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公开(公告)号：JP5071856B2
公开(公告)日：2012-11-14
申请号：JP2008046329
申请日：2008-02-27
申请人： 国立大学法人長岡技術科学大学 , 日本碍子株式会社
IPC分类号： C04B35/50 , H01L21/3065
摘要： There is provided an yttrium oxide-containing material with excellent mechanical characteristics. The yttrium oxide-containing material becomes strong by adding silicon carbide (SiC) and yttrium fluoride (YF3) to yttrium oxide (Y2O3), and yield, handling, reliability can be improved accordingly when this strengthened yttrium oxide-containing material is applied to components of semiconductor manufacturing equipment.
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5.发明专利
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公开(公告)号：JP5525854B2
公开(公告)日：2014-06-18
申请号：JP2010034413
申请日：2010-02-19
申请人： 国立大学法人長岡技術科学大学 , ユニオンツール株式会社
IPC分类号： C23C14/06 , C01B21/064
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公开(公告)号：JP5376498B2
公开(公告)日：2013-12-25
申请号：JP2008282530
申请日：2008-10-31
申请人： 国立大学法人長岡技術科学大学
摘要： PROBLEM TO BE SOLVED: To provide a new technique capable of producing a nanosheet of a metal or the like simply and inexpensively not through a forming method using a chemical reaction. SOLUTION: A metal installed in a liquid is subjected to energization heating using electric energy of ≥3 times to the vaporization energy of the metal so as to produce a nanosheet with a thickness of 1 to 50 nm and a size of 100 nm to 5 μm. The nanosheet is obtained by subjecting a metal as silver or an alloy comprising 50 to 100 mol% silver having a long-length shape with a cross-sectional area of 0.0001 to 5 mm2 and a length of 5 to 500 mm to energization heating for 0.1 μ to 10 s. COPYRIGHT: (C)2010,JPO&INPIT
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公开(公告)号：JP5261817B2
公开(公告)日：2013-08-14
申请号：JP2008222954
申请日：2008-08-30
申请人： 国立大学法人長岡技術科学大学
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a nano-ceramic calcined body, by which a fine structure can be given inexpensively and particulate crystals forming the fine structure can be controlled into a desired compositional state. SOLUTION: The ceramic calcined body 17 with a surface having the fine uneven pattern formed thereon is manufactured by: steps S1 and S2 for coating release agent 12 on a fine uneven pattern transferring mold 11 equipped with a plurality of unevenness parts on its surface; a step S3 for producing a slurry-like composite 15 by blending ceramic powder 14 with an organic material 13; a step S4 for coating the composite 15 on the surface of the mold 11 and then pressing it by a ceramic board 16 so that the fine uneven pattern of the mold 11 is transferred to the composite 15; a step S5 for drying the mold 11, the composite 15, and the ceramic board 16 under the pressed state; a step S6 for releasing the ceramic board 16 where the composite 15 is bonded to the surface; and a step S7 for calcining the composite 15 and the ceramic board 16. COPYRIGHT: (C)2010,JPO&INPIT
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