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公开(公告)号:JP4795633B2
公开(公告)日:2011-10-19
申请号:JP2003351028
申请日:2003-10-09
Applicant: エージェンシー フォー サイエンス,テクノロジー アンド リサーチ
Inventor: ホック フランシス タイ エン , ヤオ クイ , ジャン ヘ シュ , シュ ユアン
IPC: C04B35/49 , C04B35/491 , B28B1/30 , C23C18/12 , H01L41/08 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/314 , H01L41/39 , H01L41/43
CPC classification number: C23C18/1208 , C04B35/491 , C04B35/62805 , C04B35/62886 , C04B35/6303 , C04B2235/3201 , C04B2235/3203 , C04B2235/3249 , C04B2235/3296 , C04B2235/3298 , C04B2235/449 , C04B2235/5445 , C04B2235/80 , H01L41/1876 , H01L41/314 , H01L41/43 , Y10T29/42
Abstract: A method of producing a piezoelectric ceramic thick film on a substrate, said method comprising: providing a piezoelectric ceramic material in powder form; forming a liquid mixture by mixing the powdered material with a liquid phase precursor of a metal oxide of low-melting point, said precursor being adapted to decompose, upon subsequent annealing, into the metal oxide; drying the liquid mixture to form a precipitate; milling the precipitate to form a powdered precipitate; adding an organic carrier to the powdered precipitate; further milling the precipitate to form a paste; depositing a layer of the paste, as a wet film, onto the substrate; and annealing the layered substrate at a temperature and for a time sufficient to cause transformation of the paste into the thick film.