公开(公告)号：JP2009286118A

公开(公告)日：2009-12-10

申请号：JP2009110582

申请日：2009-04-30

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  YONEKURA YUKA ,  SUMI KOJI

IPC分类号： B41J2/045 ,  B05C5/00 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1634 ,  B41J2/1646 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/18

摘要： PROBLEM TO BE SOLVED: To provide a liquid jet head having a piezoelectric element excellent in displacement characteristics, and to provide an actuator apparatus.
SOLUTION: The liquid jet head includes a flow passage forming substrate formed of a crystal substrate provided with a pressure generating chamber communicating with nozzle openings, and the piezolectric element including a lower electrode, a piezoelectric layer and an upper electrode, which are provided on the flow passage forming substrate to change pressure in the pressure generating chamber. The piezoelectric layer has a thickness of 5 μm or less and is formed of perovskite type crystals, and the distance between a diffraction peak position A of an X-ray derived from a surface (220) of the flow passage forming substrate and a diffraction peak position B of an X-ray derived from a surface (100) of the piezoelectric layer is within the range of 2θ=25.487±0.1°.
COPYRIGHT: (C)2010,JPO&INPIT

摘要翻译： 要解决的问题：提供一种具有位移特性优异的压电元件的液体喷射头，并提供致动器装置。 解决方案：液体喷射头包括由具有与喷嘴开口连通的压力产生室的晶体基板形成的流路形成基板，压电元件包括​​下电极，压电层和上电极， 设置在流路形成基板上以改变压力发生室中的压力。 压电体层的厚度为5μm以下，由钙钛矿型结晶构成，衍生自流路形成用基材的表面（220）的X射线的衍射峰值位置A与衍射峰 来自压电体层的表面（100）的X射线的位置B在2θ= 25.487±0.1°的范围内。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009286119A

公开(公告)日：2009-12-10

申请号：JP2009110583

申请日：2009-04-30

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  YONEKURA YUKA ,  SUMI KOJI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/0973

摘要： PROBLEM TO BE SOLVED: To provide a liquid jet head having a piezoelectric element excellent in piezoelectric characteristics, and to provide the piezoelectric element.
SOLUTION: The liquid jet head includes a flow passage-forming substrate composed of a crystal substrate provided with pressure generating chambers communicating with nozzle orifices and the piezoelectric elements disposed on the passage-forming substrate and each composed of a lower electrode, a piezoelectric material layer and an upper electrode to cause a change of pressure in the pressure-generating chamber. The piezoelectric material layer has a thickness of 5 μm or less and is made of a perovskite-type crystal and is configured such that the distance between an X-ray diffraction peak position A derived from the (220) plane of the passage-forming substrate and an X-ray diffraction peak position B derived from the (110) plane of the piezoelectric material layer is within a range of 2θ=16.262±0.1°.
COPYRIGHT: (C)2010,JPO&INPIT

摘要翻译： 要解决的问题：提供一种具有压电特性优异的压电元件的液体喷射头，并提供压电元件。 解决方案：液体喷射头包括流动通道形成基板，该流路形成基板由具有与喷嘴孔连通的压力产生室的晶体基板和设置在通道形成基板上的压电元件组成，每个由下电极， 压电材料层和上电极，以产生压力发生室中的压力变化。 压电材料层的厚度为5μm以下，由钙钛矿型晶体构成，使得从通道形成基板的（220）面衍生的X射线衍射峰值位置A之间的距离 衍生自压电材料层（110）面的X射线衍射峰位置B在2θ= 16.262±0.1°的范围内。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009231514A

公开(公告)日：2009-10-08

申请号：JP2008074720

申请日：2008-03-21

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KURIKI AKIRA ,  YONEKURA YUKA

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  H01L41/187 ,  H01L41/22

CPC分类号： B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14258 ,  B41J2002/14419 ,  H01L41/0973

摘要： PROBLEM TO BE SOLVED: To provide a liquid spray head capable of suppressing a crack of a piezoelectric layer associated with drive of a piezoelectric element; a liquid spray device; and a piezoelectric element.
SOLUTION: This liquid spray head is provided with: the piezoelectric element including a lower electrode formed on a passage formation substrate having a pressure generation chamber communicating with a nozzle spraying droplets; a piezoelectric body layer formed on the lower electrode; and an upper electrode formed on the piezoelectric body layer. The liquid spray head is structured such that the piezoelectric body layer is formed of a ferroelectric material of a perovskite crystal structure, and the ratio of the surface roughness of the piezoelectric body layer to that of the lower electrode is 0.58-1.60.
COPYRIGHT: (C)2010,JPO&INPIT

