公开(公告)号：EP3342035A1

公开(公告)日：2018-07-04

申请号：EP16806965.6

申请日：2016-04-11

申请人： Haronian, Dan

发明人： Haronian, Dan

IPC分类号： H02N2/18 ,  G01N27/26 ,  G01N31/22 ,  G01N37/00 ,  H01L41/113

CPC分类号： G01N27/26 ,  B81B3/0064 ,  B81B3/0086 ,  B81B2201/03 ,  B81B2201/038 ,  G01N27/4145 ,  G01N31/22 ,  H01L41/1136 ,  H02N2/18

摘要： The present invention discloses, inter alia, a micro-electromechanical device (MEMD) for sensing and for harvesting electrical energy responsive to being subjected to mechanical forces, comprising at least one first conductive element fixedly mounted on a first support, wherein the at least one first conductive element is chargeable with electrons; and at least one second conductive element inertia-mounted on a second support such that the first and second supports are electrically isolated from each other.

公开(公告)号：EP2864237A4

公开(公告)日：2016-06-01

申请号：EP13806716

申请日：2013-06-12

申请人： SILEX MICROSYSTEMS AB

发明人： ÅGREN PETER

IPC分类号： B81B7/02 ,  B81B5/00 ,  G02B26/08 ,  H01L21/30 ,  H01L21/768 ,  H01L23/522

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B3/0045 ,  B81B2201/02 ,  B81B2201/03 ,  B81B2203/04 ,  B81C1/00357 ,  B81C1/00619 ,  G01D5/24 ,  G02B26/085 ,  H01L23/481 ,  H01L23/5225 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP3216753A1

公开(公告)日：2017-09-13

申请号：EP17159400.5

申请日：2017-03-06

申请人： Commissariat à l'Energie Atomique et aux Energies Alternatives

发明人： GHIS, Anne ,  DELAUNAY, Marc

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0089 ,  B81B3/0075 ,  B81B2201/02 ,  B81B2201/0264 ,  B81B2201/03 ,  B81B2201/06 ,  B81B2203/0127 ,  B81B2207/115 ,  B81C1/00158

摘要： L'invention concerne une membrane en carbone amorphe pour un microsystème électromécanique, la membrane en carbone amorphe présentant une épaisseur comprise enre 1 nm et 50 nm, et de préférence comprise entre 3 nm et 20 nm, dans laquelle la membrane en carbone amorphe présente un taux d'hybridation de type sp 3 compris entre 20% et 40%.

摘要翻译： 本发明涉及用于机电微系统的无定形碳膜，所述无定形碳膜具有1nm至50nm，并且优选3nm至20nm的厚度，其中所述无定形碳膜具有 sp3杂交率在20％至40％之间。

公开(公告)号：EP2864237B1

公开(公告)日：2017-05-10

申请号：EP13806716.0

申请日：2013-06-12

申请人： Silex Microsystems AB

发明人： ÅGREN, Peter

IPC分类号： B81B7/02 ,  B81B5/00 ,  G02B26/08 ,  H01L21/30 ,  H01L21/768 ,  H01L23/522

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B3/0045 ,  B81B2201/02 ,  B81B2201/03 ,  B81B2203/04 ,  B81C1/00357 ,  B81C1/00619 ,  G01D5/24 ,  G02B26/085 ,  H01L23/481 ,  H01L23/5225 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP3257148B1

公开(公告)日：2018-12-12

申请号：EP16715233.9

申请日：2016-02-13

申请人： Beckmann, Günter

发明人： BISCHUR, Enrico ,  SCHWESINGER, Norbert ,  ZÄHRINGER, Sandy

IPC分类号： H02N1/08 ,  B81B3/00

CPC分类号： H02N1/08 ,  B81B3/0018 ,  B81B2201/03 ,  H01G7/02 ,  H01H13/28 ,  H02N2/181

公开(公告)号：EP3257148A1

公开(公告)日：2017-12-20

申请号：EP16715233.9

申请日：2016-02-13

申请人： Beckmann, Günter

发明人： BISCHUR, Enrico ,  SCHWESINGER, Norbert ,  ZÄHRINGER, Sandy

IPC分类号： H02N1/08 ,  B81B3/00

CPC分类号： H02N1/08 ,  B81B3/0018 ,  B81B2201/03 ,  H01G7/02 ,  H01H13/28 ,  H02N2/181

摘要： The invention describes an electrostatic microgenerator (1) having electret films (2, 22) which are arranged above one another in a double layer and each have a metal layer arranged on one side thereof as an electrode. The films are embedded in a hermetically sealed casing in a loosely wound manner. Applying pressure to a first desired pressure surface (8), which is provided on the outside parallel to the capacitor plates (3, 4) formed in this manner, makes it possible to generate an electrical voltage by changing the distance between the capacitor plates (3, 4).

公开(公告)号：EP2864237A1

公开(公告)日：2015-04-29

申请号：EP13806716.0

申请日：2013-06-12

申请人： Silex Microsystems AB

发明人： ÅGREN, Peter

IPC分类号： B81B7/02 ,  B81B5/00 ,  G02B26/08 ,  H01L21/30 ,  H01L21/768 ,  H01L23/522

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B3/0045 ,  B81B2201/02 ,  B81B2201/03 ,  B81B2203/04 ,  B81C1/00357 ,  B81C1/00619 ,  G01D5/24 ,  G02B26/085 ,  H01L23/481 ,  H01L23/5225 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to a semiconductor device, comprising a semiconductor substrate (10) having a first (12a) and a second (12b) side. There is provided at least one via (15) extending through said substrate (10) having first (16a) and second (16b) end surfaces, said first end surface (16a) constituting an transducer electrode for interacting with a movable element (14) arranged at the first side (12a) of the substrate (10). A shield (17) is provided on and covers at least part of the first side (12a) of the substrate (10), the shield/mask (17) comprising a conductive layer (19a) and an insulating material layer (19b) provided between the substrate (10) and the conductive layer (19a). The mask has an opening (18) exposing only a part of the first surface (16a) of the via. Preferably the opening (18) in the mask is precisely aligned with the movable element, and the area of the opening is accurately defined.