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公开(公告)号：EP1246226A2
公开(公告)日：2002-10-02
申请号：EP01204470.7
申请日：2001-11-22
IPC分类号： H01J49/30
CPC分类号： H01J49/328
摘要： A filter and a method for separating ions in a partially ionized plasma according to their mass includes a chamber with crossed electric and magnetic fields established therein. A feed, including metal atoms having ionization potentials in a low range, and gas atoms having an ionization potential in a high range, is introduced into the chamber. An electron temperature below the low range is generated to partially ionize the feed by dissociating the metal atoms from the gas atoms, and by ionizing the metal atoms into light and heavy ions according to their mass to charge ratio. The light and heavy ions are then influenced by the crossed electric and magnetic fields to separate the light ions from the heavy ions.
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公开(公告)号：EP1115143A3
公开(公告)日：2002-07-24
申请号：EP00308071.0
申请日：2000-09-15
CPC分类号： B03C1/023 , B03C1/288 , H01J49/328
摘要： A plasma mass filter using a helical magnetic field for separating low-mass particles from high-mass particles in a multi-species plasma includes a cylindrical outer wall located at a distance "a" from a longitudinal axis. Also included is a coaxial cylindrical inner wall positioned to establish a plasma chamber between the inner and outer walls. The magnetic field is generated in this chamber with an axial component (B z ) and an azimuthal component (B θ ), which interact together with an electric field to create crossed magnetic and electric fields. The electric field has a positive potential, V ctr , on the inner wall and a zero potential on the outer wall. With these crossed magnetic and electric fields, a multi-species plasma is moved through the chamber with a velocity, v z , high-mass particles in the plasma (M 2 ) are ejected into the outer wall and low-mass particles (M 1 ) are confined in the chamber during transit of the chamber to separate the low-mass particles from the high-mass particles, where M 1 c 2 , and where M c = (ea 2 (B z 2 + B θ 2 )/8v) {f(B θ /B)}.
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公开(公告)号：EP1115142A2
公开(公告)日：2001-07-11
申请号：EP00306012.6
申请日：2000-07-14
发明人： Ohkawa, Tihiro
IPC分类号： H01J49/30
摘要： A method for separating charged particles according to their mass requires providing a multi-species plasma in a chamber. The plasma includes both relatively low-mass charged particles (M 1 ) and relatively high-mass charged particles (M 2 ) which are influenced by crossed electric and magnetic fields (E x B) in the chamber. Specifically, the crossed fields (E x B) rotate the particles M 1 and M 2 in respective orbits that are characteristic of the mass of the particular particle. Inside the chamber, each charged particle has a respective cyclotron frequency (Ω), and the plasma is maintained with a density wherein the collisional frequency (ν) of particles in the chamber relates to the cyclotron frequency such that their ratio is greater than approximately one (Ω/ν ≥ 1). Additionally, a collector is positioned to intercept the particles (M 2 ) in their orbits and to thereby separate the particles (M 2 ) from the particles (M 1 ).
摘要翻译： 根据其质量分离带电粒子的方法需要在室中提供多种类的等离子体。 等离子体包括受室内交叉电场和磁场（E×B）影响的相对低质量的带电粒子（M1）和相对高质量的带电粒子（M2）。 具体地说，交叉场（E×B）使颗粒M1和M2在特定颗粒质量的特征的相应轨道中旋转。 在室内，每个带电粒子具有相应的回旋加速器频率（OMEGA），等离子体保持密度，其中腔室中的颗粒的碰撞频率（nu）与回旋加速器频率相关，使得它们的比值大于大约1 （OMEGA /nu≥1）。 此外，收集器被定位成在它们的轨道中拦截颗粒（M2），从而将颗粒（M2）与颗粒（M1）分离。
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公开(公告)号：EP1001450A3
公开(公告)日：2001-03-14
申请号：EP99308652.9
申请日：1999-11-01
发明人： Ohkawa, Tihiro
CPC分类号： H01J49/328 , B03C1/023 , B03C1/288
摘要： A plasma mass filter for separating low-mass particles from high-mass particles in a multi-species plasma includes a cylindrical shaped wall which surrounds a hollow chamber. A magnet is mounted on the wall to generate a magnetic field that is aligned substantially parallel to the longitudinal axis of the chamber. Also, an electric field is generated which is substantially perpendicular to the magnetic field and which, together with the magnetic field, creates crossed magnetic and electric fields in the chamber. Importantly, the electric field has a positive potential on the axis relative to the wall which is usually zero potential. When a multi-species plasma is injected into the chamber, the plasma interacts with the crossed magnetic and electric fields to eject high-mass particles into the wall surrounding the chamber. On the other hand, low-mass particles are confined in the chamber during their transit therethrough to separate the low-mass particles from the high-mass particles. The demarcation between high-mass particles and low-mass particles is a cut-off mass M c which is established by setting the magnitude of the magnetic field strength, B z , the positive voltage along the longitudinal axis, V ctr , and the radius of the cylindrical chamber, "a". M c can then be determined with the expression: M c = ea 2 (B z ) 2 / 8V ctr .
