感器。 根据本发明的传感器包括对待测气体的化学反应敏感的元件（A1,5）和用于测量（13）对于化学反应敏感的元件（A1，5）的温度的装置 被测量的气体 根据本发明，温度测量装置（TP1，TP2）由若干串联连接的热电偶（13）构成。
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公开(公告)号：EP1160567A2
公开(公告)日：2001-12-05
申请号：EP01660066.0
申请日：2001-04-11
发明人： Blomberg, Martti , Lehto, Ari , Saarilahti, Jaakko
IPC分类号： G01N25/30
CPC分类号： G01N25/32
摘要： The invention concerns a method and a sensor for measuring gas concentrations. The sensor according to the invention comprises an element (A1, 5) which is sensitive to a chemical reaction of the gas being measured and means for measuring (13) the temperature of the element (A1, 5) sensitive to a chemical reaction of the gas being measured. According to the invention, the temperature-measuring means (TP1, TP2) are constituted by several series-connected thermopairs (13).
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公开(公告)号：EP0709659A3
公开(公告)日：1997-01-08
申请号：EP95117079.4
申请日：1995-10-30
CPC分类号： G01J3/26 , G01J3/0256 , G01J3/0259
摘要： The invention relates to a miniaturized spectrometer for gas concentration measurement. The spectrometer comprises a radiation source (3) for admitting electromagnetic radiation onto the gas to be measured, a detector (5) for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer (4) placed in the path of the radiation prior to the detector (5), control electronics circuitry (2) for controlling the radiation source (3), the interferometer (4) and the detector (5). According to the invention, the radiation source (3), the detector (5), the interferometer (4) and the control electronics (2) are integrated in a miniaturized fashion onto a common, planar substrate (1) and the radiation source (3) is an electrically modulatable micromechanically manufactured thermal radiation emitter.
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公开(公告)号：EP0709659A2
公开(公告)日：1996-05-01
申请号：EP95117079.4
申请日：1995-10-30
CPC分类号： G01J3/26 , G01J3/0256 , G01J3/0259
摘要： The invention relates to a miniaturized spectrometer for gas concentration measurement. The spectrometer comprises a radiation source (3) for admitting electromagnetic radiation onto the gas to be measured, a detector (5) for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer (4) placed in the path of the radiation prior to the detector (5), control electronics circuitry (2) for controlling the radiation source (3), the interferometer (4) and the detector (5). According to the invention, the radiation source (3), the detector (5), the interferometer (4) and the control electronics (2) are integrated in a miniaturized fashion onto a common, planar substrate (1) and the radiation source (3) is an electrically modulatable micromechanically manufactured thermal radiation emitter.
摘要翻译： 本发明涉及用于气体浓度测量的小型化光谱仪。 光谱仪包括用于将电磁辐射进入待测气体的辐射源（3），用于检测透过或从气体发出的辐射的检测器（5），放置在所述气体中的电可调法布里 - 珀罗干涉仪（4） 在检测器（5）之前的辐射路径，用于控制辐射源（3），干涉仪（4）和检测器（5）的控制电子电路（2）。 根据本发明，辐射源（3），检测器（5），干涉仪（4）和控制电子器件（2）以小型化方式集成到共同的平面基板（1）和辐射源 3）是可电调制的微机械制造的热辐射发射器。
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公开(公告)号：EP0689229B1
公开(公告)日：1999-09-15
申请号：EP95304360.1
申请日：1995-06-21
申请人： INSTRUMENTARIUM OYJ , VAISALA OYJ
发明人： Blomberg, Martti , Orpana, Markku , Lehto, Ari , Kattelus, Hannu
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公开(公告)号：EP0608049B1
公开(公告)日：2001-11-07
申请号：EP94300082.8
申请日：1994-01-06
申请人： VAISALA OYJ
发明人： Koskinen, Yrjö , Lehto, Ari , Tammela, Simo , Blomberg, Martti , Orpana, Markku , Torkkeli, Altti
CPC分类号： G01J3/26 , G01J2003/1247 , G01N21/31 , G01N21/3504 , G02B26/02
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