Gyro element, gyro sensors, and electronic equipment

    公开(公告)号:JP5560806B2

    公开(公告)日:2014-07-30

    申请号:JP2010063901

    申请日:2010-03-19

    发明人: 竜太 西澤

    CPC分类号: G01C19/5642

    摘要: A vibration gyro element includes: a base section; a detection arm extending from the base section in a first direction; a joint section disposed at an end portion of the base section; a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view; a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm; a first set of drive electrodes provided to the first drive arm; a second set of drive electrodes provided to the second drive arm; and a set of detection electrodes provided to the detection arm, wherein the first drive arm vibrates in a third direction perpendicular to the first direction and the second direction, the second drive arm vibrates in a same direction as the first drive arm.

    Physical quantity sensor and physical quantity measurement device

    公开(公告)号:JP5321812B2

    公开(公告)日:2013-10-23

    申请号:JP2009050089

    申请日:2009-03-04

    IPC分类号: G01P15/10

    摘要: PROBLEM TO BE SOLVED: To provide a physical quantity sensor which has high measurement sensitivity and in which an electrode is easily formed. SOLUTION: The physical quantity sensor 100 includes: a base body 10; a beam 20 including both ends supported by the base body 10 and generating thickness-shear strain when an electric field is applied in a thickness direction; and upper and lower electrodes 32 and 34 holding the beam 20 in between in the thickness direction and formed on upper and lower surfaces of the beam 20 except the central area of the beam 20. The base body 10 is flexible so as to be bent in the thickness direction by external force applied to the base body 10. The beam 20 gets bending vibration generated by the thickness-shear vibration generated when a drive signal is applied to the upper and lower electrodes 32 and 34. COPYRIGHT: (C)2010,JPO&INPIT

    Gyro element, gyro sensors, and electronic equipment

    公开(公告)号:JP5560805B2

    公开(公告)日:2014-07-30

    申请号:JP2010063900

    申请日:2010-03-19

    发明人: 竜太 西澤

    摘要: PROBLEM TO BE SOLVED: To improve accuracy of detection in a vibration gyro element.SOLUTION: The vibration gyro element includes: a base 10; a drive arm 20 extending from the base in a first direction in a predetermined plane; a detection arm 30 extending in a second direction intersecting the first direction in the predetermined plane from the base 10; a drive electrode disposed in the drive arm 20; and a detection electrode disposed in the detection arm 30. The driving arm 20 vibrates to a third direction perpendicular to the predetermined plane by the distortion of an electric field formed by the drive electrode, and thereby a drive vibration VA is generated. When a first detection vibration VB is generated in the drive arm 20 by an angular velocity acting around the axis of the first direction, a second detection vibration VC corresponding to the first detection vibration VB is generated, and an electric field is generated in the detection arm 30 by the distortion based on the second detection vibration VC. The movement of electric charge (Q1-Q4) is generated by the electric field generated in the detection arm 30 and the electric signal due to the movement of the electric charge (Q1-Q4) is taken out from the detection electrode.

    The double-ended tuning fork type vibrating piece

    公开(公告)号:JP5347397B2

    公开(公告)日:2013-11-20

    申请号:JP2008236388

    申请日:2008-09-16

    IPC分类号: H03H9/19

    摘要: PROBLEM TO BE SOLVED: To provide a dual tuning fork type piezoelectric vibration piece capable of preventing an excitation electrode from electrically floating even if an extraction electrode connecting the excitation electrodes is disconnected. SOLUTION: The dual tuning fork type piezoelectric vibration piece includes: a center end extraction electrode connected from surface excitation electrodes 54 and 62 or back surface excitation electrodes 56 and 64 in a second area 30 held between a first area 28 and a third area 32 adjacent to proximal ends 12 and 22 of excitation areas sectioned into three areas to inner side face excitation electrodes 42, 50, 74 and 82 and outer side face excitation electrodes 44, 52, 76 and 84 in one of the first area 28 and the third area 32; and an end center extraction electrode connected from surface excitation electrodes 70 and 78 in the third area 32 or back surface excitation electrodes 40 and 48 in the first area 28 to inner side face excitation electrodes 58 and 66 and outer side face excitation electrodes 60 and 68 in the second area 30. Voltages of the potential of opposite polarities are applied to the respective adjacent excitation electrodes. COPYRIGHT: (C)2010,JPO&INPIT