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    VISCOSITY MAINTENANCE
    4.
    发明公开
    VISCOSITY MAINTENANCE 失效
    VISKOSITÄTSERHALTUNG

    公开(公告)号：EP0824682A4

    公开(公告)日：1999-10-20

    申请号：EP97916739

    申请日：1997-03-07

    申请人： MARKEM CORP

    发明人： BROWN ROBERT G ,  JOHANNESSEN ARNE

    IPC分类号： B41F31/02 ,  B41J2/195 ,  B41J29/38 ,  G01N11/14 ,  G05D11/13 ,  G05D24/02 ,  G01N11/00 ,  G05D11/00

    CPC分类号： G05D11/136 ,  B41J2/195 ,  B41J29/38 ,  G01N11/14 ,  Y10T137/2506

    摘要： A device (18) for measuring relative viscosity includes an apparatus (29) that can be movably mounted within a fluid reservoir (12) and a sensing system. The apparatus has two members (32, 34), with one member being more bendable than the other. When the apparatus is moving, the sensing system detects a differential bend between the members; the differential bend is related to the viscosity of a fluid when the fluid is included in the fluid reservoir in which the apparatus is movably mounted. The sensing system includes two spaced sensors (40, 42) which detect when magnets (36, 38) on the members pass the sensors. A timer provides a time lapsed between passage of one member past a sensor and passage of the other member past the other sensor. The time lapse is related to the viscosity of the fluid in the fluid reservoir. A controller controls the addition of a solvent to the fluid.

    摘要翻译： 用于测量相对粘度的装置包括流体储存器，搅拌器和感测系统。 搅拌器具有两个构件，一个构件比另一个构件更弯曲。 当搅拌器移动时，感测系统检测构件之间的差动弯曲; 差分弯曲与流体储存器中的流体的粘度有关。 感测系统包括两个间隔开的传感器，用于检测构件上的磁体何时通过传感器。 定时器提供了经过传感器的部件之一通过并且另一个部件通过另一个传感器之后经过的时间。 经过的时间与流体储存器中的流体的粘度有关。 控制器自动控制向流体储存器内的流体添加溶剂; 溶剂的添加取决于经过的时间。

    A FLUID TREATMENT SYSTEM
    6.
    发明公开
    A FLUID TREATMENT SYSTEM 失效
    液体处理系统

    公开(公告)号：EP0785910A1

    公开(公告)日：1997-07-30

    申请号：EP95933560.0

    申请日：1995-10-13

    申请人： LASERTRIM LIMITED

    发明人： CHURCH, Garry

    IPC分类号： G01N27 ,  B01D21 ,  C02F1 ,  G01N33

    CPC分类号： C02F1/5209 ,  G01N33/18 ,  G01N33/34 ,  Y10T137/0335 ,  Y10T137/034 ,  Y10T137/2501 ,  Y10T137/2506 ,  Y10T137/2509

    摘要： It is known to use a streaming current detector (SCD) in a system for monitoring the charge condition of a sample fluid and for controlling the addition of a flocculating/coagulating agent to the fluid. It is further known to arrange the SCD to monitor a sample taken from the fluid supply, and to connect the SCD in a feedback loop to directly control the dosing of the flocculating agent into the fluid supply. Difficulties arise in complex systems, and improper control over flocculant dosing results from the effect of dosing adjustment being overshadowed by other charge-varying influences. The invention proposes a solution in which a secondary feedback loop involving dosing of a chemical (which may be the same as that added to the main supply) into the sample supply is provided aroung the SCD itself. In this way, the corrective effect of the secondary dosing is not overwhelmed by the other influences.

    METHOD AND APPARATUS FOR RECOVERING AND REUSING RESIST COMPOSITION
    7.
    发明授权
    METHOD AND APPARATUS FOR RECOVERING AND REUSING RESIST COMPOSITION 失效
    装置和方法进行回收和光刻胶组合物再利用。

    公开(公告)号：EP0296249B1

    公开(公告)日：1994-08-31

    申请号：EP88900587.2

    申请日：1987-12-25

    申请人： KANTO KAGAKU KABUSHIKI KAISHA

    发明人： YAMASHITA, Asaaki ,  MORI, Kiyoto ,  SAITO, Tsugio ,  SHIMAUCHI, Shiro

    IPC分类号： G03F7/00 ,  G03F7/16 ,  G03C1/74 ,  H01L21/30

    CPC分类号： G03F7/162 ,  Y10T137/2506

    摘要： When a resist composition is applied onto a silicon wafer, the resist composition scattering from a spinner is collected into a preparatory recovery tank (2) and is then sent into a recovery tank (3) having a thermostating means (6) and a viscosity measurement means (4). When the viscosity of the resist composition in the recovery tank is found high on measurement, a necessary amount of a solvent is supplied automatically from solvent supply means (5, 5') to adjust the viscosity to a specified one, and the resist composition is stored in a storage tank (7) and is sent to a coating chamber (1) when necessary. In this manner, the scattering resist can be reused.