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公开(公告)号：EP2605022B1
公开(公告)日：2015-02-25
申请号：EP11816403.7
申请日：2011-08-08
IPC分类号： G01P21/00 , G01P15/125 , G01P15/08 , G01C19/5747
CPC分类号： G01P15/125 , G01C19/5747 , G01P15/0802 , G01P21/00 , G01P2015/0814
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公开(公告)号：EP3193176A4
公开(公告)日：2018-05-16
申请号：EP15840211
申请日：2015-06-29
CPC分类号： B81B7/0064 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2201/045 , B81B2203/0136 , B81C99/0045 , G01C19/574 , G01P15/08 , G01P15/125 , G01P21/00 , H01L29/84
摘要： For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.
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公开(公告)号：EP3136051A4
公开(公告)日：2017-12-27
申请号：EP15782583
申请日：2015-04-08
IPC分类号： G01C19/5726 , H01L29/84
CPC分类号： G01C19/5726 , H01L29/84
摘要： The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.
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公开(公告)号：EP3139178A4
公开(公告)日：2018-02-14
申请号：EP15786381
申请日：2015-04-08
发明人： JEONG HEEWON , HAYASHI MASAHIDE , YAMANAKA KIYOKO , MAEDA DAISUKE
IPC分类号： G01P15/08 , B81B3/00 , G01P15/125 , H01L29/84
CPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , H01L29/84
摘要： Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.
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公开(公告)号：EP2605022A4
公开(公告)日：2013-12-25
申请号：EP11816403
申请日：2011-08-08
IPC分类号： G01P21/00 , G01C19/5747 , G01P15/08 , G01P15/125
CPC分类号： G01P15/125 , G01C19/5747 , G01P15/0802 , G01P21/00 , G01P2015/0814
摘要： In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).
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公开(公告)号：EP2605022A1
公开(公告)日：2013-06-19
申请号：EP11816403.7
申请日：2011-08-08
IPC分类号： G01P21/00 , G01P15/125
CPC分类号： G01P15/125 , G01C19/5747 , G01P15/0802 , G01P21/00 , G01P2015/0814
摘要： In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).
摘要翻译： 为了提供一种惯性传感器，即使在恶劣环境下也能够抑制错误诊断，从而发生突然的噪声，惯性传感器设置有可移动部件（105），用于检测数量的第一检测单元（C1，C2） ，用于通过施加诊断信号强制振动所述活动部件（105）的强制振动装置（503，C3，C4），用于计算所述活动部件（105）的物理量的物理量计算单元（502） 来自第一检测单元（C1，C2）的检测信号以及用于使用经由第一检测单元（C1，C2）获得的诊断信号来判断物理量是否存在异常的异常判定单元（504） 并且在车辆内使用，所述惯性传感器还包括安装在同一车辆中并连接到所述异常判定单元（504）的第二传感器（510）。
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公开(公告)号：EP2966404A4
公开(公告)日：2017-03-01
申请号：EP13877142
申请日：2013-12-20
IPC分类号： G01C19/5783 , H01L29/84
CPC分类号： G01D11/245 , G01C19/5783
摘要： To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.
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公开(公告)号：EP2592382A4
公开(公告)日：2016-04-06
申请号：EP11803398
申请日：2011-05-25
发明人： JEONG HEEWON , DEGAWA MUNENORI , HAYASHI MASAHIDE
IPC分类号： G01C19/574
CPC分类号： G01P9/04 , G01C19/5719 , G01C19/574 , G01C19/5747
摘要： This invention is directed to provision of a high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two dead weights (2, 3); means (C1, C2, C3, C4, +vd, -vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).
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公开(公告)号：EP3147674A4
公开(公告)日：2018-01-17
申请号：EP15796172
申请日：2015-04-08
发明人： MAEDA DAISUKE , JEONG HEEWON , HAYASHI MASAHIDE
IPC分类号： G01P15/10 , G01C19/5726 , G01C19/5755 , G01C19/5769 , G01P15/097 , G01P15/125 , G01P15/18
CPC分类号： G01C19/5726 , G01C19/5755 , G01C19/5769 , G01C19/5776 , G01P15/097 , G01P15/125 , G01P15/18
摘要： Provided is a technique forming a highly stable inertial sensor with a simple configuration by vacuum sealing a resonator which detects acceleration and exploiting a resonance vibration using a high Q value of a MEMS device. The inertial sensor includes: a detecting proof mass and beam 105 which detects acceleration; a driving electrode 106 which excites the detecting proof mass and beam 105; a resonant frequency tuning electrode 108 which changes the resonant frequency of the detecting proof mass and beam 105; and a detecting circuit which applies voltage (frequency controlling part 433, DAC part 436) to the resonant frequency tuning electrode 108 for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam 105 when the acceleration is applied to the detecting proof mass and beam 105 during the vibration of the detecting proof mass and beam 105 by the voltage applied to the detecting proof mass and beam 105, and outputs the acceleration (CV converting part 430, ADC part 431, demodulation part 432, frequency controlling part 433, signal adjusting part 435) based on a value of the voltage applied to resonant frequency tuning electrode 108.
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公开(公告)号：EP3128333A4
公开(公告)日：2017-12-27
申请号：EP15772477
申请日：2015-03-25
发明人： HAYASHI MASAHIDE , JEONG HEEWON
IPC分类号： G01P15/125 , G01P15/08 , H01L29/84
CPC分类号： G01P15/125 , G01P2015/0834
摘要： Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.
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