公开(公告)号：EP4418302A1

公开(公告)日：2024-08-21

申请号：EP23156956.7

申请日：2023-02-16

申请人： ASML Netherlands B.V.

发明人： RODRIGUES MANSANO, Andre, Luis ,  WIELAND, Marco, Jan-Jaco ,  DEL TIN, Laura ,  SLOT, Erwin ,  MA, Yue ,  VAN DEN BROM, Alrik

IPC分类号： H01J37/04 ,  H01J37/24 ,  H01J37/244

CPC分类号： H01J37/04 ,  H01J37/244 ,  H01J2237/281720130101 ,  H01J2237/00220130101 ,  H01J37/24 ,  H01J2237/248720130101 ,  H01J2209/1820130101

摘要： A charged particle-optical element is disclosed. The element is for a charged particle-optical module configured to direct charged particles along at least one beam path towards a sample. In one arrangement, the element comprises a chip comprising an integrated circuit 64 formed in a semiconductor substrate 61. The substrate defines at least one aperture 63 for passage therethrough of the at least one beam path. A size of the substrate exceeds a die-size of a lithographic imaging system used during manufacturing of the integrated circuit.