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公开(公告)号：EP2212680A2
公开(公告)日：2010-08-04
申请号：EP09787463.0
申请日：2009-07-09
Applicant: Brightview Systems Ltd.
Inventor： FINAROV, Moshe
CPC classification number: G01N21/8422 , G01N21/31 , G01N21/6489 , G01N21/8901 , G01N2021/3568 , G01N2021/8908 , G01N2201/0826 , G01N2201/0833 , G01N2201/1085
Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.
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公开(公告)号：EP0183974B1
公开(公告)日：1989-01-25
申请号：EP85113640.8
申请日：1985-10-26
Applicant: Meinan Machinery Works, Inc.
CPC classification number: G01N21/8986 , G01N2201/1085
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3.发明公开Time-multiplexed scanning light source for multi-probe, multi-laser fluorescence detection systems 有权多功能多光子荧光分光光度计的Zeitmultiplex-Abtastlichtquelle
公开(公告)号：EP1674852A1
公开(公告)日：2006-06-28
申请号：EP05112479.0
申请日：2005-12-20
Applicant: Palo Alto Research Center Incorporated
Inventor： Curry, Douglas N. , Bruce, Richard H.
CPC classification number: G01N21/6456 , G01N15/1468 , G01N2201/1085
Abstract: An apparatus images a surface. An imager stage (20) linearly translates the surface in a first direction. A light path has a first end defining an input aperture (48) perpendicular to the first direction and parallel to the surface, and a second end defining an output aperture (52). A plurality of radiation beams (62) linearly scan and interact in time-multiplexed alternating turns with the surface below the input aperture to produce a time-multiplexed light signal that is collected by the input aperture and transmitted by the light path to the output aperture. A photodetector (98) arrangement detects the light signal at the output aperture. A processor processes the detected time-multiplexed light.
Abstract translation: 装置对表面进行成像。 成像器台（20）在第一方向上线性平移表面。 光路具有限定垂直于第一方向并平行于表面的输入孔（48）的第一端和限定输出孔（52）的第二端。 多个辐射束（62）以时间复用的交替匝线性扫描并与输入孔径下方的表面相互作用，以产生被输入孔收集并由光路传输到输出孔径的时间复用光信号 。 光电检测器（98）布置检测输出孔径处的光信号。 处理器处理检测到的时间复用光。
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4.发明授权
公开(公告)号：EP0406030B1
公开(公告)日：1995-05-03
申请号：EP90400529.5
申请日：1990-02-26
Applicant: QC OPTICS, INC.
Inventor： Johnson, Carly E. , Ormsby, Jay L. , Chase, Eric T. , Quackenbos, George S. , Broude, Sergey V. , Boudour, Abdu
IPC: G01N21/88
CPC classification number: G01N21/95607 , G01N2021/4714 , G01N2021/95676 , G01N2201/1085
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公开(公告)号：EP0390623A3
公开(公告)日：1992-01-08
申请号：EP90400508.9
申请日：1990-02-23
Applicant: MEASUREX CORPORATION
Inventor： Wennerberg, Gunnar , Gordon, Daniel A. , King, Harriss T.
CPC classification number: G01N21/86 , G01N2021/8645 , G01N2201/0826 , G01N2201/0833 , G01N2201/1085
Abstract: A system for detecting optically-sensitive properties of sheet materials during manufacture includes a first group of bundles of optical fibers that convey light to selected transmitting locations adjacent one face of the sheet material. The system further includes a second group of bundles of optical fibers that collect and convey light transmitted through the sheet material to a light detector. The light detector measures the intensity of light received from each of the bundles of the second group to provide measurements of optically-sensitive properties of the sheet material at selected cross-directional locations.
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Patent Agency Ranking
公开(公告)号：EP0559433B1
公开(公告)日：1996-12-27
申请号：EP93301579.4
申请日：1993-03-02
Applicant: NIPPON SHEET GLASS CO., LTD.
Inventor： Ikafuji, Masaharu 6-3 Nippon Sheet Glass Company , Ichise, Nagayoshi , Odawara, Mitsuo , Abe, Junichi
IPC: G01N21/89
CPC classification number: G01N21/896 , G01N2201/1085
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公开(公告)号：EP0594735A4
公开(公告)日：1994-08-10
申请号：EP92915627
申请日：1992-07-07
Applicant: REYNOLDS METALS CO
Inventor： HARTMAN NILE F , LARSEN JAMES W , VERBER CARL M
CPC classification number: G01N21/8901 , G01N2021/4711 , G01N2021/5961 , G01N2021/8627 , G01N2201/0233 , G01N2201/04 , G01N2201/1085
Abstract: An apparatus (10) for inspecting the surface of an object S moving in the direction of travel (23) relative to the apparatus comprises a modular sensing head assembly (11) including a plurality of sensing head modules (12, 13), each of which includes a number of sensing stations (16 - 21). Each sensing station includes a light source (77, 81, 84) for generating a line of light extending across substantially the width of the surface of the object and a plurality of optical detector means for detecting light scattered from the line of light by the surface of the object. The optical detectors are positioned and oriented to receive scattered light scattered along paths lying in detection planes which are perpendicular to each other and perpendicular to the surface of the object. Signal processing electronics are provided to convert the light received by the detectors into analog signals which are multiplexed, converted to digital signals, filtered and then compared to preselected thresholds to determine the existence of any defects in the surface.