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公开(公告)号：EP1351273B1
公开(公告)日：2010-05-26
申请号：EP03075734.8
申请日：2003-03-12
发明人： Tihiro, Ohkawa
IPC分类号： H01J49/28
CPC分类号： H01J49/421 , H01J49/328
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公开(公告)号：EP1638671A4
公开(公告)日：2008-01-23
申请号：EP04753856
申请日：2004-06-02
发明人： VOSS GUENTER F
CPC分类号： H01J49/328 , B01D59/48
摘要： In one embodiment, a miniaturized structure and associated method function as a mass spectrometer or analyzer and may, with modification, function as an ion generator. The miniaturized structure has a pair of generally planar parallel spaced electrodes which have projecting walls cooperating to define an ion generating chamber and an exit aperture. By controlling the electric field which is oriented perpendicular to an applied magnetic field, the ion beam may be separated into a plurality beams based upon mass to charge ratio emerging from the exit of the apparatus and when the apparatus is functioning as a mass spectrometer or analyzer impinges on an ion collector which responsively transmits information to a cooperating processor. Where it is desired to have it function as an ionizer the ion collector disposed adjacent the ion exit is eliminated.
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公开(公告)号：EP1225617A3
公开(公告)日：2003-10-15
申请号：EP01202237.2
申请日：2001-06-11
发明人： Ohkawa, Tihiro
CPC分类号： H01J49/328 , H01J49/38
摘要： A stochastic cyclotron ion filter for separating ions in a multi-species plasma according to mass uses an electrical field (E) crossed with a magnetic field (B). In particular, the electric field is stochastically generated by an amplified noise source with a band pass filter that passes only frequencies in an interval between ω 1 and ω 2 . The filter also includes a cylindrical chamber for receiving the multi-species plasma, and coils are used to generate the magnetic field inside the chamber. In operation, the stochastically generated electric field resonates with particles in the plasma that have a cyclotron frequency Ω in the frequency interval (ω 1 2 ). In one embodiment, an electrode is mounted at one end of the chamber, and the electrode is connected with the amplifier to establish the electrical field in the chamber. In another embodiment, an electromagnetic coil is mounted on the chamber and is connected with the amplifier to induce the electrical field in the chamber. For both embodiments, particles having resonant cyclotron frequencies Ω in the frequency interval (ω 1 2 ) are accelerated into larger orbital paths than other particles in the plasma and, thereby, are separated for collection.
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公开(公告)号：EP1351273A1
公开(公告)日：2003-10-08
申请号：EP03075734.8
申请日：2003-03-12
发明人： Tihiro, Ohkawa
IPC分类号： H01J49/28
CPC分类号： H01J49/421 , H01J49/328
摘要： A device and method for selectively establishing predetermined orbits, relative to an axis, for ions of a first mass/charge ratio (m 1 ), requires crossing an electric field with a substantially uniform magnetic field (E x B). The magnetic field is oriented along the axis and the electric field has both a d.c. voltage component (∇Φ 0 ) and an a.c. voltage component (∇Φ 1 ). In operation, voltage Φ 0 is fixed to place the ions m 1 on confined orbits around the axis when Φ 1 is zero. On the other hand, when Φ 1 is tuned to a predetermined value, the ions m 1 are ejected away from the axis. With E x B established in a chamber, the ions m 1 will pass through the chamber when on confined orbits (Φ 1 = 0), and they will be ejected into the wall of the chamber when on unconfined orbits (Φ 1 = predetermined value).
