CVD APPARATUS AND METHOD FOR CLEANING CVD APPARATUS
    8.
    发明公开
    CVD APPARATUS AND METHOD FOR CLEANING CVD APPARATUS 有权
    CVD系统及方法清洁化学气相沉积系统

    公开(公告)号:EP1612857A4

    公开(公告)日:2009-02-25

    申请号:EP04720167

    申请日:2004-03-12

    摘要: There is provided a CVD apparatus capable of efficiently removing a by-product such as SiO 2 or Si 3 N 4 which is stuck and deposited onto the surface of an internal wall, an electrode or the like in a CVD chamber in a film forming process, and furthermore, executing cleaning having a small damage over an upper electrode and a counter electrode stage (a lower electrode) and manufacturing a thin filmof high quality, and a CVD apparatus cleaning method using the same. In a CVD apparatus cleaning method of introducing a cleaning gas to carry out plasma cleaning over an inside of a CVD chamber after forming a deposited film on a surface of a substrate, a frequency of an RF to be applied to an RF electrode is switched into a first frequency to be applied for forming a film and a second frequency to be applied when executing the plasma cleaning.

    DNA FRAGMENT HAVING PROMOTER FUNCTION
    9.
    发明公开
    DNA FRAGMENT HAVING PROMOTER FUNCTION 审中-公开
    DNA-FRAGMENT MIT PROMOTORFUNKTION

    公开(公告)号:EP1790721A4

    公开(公告)日:2008-12-10

    申请号:EP05776785

    申请日:2005-09-05

    IPC分类号: C12N15/09 C12N1/20

    CPC分类号: C07K14/34 C12N15/67

    摘要: To produce a useful organic compound under anaerobic conditions, it is intended to provide a method of inducing the expression of the promoter functions of various genes in a coryneform bacterium participating in the exertion of the functions to thereby highly efficiently exert the functions of the coryneform bacterium under such conditions. More specifically speaking, it is intended to efficiently and highly express various protein genes necessary in producing a target substance while inhibiting the expression of unnecessary protein genes by providing a method of enhancing and/or inhibiting the promoter functions relating to the above-described genes. A DNA fragment which is useful as a primer to be transferred into a coryneform bacterium capable of highly efficiently producing a useful substance such as lactic acid or succinic acid at a high yield.