摘要翻译： 要解决的问题：提供一种能够抑制与压电元件的驱动相关联的压电层的裂纹的液体喷头; 液体喷雾装置; 和压电元件。 该液体喷头设置有：压电元件，包括形成在通道形成基板上的下电极，具有与喷嘴喷射液滴连通的压力产生室; 形成在所述下电极上的压电体层; 以及形成在压电体层上的上电极。 液体喷头的结构使得压电体层由钙钛矿晶体结构的铁电材料形成，并且压电体层的表面粗糙度与下部电极的表面粗糙度之比为0.58-1.60。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2011187789A

公开(公告)日：2011-09-22

申请号：JP2010052821

申请日：2010-03-10

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  KAMIJO TAKAHIRO ,  SHIMADA KATSUTO ,  KAMEI HIROYUKI ,  YONEKURA YUKA ,  TAKABE HONKI

IPC分类号： H01L41/08 ,  B41J2/14 ,  B41J2/16 ,  B81C1/00 ,  H01L41/09 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/39

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C16/52 ,  H01L21/3065 ,  H01L21/32136 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/314 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator that causes small variations in the hysteresis characteristics of a piezoelectric element. SOLUTION: In a spatter etching for improving adhesion with an upper electrode 80 and lead electrode, the residence time of Ar ions on a surface of the upper electrode 80 is reduced by Ar gas flow carried out by Ar gas introduction by spatter etching the surface of the upper electrode of 80 while introducing the Ar gas at a flow rate of 60 sccm or greater. Thus, charge-up caused by ionized Ar gas residing on the surface of the upper electrode 80 is suppressed, and the effect to a piezoelectric element 300 by the charge-up is small. This results in obtaining a method of manufacturing the piezoelectric actuator that causes small variations, of not only the hysteresis characteristics but also the displacement characteristics, in a piezoelectric layer 70 of the piezoelectric element 300. COPYRIGHT: (C)2011,JPO&INPIT

摘要翻译： 要解决的问题：提供一种制造压电元件的滞后特性变化小的压电致动器的方法。 解决方案：在用于改善与上电极80和引线电极的粘附性的溅射蚀刻中，Ar离子在上电极80的表面上的停留时间通过由Ar气引入的Ar气流减少，溅射蚀刻 上部电极的表面80，同时以60sccm或更大的流速引入Ar气体。 因此，抑制了驻留在上部电极80的表面上的电离Ar气体的充电，并且通过充电对压电元件300的影响小。 这导致获得压电元件300的压电层70中不仅产生滞后特性而且位移特性变小的压电致动器的制造方法。（C）2011，JPO＆INPIT

公开(公告)号：JP2009286120A

公开(公告)日：2009-12-10

申请号：JP2009110584

申请日：2009-04-30

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  YONEKURA YUKA ,  SUMI KOJI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/319 ,  H01L41/39

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/0973

摘要： PROBLEM TO BE SOLVED: To provide a liquid jet head having a piezoelectric element excellent in piezoelectric characteristics, and to provide an actuator apparatus.
SOLUTION: The liquid jet head includes a channel-forming substrate 10 composed of a crystal substrate having a pressure-generating chamber 12 linked to a nozzle opening 21, and the piezoelectric element 300 composed of a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80 and formed on the channel-forming substrate 10 so that the pressure in the pressure-generating chamber 12 can be changed, with the piezoelectric layer 70 having a thickness equal to or smaller than 5 μm, made of a perovskite-type crystal, and formed so that the interval between the X-ray diffraction peak position derived from the (220) plane of the channel-forming substrate 10 and the X-ray diffraction peak position derived from the (111) plane of the piezoelectric layer 70 falls within the range 2θ=9.059±0.1°.
COPYRIGHT: (C)2010,JPO&INPIT

摘要翻译： 要解决的问题：提供一种具有压电特性优异的压电元件的液体喷射头，并提供致动器装置。 解决方案：液体喷射头包括由具有与喷嘴开口21连接的压力产生室12的晶体基板和由下电极60构成的压电元件300构成的通道形成基板10，压电层 70和上电极80，并且形成在通道形成基板10上，使得压电层70的厚度等于或小于5μm的压电层70的压力可以改变，由 钙钛矿型晶体，并且形成为使源于沟道形成基板10的（220）面的X射线衍射峰值位置与衍生自（111）面的X射线衍射峰值位置之间的间隔 压电层70落在2θ= 9.059±0.1°的范围内。 版权所有（C）2010，JPO＆INPIT