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    RESONANT MEMBRANE GAS SENSOR AND NON-TRANSITORY MACHINE-READABLE STORAGE MEDIUM THEREFORE
    1.
    发明公开
    RESONANT MEMBRANE GAS SENSOR AND NON-TRANSITORY MACHINE-READABLE STORAGE MEDIUM THEREFORE 审中-公开
    共振膜气体传感器和非过渡性机器可读存储介质

    公开(公告)号：EP3191830A1

    公开(公告)日：2017-07-19

    申请号：EP15757467.4

    申请日：2015-08-25

    申请人： ams International AG

    发明人： VAN DER AVOORT, Casper ,  BESLING, Willem Frederik Adrianus

    IPC分类号： G01N29/02 ,  G01L9/00 ,  G01N29/036 ,  G01N29/24

    CPC分类号： G01N33/004 ,  G01L9/0016 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N29/2406 ,  G01N29/2431 ,  G01N29/323 ,  G01N29/4436 ,  G01N33/0031 ,  G01N2291/021 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02809 ,  G01N2291/02818 ,  Y02A50/244

    摘要： Various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.

    摘要翻译： 各种示例性实施例涉及用于测量二氧化碳（CO 2）水平的装置，包括第一振荡器组，其包括第一传感器以测量空气压力，其中第一传感器包括第一密封膜，并且其中第一密封膜覆盖密封的第一 腔; 第二振荡器组，其包括用于测量第二未密封的振荡膜的谐振频率的第二传感器，并且其中第二未密封的膜覆盖与第二传感器外部的空气接触的第二谐振器; 以及混频器，其接收来自第一振荡器组的第一频率测量输出和来自第二振荡器组的第二频率测量输出，输出第一频率测量值与第二频率测量值的差值，并且基于 区别。

    Resonant pressure sensor and method of manufacturing the same
    3.
    发明公开
    Resonant pressure sensor and method of manufacturing the same 有权
    Resonanzdrucksensor和Verfahren zu dessen Herstellung

    公开(公告)号：EP2568269A2

    公开(公告)日：2013-03-13

    申请号：EP12181461.0

    申请日：2012-08-23

    申请人： Yokogawa Electric Corporation

    发明人： Yoshida, Yuusaku ,  Yoshida, Takashi ,  Suzuki, Hiroshi ,  Yoshita, Shuhei ,  Terashita, Hisashi

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0016 ,  G01L9/0045

    摘要： A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.

    摘要翻译： 包括布置在隔膜上的一个或多个谐振型应变计的共振压力传感器可以包括由硅制成的传感器基板，并且包括一个表面，一个或多个谐振型应变计元件布置在该表面上，另一个表面抛光到 具有与隔膜对应的厚度，由硅构成的基底基板，其包括与传感器基板的另一个表面直接接合的一个表面;凹部，形成在与传感器基板接合的基部的一部分中，基本上形成隔膜 在传感器基板中，并且包括预定的间隙，其不会由于异物而限制隔膜的可移动范围，并且抑制由共振型应变计元件的振动激励的隔膜的振动，一个或多个导电孔和 流体。

    Pressure sensor with vibrating member
    4.
    发明公开
    Pressure sensor with vibrating member 有权
    与振动器的压力传感器

    公开(公告)号：EP1808685A3

    公开(公告)日：2008-11-12

    申请号：EP07105760.8

    申请日：2003-11-07

    申请人： VARIAN S.p.A.

    发明人： Maccarrone, Cristian ,  Correale, Raffaele ,  Busso, Mario

    IPC分类号： G01L21/22

    CPC分类号： G01L9/0016 ,  G01L9/0019 ,  G01L21/22

    摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.

    Backscatter sensor
    5.
    发明公开
    Backscatter sensor 审中-公开
    Rückstrahlung传感器

    公开(公告)号：EP1923674A1

    公开(公告)日：2008-05-21

    申请号：EP06124075.0

    申请日：2006-11-14

    申请人： Infineon Technologies SensoNor AS

    发明人： Kvisteroey, Terje ,  Holm, Reidar ,  Horntvedt, Sverre

    IPC分类号： G01D5/48 ,  G01L9/00 ,  G01P15/097

    CPC分类号： G01D21/00 ,  G01L9/0016 ,  G01L9/0019 ,  G01P15/097

    摘要： A micro mechanical backscatter sensor is provided. The backscatter sensor comprises a receiver, a transmitter and a resonator having a resonance frequency of vibration and being arranged such that an external force applied thereto alters the resonance frequency of vibration thereof. The sensor also comprises a capacitive element. Each of the receiver, the transmitter, the resonator and the capacitive element are arranged to be operatively connected to one another. The capacitor is arranged such that a voltage is generated across the capacitor in response to a received signal, said voltage causing the resonator to resonate at the resonance frequency thereof. The transmitter is arranged to transmit a signal of a frequency corresponding to the resonance frequency of the resonator

    摘要翻译： 提供了微机械反向散射传感器。 后向散射传感器包括具有振动共振频率的接收器，发射器和谐振器，并被布置成使得施加的外力改变其振动的共振频率。 传感器还包括电容元件。 接收器，发射器，谐振器和电容元件中的每一个被布置成彼此可操作地连接。 电容器被布置成使得响应于接收信号在电容器两端产生电压，所述电压使谐振器以其谐振频率谐振。 发射器被布置成发射对应于谐振器的谐振频率的频率的信号

    RESONANT SENSOR
    7.
    发明公开
    RESONANT SENSOR 有权
    共振传感器

    公开(公告)号：EP1155297A1

    公开(公告)日：2001-11-21

    申请号：EP99967043.3

    申请日：1999-12-22

    申请人： RADI MEDICAL SYSTEMS AB

    发明人： STEMME, Göran ,  KÄLVESTEN, Edvard

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0016 ,  G01L9/0017 ,  G01L9/0042

    摘要： A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.

    Feuchtigkeitsausgleich einer Luftdruckmessanordnung
    9.
    发明公开
    Feuchtigkeitsausgleich einer Luftdruckmessanordnung 失效
    空气压力测量装置的湿度补偿

    公开(公告)号：EP0219642A3

    公开(公告)日：1989-08-02

    申请号：EP86111454.4

    申请日：1986-08-19

    申请人： NORD MICRO Elektronik Feinmechanik AG

    发明人： Innerhofer, Günther

    IPC分类号： G01L9/00 ,  G01L19/00

    CPC分类号： G01L9/0016 ,  G01L9/0026

    摘要： Die Erfindung bezieht sich auf eine Meßanordnung zum Messen des Luftdrucks mit Hilfe eines zu Eigenschwingungen anregbaren Drucksen­sors. Um den nicht vernachlässigbaren Einfluß der relativen Feuchtigkeit der hinsichtlich des Druckes zu messenden Luft zu eliminieren, wird vorgeschlagen, einen Feuchtesensor, vorzugsweise in Form eines Kon­densators mit einem feuchteempfindlichen Polymer als Dieelektrikum einzusetzen und die ermittelten Druckwerte um den Einfluß der Feuch­tigkeit zu bereinigen.