Abstract:
A method of measuring a height of 3-dimensional shape measurement apparatus includes irradiating a first grid pattern light from a plurality of first lighting devices and a second grid pattern light from a plurality of second lighting devices which are alternatively arranged to the first lighting devices toward a target object wherein the first grid pattern light has a first equivalent wavelength and the second grid pattern light has a second equivalent wavelength that is different from the first equivalent wavelength, and obtaining a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light, generating combined pattern images by combining the first and second pattern images obtained from the first and second lighting devices adjacent to each other among the plurality of first and second lighting devices, calculating heights of the target object according to a combined equivalent wavelength of the combined pattern images, and determining a representative height of the target object by using the calculated heights of the target object. And therefore, it is possible to measure a height of a target object which exceeds an available height of measurement by each of the first and second lighting devices, as well as, more accurate and reliable height may be obtained.
Abstract:
An apparatus may include an emitter to project a low resolution optical pattern and a high resolution optical pattern having a finer resolution than the low resolution optical pattern and a sensor to detect a composite image, where the composite image comprises a low resolution optical reflection pattern comprising reflection of the projected low resolution optical pattern and a high resolution optical reflection pattern comprising a reflection of the projected high resolution optical pattern. The apparatus may also include logic to determine object depth in a first depth range and object depth in a second depth range based upon the detected composite image. Other embodiments are disclosed and claimed.
Abstract:
Eine Messanordnung zum Vermessen einer dreidimensional ausgedehnten Struktur mittels eines optischen Sensors (2), wobei der Sensor (2) einen sich quer zur optischen Achse (4) erstreckenden Messbereich (5) ausweist, ist in Hinblick auf eine präzise und relativ schnelle Vermessung der dreidimensional ausgedehnten Struktur bei einfachem Aufbau der Messanordnung und geringen Kosten derart weitergebildet, dass die Messanordnung (1) eine Spiegelanordnung (3) mit mehreren Spiegeln (9, 12, 13) umfasst, die den Messbereich (5) des Sensors (2) zunächst über einen oder mehrere Spiegel (9) in mindestens zwei divergierende Bereiche (10, 11) aufteilt und die die divergierenden Bereiche (10, 11) über einen oder mehrere weitere Spiegel (12, 13) wieder derart zusammenführt, dass sich die Bereiche (14, 15) in einem Messfeld (16) schneiden, wobei in dem Messfeld (16) eine Vermessung der dreidimensional ausgedehnten Struktur erfolgt. Ein entsprechendes Verfahren ist angegeben.
Abstract:
Arrangement and method for measuring surface irregularities at an object, which arrangement comprises at least one source of light arranged to illuminate the object from at least two different positions at a small angle of incidence towards the object, a camera arranged to measure the shadow formation generated by said illumination of the surface microstructure, and an evaluting means for determining the surface microstructure from the generated shadow formation by means of signal processing of an input signal from said camera.
Abstract:
Disclosed are a substrate inspection apparatus and a method for displaying a component in a three-dimensional inspection of a substrate. The substrate inspection apparatus measures a substrate or an inspection target region of interest of the substrate and displays an image of components positioned within the measured region on a display unit. The image of the components displayed on the display unit may be displayed in a predetermined reference direction. The difference between the reference direction and a direction in which the actual component is disposed on the substrate is displayed in the form of a numerical value or a figure. Alternatively, the image of the component in the reference direction and the image of the actually disposed component are simultaneously displayed on a screen, and a user may convert a display method of the image by using a toggle button.