摘要:
Disclosed is an integrated circuit (100) comprising a semiconductor substrate (110) carrying a plurality of circuit elements (111); and a carbon dioxide sensor (120) over said semiconductor substrate, said sensor comprising a pair of electrodes (122, 124) laterally separated from each other; and a carbon dioxide (CO 2 ) permeable polymer matrix (128) at least partially covering the pair of electrodes, said matrix encapsulating a liquid (126) comprising an organic alcohol and an organic amidine or guanidine base. A composition for forming such a CO 2 sensor on the IC and a method of manufacturing such an IC are also disclosed.
摘要:
Disclosed is an integrated circuit comprising a substrate (10) including semiconductor devices and a metallization stack (20) over said substrate for interconnecting said devices, the metallization stack comprising a cavity (36), and a thermal conductivity sensor comprising at least one conductive portion (16, 18) of said metallization stack suspended in said cavity. A method of manufacturing such an IC is also disclosed.
摘要:
A thermal conductivity gas sensor includes a sensing element and an amplification material coupled to the sensing element. The amplification material has a target gas dependent thermal diffusivity. The sensing element measures the thermal diffusivity of the amplification material to determine a target gas concentration.
摘要:
Disclosed is an integrated circuit comprising an electrode arrangement (30, 32) for detecting the presence of a liquid, said electrode arrangement comprising a first electrode (30) and a second electrode (32), wherein, prior to exposure of the electrode arrangement to said liquid, a surface of at least one of the first electrode and second electrode is at least partially covered by a compound (40) that is soluble in the liquid; the electrical properties of the electrode arrangement being dependent on the amount of the compound covering said surface. An package and electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.
摘要:
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.
摘要:
A sensor device (100) for sensing particles is configured as a biosensor and comprises a substrate (102) that is a semiconductor substrate, and a sensor active region (108) arranged in and/or on the substrate (102) and being sensitive to the presence of the particles to be detected. The sensor active region (108) comprises a metallic carrier (103, 105, 304, 440), and a self assembled monolayer (106) positioned on the metallic carrier (103, 105, 304, 440). The metallic carrier comprises one of the group consisting of a meander-shaped line (304), a zig-zag-shaped line, a spiral line (440), and interdigitated electrodes (103, 105).