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公开(公告)号：JP4774383B2
公开(公告)日：2011-09-14
申请号：JP2007145756
申请日：2007-05-31
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01L21/66 , G01N21/956
CPC classification number: G01N21/95607 , G01N21/9501 , G01N2021/8864 , G01N2021/95615
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公开(公告)号：JP4699873B2
公开(公告)日：2011-06-15
申请号：JP2005326123
申请日：2005-11-10
Applicant: 株式会社日立ハイテクノロジーズ
CPC classification number: G03F7/7065 , G01N21/8851 , G01N21/9501 , G01N2021/8861 , G03F1/84
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公开(公告)号：JP4597155B2
公开(公告)日：2010-12-15
申请号：JP2007061183
申请日：2007-03-12
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01L21/66 , G01N21/956 , G06T1/00
CPC classification number: G06T7/0006 , G06T2207/30148
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4.发明专利
公开(公告)号：JP5291419B2
公开(公告)日：2013-09-18
申请号：JP2008245574
申请日：2008-09-25
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01L21/66
CPC classification number: G01N21/9501 , G01N21/94 , G01N2021/8864 , H01L22/12 , H01L22/20
Abstract: Provided is a tool that can easily analyze a number of defects detected by an inspection system under a plurality of inspection conditions. The data processing system includes a storage device configured to acquire from an inspection system coordinates of a plurality of defects obtained by inspecting an inspection object under a plurality of inspection conditions and store the coordinates while correlating the coordinates with the inspection conditions, an arithmetic unit configured to perform coordinate matching to detect the presence or absence of coordinates that are common to at least two inspection conditions of the plurality of inspection conditions, and a display device configured to display on a plurality of defect coordinate maps the defects obtained under the at least two inspection conditions.
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公开(公告)号：JP5162023B2
公开(公告)日：2013-03-13
申请号：JP2011280660
申请日：2011-12-22
Applicant: 株式会社日立ハイテクノロジーズ
IPC: G01B11/30
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Patent Agency Ranking6.发明专利
公开(公告)号：JP4500752B2
公开(公告)日：2010-07-14
申请号：JP2005259707
申请日：2005-09-07
Applicant: 株式会社日立ハイテクノロジーズ
Inventor： 知弘 船越
IPC: G01N21/956
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7.发明专利
公开(公告)号：JP5145116B2
公开(公告)日：2013-02-13
申请号：JP2008132666
申请日：2008-05-21
Applicant: 株式会社日立ハイテクノロジーズ
Inventor： 知弘 船越
IPC: H01L21/66
CPC classification number: G06F3/0481 , H01L22/20 , Y10T70/5637 , Y10T70/5659
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公开(公告)号：JP5075111B2
公开(公告)日：2012-11-14
申请号：JP2008335779
申请日：2008-12-29
Applicant: 株式会社日立ハイテクノロジーズ
IPC: G06T1/00 , G01N21/956 , G01N23/225 , G06F17/30
CPC classification number: G06K9/6263 , G01N21/94 , G01N21/95607 , G01N2021/8854 , G06K9/033 , G06K9/6254 , H01L22/12 , H01L2924/0002 , H01L2924/00
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公开(公告)号：JP5066393B2
公开(公告)日：2012-11-07
申请号：JP2007150526
申请日：2007-06-06
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01L21/66 , H01J37/147 , H01J37/20 , H01J37/22 , H01L21/68
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