摘要:
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
摘要:
A supporting pin (P) inserted into a pin insert hole (4) provided in a species bar (1) at the upper end of a glass base material for suspendedly supporting the glass base material, comprising a pin body (11) having a flange part, a first shaft part, a second shaft part, and a male screw part and a pin auxiliary body (12) having a flange part, a shaft part, and a female screw part connected to each other, wherein elastic cover bodies (13, 14) formed of a synthetic resin are fitted onto the first and second shaft parts of the pin body (11) and the shaft part of the pin auxiliary body (12), and the second shaft part of the pin body (11) having the cover body (13) fitted thereonto is formed so as to have an outside diameter of such a degree as can be inserted into the pin insert hole (4) provided in the species bar (1).
摘要:
A support pin ―which is to be inserted into a pin insert hole formed in a seed rod provided at an upper end of a glass preform and suspends and supports the glass preform―is formed by coupling a pin main body having a flange section, a first shaft section, a second shaft section, and a male screw section with an auxiliary pin member having a flange section, a shaft section, and a female screw section. The first and second shaft sections of the pin main body and the shaft section of the auxiliarypinmember are providedwith claddings which are formed from synthetic resin and have elasticity. The support pin is formed so that the second shaft section of the pin main body covered with the cladding can be inserted into the pin insert hole formed in the seed rod.
摘要:
Device and method for chemical deposition on an elongated member (2) of vitreous material in which a rotating gripping member (5) causes a first end portion (2a) of the elongated member (2) to rotate (20). The second end portion (2b) of the elongated member (2) is borne by a pair of supporting members (34, 35) which are axially spaced apart (L1) and are capable of permitting angular rotational movement and axial sliding of the second end portion. Each supporting member (34, 35) also applies a radial constraint preventing the second end portion (2b) from moving away from the axis of rotation, thus forcing the second potion (2b) and the elongated member (2) to lie with a longitudinal axis coaxial with the axis of rotation (18). Any curvature of the elongated member (2) is corrected and recovered in this way.
摘要:
The invention relates to a known method for producing a quartz glass body by depositing SiO2 particles on the cylinder jacket surface of a cylindrical mandrel that rotates around the longitudinal axis thereof, whereby an essentially cylindrical porous blank which is provided with an inner bore is produced. The mandrel is subsequently removed and the blank is sintered. The aim of the invention is to modify said known method in such a way that a tube pipe can be welded to the front face of the blank in an unproblematic manner. According to the invention, the mandrel (1) is surrounded by a moulded part (5) in the region of one of the ends (8) of the blank (3) being formed, whereby said part rotates at the same rotational speed as the mandrel (1) and is provided with a core area (6) that faces the blank (3). At least one portion of said core area is detachably embedded into the blank (3) on the front face thereof, whereby said blank is being formed. The moulded part is removed before sintering, whereby a socket of the inner bore pertaining to the blank (3) is produced, said socket being adapted to the core area (6).
摘要:
A production method of synthetic silica glass according to the present invention comprises a first step of ejecting a silicon compound and a combustion gas containing oxygen and hydrogen from a burner to effect hydrolysis of the silicon compound in oxyhydrogen flame to produce fine particles of silica glass, and thereafter depositing and vitrifying the fine particles of silica glass on a target opposed to the burner to obtain a synthetic silica glass ingot; a second step of heating the synthetic silica glass ingot or the like obtained in the first step up to a first retention temperature of not less than 900°C, retaining the ingot or the like at the first retention temperature, and cooling the ingot or the like at a temperature decrease rate of not more than 10°C/h down to a temperature of not more than 500°C; and a third step of heating the synthetic silica glass ingot or the like obtained in the second step up to a second retention temperature of not less than 500°C nor more than 1100°C, retaining the ingot or the like thereat, and thereafter cooling the ingot or the like at a temperature decrease rate of not less than 50°C/h down to a temperature 100°C lower than the second retention temperature.
摘要:
Die Erfindung betrifft ein Verfahren zur Herstellung eines optischen Rohlings aus synthetischem Quarzglas durch Verglasen und Umformen eines porösen, eine Längsachse (L) aufweisenden, zylinderförmigen SiO 2 Sootkörpers (1) in einer eine Schmelzform (23) mit Bodenplatte (24) aufweisenden Erhitzungszone (21), umfassend folgende Verfahrensschritte: (a) Verglasen des SiO2-Sootkörpers (1) in der Erhitzungszone (21) bei einer Verglasungstemperatur unter Bildung eines vollständig verglasten, transparenten Quarzglaskörpers (6), und anschließend (b) Umformen des verglasten Quarzglaskörpers (6) durch Erweichen in der Schmelzform (23) bei einer Erweichungstemperatur unter Bildung einer viskosen Quarzglasmasse (7), welche das Volumen der Schmelzform (23) ganz oder teilweise ausfüllt, und (c) Abkühlen der Quarzglasmasse (7) und Entnahme aus der Schmelzform (23) unter Bildung des optischen Rohlings. Um vollzylindrische Rohlinge aus synthetischem Quarzglas mit reproduzierbar guter Qualität, hoher Reinheit und homogenen, rotations-symmetrischen Eigenschaftsprofilen zu erhalten wird erfindungsgemäß vorgeschlagen, dass beim Verglasen gemäß Verfahrensschritt (a) ein vollzylindrischer Quarzglaskörper (6) gebildet wird, und dass beim Umformen in der Schmelzform (23) gemäß Verfahrensschritt (b) der vollzylindrische Quarzglaskörper (6) durch gesteuertes Zuführen mit einem Zentrierungsmittel der Bodenplatte (24) in Kontakt gebracht wird.