公开(公告)号：JP4795633B2

公开(公告)日：2011-10-19

申请号：JP2003351028

申请日：2003-10-09

Applicant: エージェンシー フォー サイエンス,テクノロジー アンド リサーチ

Inventor： ホック フランシス タイ エン ,  ヤオ クイ ,  ジャン ヘ シュ ,  シュ ユアン

IPC: C04B35/49 ,  C04B35/491 ,  B28B1/30 ,  C23C18/12 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/29 ,  H01L41/314 ,  H01L41/39 ,  H01L41/43

CPC classification number: C23C18/1208 ,  C04B35/491 ,  C04B35/62805 ,  C04B35/62886 ,  C04B35/6303 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3249 ,  C04B2235/3296 ,  C04B2235/3298 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/80 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/43 ,  Y10T29/42

Abstract: A method of producing a piezoelectric ceramic thick film on a substrate, said method comprising: providing a piezoelectric ceramic material in powder form; forming a liquid mixture by mixing the powdered material with a liquid phase precursor of a metal oxide of low-melting point, said precursor being adapted to decompose, upon subsequent annealing, into the metal oxide; drying the liquid mixture to form a precipitate; milling the precipitate to form a powdered precipitate; adding an organic carrier to the powdered precipitate; further milling the precipitate to form a paste; depositing a layer of the paste, as a wet film, onto the substrate; and annealing the layered substrate at a temperature and for a time sufficient to cause transformation of the paste into the thick film.