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公开(公告)号：EP0594735A1
公开(公告)日：1994-05-04
申请号：EP92915627.0
申请日：1992-07-07
Applicant: REYNOLDS METALS COMPANY
Inventor： HARTMAN, Nile, F. , LARSEN, James, W. , VERBER, Carl, M.
IPC: G01N21
CPC classification number: G01N21/8901 , G01N2021/4711 , G01N2021/5961 , G01N2021/8627 , G01N2201/0233 , G01N2201/04 , G01N2201/1085
Abstract: Appareil (10) servant à examiner la surface d'un objets se déplaçant dans un sens de parcours (23) par rapport à l'appareil. Ledit appareil (10) est constitué d'un ensemble tête de détection (11) modulaire comprenant une pluralité de modules (12, 13) de tête de détection qui comportent chacun plusieurs unités de détection (16, 21). Chaque unité de détection comprend une source de lumière (77, 81, 84) qui génère un rayon de lumière s'étendant pratiquement sur la largeur de la surface de l'objet, et plusieurs détecteurs optiques qui détectent la lumière du rayon de lumière qui est dispersée par la surface de l'objet. Les détecteurs optiques sont positionnés et orientés de manière à recevoir la lumière dispersée selon des trajectoires situées dans des plans de détection qui sont perpendiculaires entre eux et par rapport à la surface de l'objet. Des systèmes électroniques de traitement des signaux sont prévus pour transformer la lumière reçue par les détecteurs en signaux analogiques qui sont multiplexés, convertis en signaux numériques, filtrés et ensuite comparés à des seuils présélectionnés pour déterminer la présence d'un quelconque défaut dans cette surface.
Abstract translation: 装置（10），用于检查沿相对于装置的行进方向（23）移动的物体的表面。 该设备（10）包括模块化传感头组件（11），该模块化传感头组件包括多个传感头模块（12,13），每个模块具有多个传感单元（16,21）。 每个检测单元包括产生基本上跨物体表面的宽度延伸的光束的光源（77,81,84），以及检测光束的光的多个光学检测器，其中 被物体的表面分散。 光学传感器被定位和定向以接收沿彼此垂直并且到物体表面的检测平面中的路径的散射光。 提供电子信号处理系统以将由检测器接收的光转换为模拟信号，所述模拟信号被多路复用，转换为数字信号，过滤并且然后与预选阈值进行比较以确定该表面中存在任何缺陷。
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9.发明公开
公开(公告)号：EP0406030A2
公开(公告)日：1991-01-02
申请号：EP90400529.5
申请日：1990-02-26
Applicant: QC OPTICS, INC.
Inventor： Johnson, Carly E. , Ormsby, Jay L. , Chase, Eric T. , Quackenbos, George S. , Broude, Sergey V. , Boudour, Abdu
IPC: G01N21/88
CPC classification number: G01N21/95607 , G01N2021/4714 , G01N2021/95676 , G01N2201/1085
Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.
Abstract translation: 为具有衍射表面检测的缺陷的光学检查系统和方法：诸如掩模版或晶片，包括：照明表面，以进行检查，以产生响应的第一散射能量角分布到一个缺陷的表面上以及第二散射能量的角分布 响应于在无缺陷表面上; 所述第一和第二能量分布进行感测和最小能量检测能量水平被建立; 确定性采矿无论最小检测的能量电平是在第一或第二预定能量范围和表示没有无缺陷是存在当最小检测的能量电平是在第一范围和一个缺陷是存在当最小检测的能量电平是在所述第二范围 ，
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10.发明授权Time-multiplexed scanning light source for multi-probe, multi-laser fluorescence detection systems 有权时间多路复用扫描光源，用于多探头，多激光荧光检测系统
公开(公告)号：EP1674852B1
公开(公告)日：2017-10-11
申请号：EP05112479.0
申请日：2005-12-20
Applicant: SRI International
Inventor： Curry, Douglas N. , Bruce, Richard H.
CPC classification number: G01N21/6456 , G01N15/1468 , G01N2201/1085
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