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    Inertial sensor
    85.
    发明专利
    Inertial sensor 有权
    惯性传感器

    公开(公告)号：JP2014095716A

    公开(公告)日：2014-05-22

    申请号：JP2013260914

    申请日：2013-12-18

    Applicant: Hitachi Automotive Systems Ltd ,  日立オートモティブシステムズ株式会社

    Inventor： TEI KIGEN ,  DEGAWA MUNENORI ,  HAYASHI MASAHIDE

    IPC: G01C19/5747 ,  B81B3/00 ,  G01C19/5726 ,  H01L29/84

    CPC classification number: G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

    Abstract: PROBLEM TO BE SOLVED: To provide a high performance inertial sensor capable of keeping SNR even in an environment having vibration disturbance.SOLUTION: The oscillatory type inertial sensor includes: two weights (excitation elements) 2 and 3; means (C1, C2, C3, C4, +Vd, and -Vd) for displacing them to the opposite phase; two sets of electrodes (C5, C6, C7, and C8) for detecting their displacements as capacitance variation; and a CV converting section 53 for converting the capacitance variation of the electrodes into an electric signal. One set of electrodes (for example, C5 and C8) whose electrostatic capacitances increase when the two weights 2 and 3 are displaced to the opposite phase are electrically interconnected, and one set of electrodes (for example, C6 and C7) whose electrostatic capacitances decrease in the same case are electrically interconnected, and each set is connected to the CV converting section 53.

    Abstract translation: 要解决的问题：提供即使在具有振动干扰的环境中也能保持SNR的高性能惯性传感器。解决方案：振荡型惯性传感器包括：两个重量（激励元件）2和3; 意味着将它们移位到相反相位（C1，C2，C3，C4，+ Vd和-Vd） 用于检测其位移作为电容变化的两组电极（C5，C6，C7和C8） 以及用于将电极的电容变化转换为电信号的CV转换部53。 当两个重物2和3位移到相反相位时，其静电电容增加的一组电极（例如C5和C8）电互连，并且一组静电电容降低的电极（例如C6和C7） 在相同的情况下电互连，并且每个组连接到CV转换部分53。

    Inertial force sensor
    87.
    发明专利
    Inertial force sensor 审中-公开
    惯性力传感器

    公开(公告)号：JP2013171009A

    公开(公告)日：2013-09-02

    申请号：JP2012036926

    申请日：2012-02-23

    Applicant: Hitachi Automotive Systems Ltd ,  日立オートモティブシステムズ株式会社

    Inventor： SUZUKI KENGO ,  AONO TAKANORI ,  KANAMARU MASATOSHI ,  HAYASHI MASAHIDE

    IPC: G01P15/08 ,  G01C19/5783 ,  G01P15/125 ,  H01L29/84

    CPC classification number: G01C19/5783 ,  G01C19/574 ,  G01P15/097 ,  G01P15/125 ,  H01L29/84

    Abstract: PROBLEM TO BE SOLVED: To provide an inertial force sensor with high sensitivity.SOLUTION: The inertial force sensor includes: a first substrate including a first electrode for inertial force detection and a first fixation section for extracting a signal detected at the first electrode to an external electrode; a second substrate including an oscillator formed at a fixed distance from the first electrode, a second fixation section fixed to the first substrate, in which the oscillator is installed by a beam, and a third fixation section for transmitting the signal detected at the first electrode to the external electrode. The first substrate and the second substrate are fixed with each other by bonding, and are configured to be conducted via the bonding surface.