摘要翻译： 用于选择性地建立用于第一质量/电荷比（m1）的离子的相对于轴的预定轨道的装置和方法需要以基本上均匀的磁场（E x B）交叉电场。 磁场沿轴线定向，电场同时具有直流电压。 电压分量（NABLA PHI 0）和a.c. 电压分量（NABLA PHI 1）。 在操作中，当PHI 1为零时，电压PHI 0被固定以将离子m1放置在围绕轴的限制轨道上。 另一方面，当PHI 1被调谐到预定值时，离子m1从轴上被排出。 当在室内建立E x B时，当在限制轨道（PHI 1 = 0）时，离子m1将通过腔室，并且当在非限制轨道上（PHI 1 =预定值）时，它们将被喷射到腔室的壁中， 。
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公开(公告)号：EP1001450A2
公开(公告)日：2000-05-17
申请号：EP99308652.9
申请日：1999-11-01
发明人： Ohkawa, Tihiro
IPC分类号： H01J49/42
CPC分类号： H01J49/328 , B03C1/023 , B03C1/288
摘要： A plasma mass filter for separating low-mass particles from high-mass particles in a multi-species plasma includes a cylindrical shaped wall which surrounds a hollow chamber. A magnet is mounted on the wall to generate a magnetic field that is aligned substantially parallel to the longitudinal axis of the chamber. Also, an electric field is generated which is substantially perpendicular to the magnetic field and which, together with the magnetic field, creates crossed magnetic and electric fields in the chamber. Importantly, the electric field has a positive potential on the axis relative to the wall which is usually zero potential. When a multi-species plasma is injected into the chamber, the plasma interacts with the crossed magnetic and electric fields to eject high-mass particles into the wall surrounding the chamber. On the other hand, low-mass particles are confined in the chamber during their transit therethrough to separate the low-mass particles from the high-mass particles. The demarcation between high-mass particles and low-mass particles is a cut-off mass M c which is established by setting the magnitude of the magnetic field strength, B z , the positive voltage along the longitudinal axis, V ctr , and the radius of the cylindrical chamber, "a". M c can then be determined with the expression: M c = ea 2 (B z ) 2 / 8V ctr .
摘要翻译： 用于在多品种等离子体中分离低质量颗粒与高质量颗粒的等离子体质量过滤器包括围绕中空室的圆柱形壁。 将磁体安装在壁上以产生基本上平行于室的纵向轴线排列的磁场。 此外，产生基本上垂直于磁场的电场，并且与磁场一起在腔室中产生交叉的磁场和电场。 重要的是，电场相对于通常为零电位的壁的轴线具有正电位。 当将多物质等离子体注入腔室时，等离子体与交叉磁场和电场相互作用，将高质量粒子喷射到腔室周围的壁中。 另一方面，低质量颗粒在其通过过程中被限制在室中以将低质量颗粒与高质量颗粒分离。 高质量粒子和低质量粒子之间的分界是通过设定磁场强度Bz，沿着纵轴的正电压Vctr和圆柱体的半径来建立的截止质量Mc 室，“a”。 Mc可以用下式表示：Mc = ea <2）
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公开(公告)号：EP1479093A4
公开(公告)日：2007-10-24
申请号：EP03743172
申请日：2003-02-20
发明人： VOSS GUENTER F
CPC分类号： H01J49/328
摘要： A circular cycloidal mass spectrometer, Fig. 5, has an outer electrode (74) of generally circular configuration and an inner electrode (70) having generally circular outer periphery with an annulus (76) for the flow of ions (90) defined therebetween. The electrodes (70, 74) are structured to create an electric field therebetween. A magnetic field generator is structured to create a magnetic field oriented generally perpendicular to said electric field. An ion beam source (80) for injecting ions (82) into the annulus (76) for travel therearound is provided, and an ion exit (100) for discharge of the ions traveling in said annulus is provided with an ion collector (102) being disposed adjacent to the ion exit (100). The circular cycloidal mass spectrometer may be structured to provide, under the influence of the electric field and magnetic field, a path of travel (90, 92, 94, 96) for the ion beams, which is similar to either epicycloidal or hypocycloidal curves. If desired, elliptical shapes or other suitable shapes providing a nonlinear path of ion travel may be employed. A filter may be interposed between said outer electrode and said inner electrode.
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