公开(公告)号：EP4418302A1

公开(公告)日：2024-08-21

申请号：EP23156956.7

申请日：2023-02-16

申请人： ASML Netherlands B.V.

发明人： RODRIGUES MANSANO, Andre, Luis ,  WIELAND, Marco, Jan-Jaco ,  DEL TIN, Laura ,  SLOT, Erwin ,  MA, Yue ,  VAN DEN BROM, Alrik

IPC分类号： H01J37/04 ,  H01J37/24 ,  H01J37/244

CPC分类号： H01J37/04 ,  H01J37/244 ,  H01J2237/281720130101 ,  H01J2237/00220130101 ,  H01J37/24 ,  H01J2237/248720130101 ,  H01J2209/1820130101

摘要： A charged particle-optical element is disclosed. The element is for a charged particle-optical module configured to direct charged particles along at least one beam path towards a sample. In one arrangement, the element comprises a chip comprising an integrated circuit 64 formed in a semiconductor substrate 61. The substrate defines at least one aperture 63 for passage therethrough of the at least one beam path. A size of the substrate exceeds a die-size of a lithographic imaging system used during manufacturing of the integrated circuit.

公开(公告)号：EP4354484A1

公开(公告)日：2024-04-17

申请号：EP23202626.0

申请日：2023-10-10

申请人： FEI COMPANY

发明人： van Rooij, Corné ,  Bischoff, Maarten ,  McCormack, Jamie ,  Smit, Casper ,  Veerhoek, Marcel

IPC分类号： H01J37/10 ,  H01J37/141 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/2820130101 ,  H01J2237/00220130101 ,  H01J37/10 ,  H01J37/141

摘要： The present invention relates to a method for reducing the power consumption of a charged particle system, the charged particle system comprising at least one charged particle optics element and a cooling assembly configured for cooling the at least one charged particle optics element, the method comprising the steps of running the charged particle system in a standby mode, wherein the total power consumption of the charged particle system is reduced compared to running the charged particle system in an operating mode. Furthermore, the present invention relates to a respective charged particle system.