    Abstract translation: 要解决的问题：提供具有高灵敏度的惯性力传感器。解决方案：惯性力传感器包括：第一基板，包括用于惯性力检测的第一电极和第一固定部分，用于将在第一电极处检测到的信号提取到 外部电极; 第二基板，包括以与第一电极固定的距离形成的振荡器，固定到第一基板的第二固定部分，其中振荡器由梁安装;第三固定部分，用于传输在第一电极处检测到的信号 到外部电极。 第一基板和第二基板通过接合而彼此固定，并且被配置为经由接合表面传导。

    角速度センサ
    88.
    发明专利
    角速度センサ 审中-公开

    公开(公告)号：JPWO2011030541A1

    公开(公告)日：2013-02-04

    申请号：JP2011530748

    申请日：2010-09-08

    Applicant: パナソニック株式会社

    Inventor： 佐々木　剛 ,  剛 佐々木

    IPC: G01C19/5776 ,  G01C19/574 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187

    CPC classification number: G01C19/574

    Abstract: 角速度センサは、駆動信号により振動する振動子と、振動子上に振動子の角速度に基づき生成される第1センス成分及び駆動信号に基づき生成される第1モニタ成分を含む第1信号を出力する第1検出電極とを備える。更に角速度センサは、振動子上に第1センス成分と略同位相の第2センス成分及び第1モニタ成分と略逆位相の第2モニタ成分を含む第2信号を出力する第2検出電極と、一端が第1検出電極と接続された第1信号配線と、一端が第2検出電極と接続された第2信号配線とを備える。更に角速度センサは、第1信号配線の他端及び第2信号配線の他端と接続された第1検出端子と、第1検出端子からの信号に基づき、第1信号配線又は第2信号配線の断線を示す断線検出信号を出力する断線検出回路とを備える。

    x, MEMS gyroscope for detecting rotational movement about the y and / or z-axis
    89.
    发明专利
    x, MEMS gyroscope for detecting rotational movement about the y and / or z-axis 有权

    公开(公告)号：JP2012519269A

    公开(公告)日：2012-08-23

    申请号：JP2011551455

    申请日：2010-02-11

    Applicant: センサーダイナミックス ゲーエムベーハー

    Inventor： アレッサンドロ ロッキ，

    IPC: G01C19/5755 ,  G01C19/56 ,  G01C19/574

    CPC classification number: G01C19/574

    Abstract: The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).

    Composite sensor
    90.
    发明专利
    Composite sensor 有权
    复合传感器

    公开(公告)号：JP2012122745A

    公开(公告)日：2012-06-28

    申请号：JP2010271387

    申请日：2010-12-06

    Applicant: Hitachi Automotive Systems Ltd ,  日立オートモティブシステムズ株式会社

    Inventor： TEI KIGEN ,  HAYASHI MASAHIDE ,  YAMANAKA KIYOKO

    IPC: G01P15/125 ,  G01C19/56 ,  G01C19/5726 ,  G01C19/574 ,  G01C19/5755 ,  G01P15/18

    CPC classification number: B81B3/0018 ,  G01C19/574 ,  G01P15/125 ,  G01P15/18

    Abstract: PROBLEM TO BE SOLVED: To provide a composite sensor capable of detecting a plurality of physical quantities which can realize downsizing and cost reduction while maintaining its performance by increasing elements which can be shared between each sensor.SOLUTION: A spindle M2 and a detection electrode DTE2 used for an angular velocity detection section are also used as a reference capacitive element of a Z-direction acceleration detection section for detecting acceleration in a Z direction. That is, the Z-direction acceleration detection section uses a detection capacitative element which comprises the spindle M2 and the detection electrode DTE2 consisting the angular velocity detection section as the reference capacitative element to a detection capacitative element which comprises a detection electrode DTE5 and a spindle M4.

    Abstract translation: 要解决的问题：提供能够检测多个物理量的复合传感器，其可以通过增加可以在每个传感器之间共享的元件来保持其性能，从而实现小型化和降低成本。 解决方案：用于角速度检测部的主轴M2和检测电极DTE2也用作用于检测Z方向上的加速度的Z方向加速度检测部的参考电容元件。 也就是说，Z方向加速度检测部使用包括主轴M2和检测电极DTE2的检测电容元件，检测电极DTE2包括角速度检测部分作为检测电容元件，该检测电容元件包括检测电极DTE5和主轴 M4。 版权所有（C）2012，JPO＆INPIT

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