公开(公告)号：JP2011173110A

公开(公告)日：2011-09-08

申请号：JP2010105922

申请日：2010-04-30

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI ,  HIGUCHI KAORU ,  YAMAMOTO KATSUHIRO ,  NAKA MASAMICHI

IPC: B05C11/00 ,  B05C11/10

Abstract: PROBLEM TO BE SOLVED: To provide a droplet discharge apparatus which is capable of heightening the working rate of a head, reducing the drying of the head surface due to droplets such as ink and the maintenance treatment time, maintaining the head in good conditions, reducing the amount of consumption of droplets by maintenance and enhancing the productivity, and to provide an alignment treatment method.
SOLUTION: An IJ/camera system control part 40 makes the direction of a substrate 2 placed on each placing stand 5 coincide with the standard straight line based on the alignment mark formed on the substrate 2. The drawing treatment to the substrate 2 placed on the placing stand 5 at the 5B side is simultaneously conducted while the alignment treatment to the placing stand 5 at the 5A side or the carrying-in and carrying-out treatment by a carrying system control part 30 is performed, and the drawing treatment to the substrate 2 placed on the placing stand 5 at the 5A side is simultaneously conducted while the alignment treatment to the placing stand 5 at the 5B side or the carrying-in and carrying-out treatment by the carrying system control part 30 is performed.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够提高头部加工速度的液滴喷射装置，减少由于液滴如油墨等导致的头部表面的干燥和维护处理时间，保持头部良好 条件，通过维护减少液滴的消耗量并提高生产率，并提供取向处理方法。 解决方案：IJ /照相机系统控制部件40使得放置在每个放置台5上的基板2的方向基于形成在基板2上的对准标记与标准直线重合。对基板2的拉伸处理 同时进行放置在5B侧的放置台5上，同时进行5A侧的放置台5的定位处理，或由搬运系统控制部30进行搬运和搬出处理，并进行拉拔处理 同时进行放置在5A侧的放置台5的基板2，同时进行在5B侧对放置台5的对准处理，或由搬送系统控制部30进行搬出处理。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2010181557A

公开(公告)日：2010-08-19

申请号：JP2009023844

申请日：2009-02-04

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： KATAYORI KEITA ,  NAKANO TAKAYUKI ,  SASAKI MASATOSHI

IPC: G02F1/13 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal panel including a correction step that attains an efficient process, without increasing takt time, even when a method excellent in correction operation is employed. SOLUTION: The method for manufacturing the liquid crystal panel includes the correction step of calculating elapsed time T1 after a first defective substrate 30A is carried into a correction processing chamber 50, holding the first defective substrate 30A in the correction processing chamber 50, without carrying out the substrate from the correction processing chamber 50, when the elapsed time T1 is shorter than a predetermined base time T0, and simultaneously, perform the carrying out of the first defective substrate 30A and carrying in a second defective substrate 30B, the next object for repair, after the base time T0 is passed. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供一种制造液晶面板的方法，其包括具有有效处理的校正步骤，而不增加测量时间，即使采用校正操作优异的方法。 解决方案：液晶面板的制造方法包括将第一有缺陷基板30A搬入校正处理室50后，将校正处理室50内保持第一缺陷基板30A的情况下的经过时间T1进行计算的校正步骤， 当经过时间T1比预定的基准时间T0短时，不从校正处理室50进行基板的处理，同时，执行第一有缺陷基板30A的进行并携带第二有缺陷的基板30B， 对象修复后，基准时间T0通过。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2005053642A

公开(公告)日：2005-03-03

申请号：JP2003286029

申请日：2003-08-04

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: B65G1/04

Abstract: PROBLEM TO BE SOLVED: To reduce a carriage load due to retreating from an interference area at the time of guiding a plurality of cranes into an automated warehouse, and a waiting time caused at the time of simultaneously carrying the load into the interference area to improve carriage efficiency. SOLUTION: In this automated warehouse having racks 10a, 10b for storing articles, a receiving/delivering rack 20 for placing the articles at the time of receiving/delivering the articles between the racks 10a, 10b and an outer portion carriage system, extending type masts 32a, 32b which carry the articles between the racks 10a, 10b and the receiving/delivering rack 20, and the plurality of cranes 30a, 30b which consist of transfer arms 33a, 33b and traveling carriages 31a, 31b, the traveling passage of the plurality of cranes 30a, 30b is disposed in a two-stories layer structure. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了减少在将多个起重机引导到自动仓库时从干扰区域退避的托架负载，以及在同时承载负载到干扰中引起的等待时间 面积提高运输效率。 解决方案：在具有用于存储物品的机架10a，10b的自动仓库中，用于在物品10a，10b和外部托架系统之间接收/传送物品时放置物品的接收/传送架20， 在物品10a，10b和收纳架20之间承载物品的延伸型桅杆32a，32b以及由传送臂33a，33b和行进车架31a，31b组成的多个起重机30a，30b，行驶路 多个起重机30a，30b设置在两层层结构中。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2007035858A

公开(公告)日：2007-02-08

申请号：JP2005216048

申请日：2005-07-26

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a moving apparatus capable of moving a moved object to a predetermined goal position even when the moved object is mounted on a mount base in any arrangement state. SOLUTION: A substrate 5 having an ID number pattern 4 formed at a predetermined position is mounted on a base 34 moving in the X-direction in either of a first and a second arrangements. When the substrate 5 is mounted in the first arrangement state, a first ID reading section 31 is provided at the position where it can read an ID number pattern 5. When the substrate 5 is mounted in the second arrangement state, a second ID reading section 31 is provided at the position where it can read the ID number pattern 4. A substrate direction judging section 16 judges the arrangement state of the substrate 5 based on which of the first and the second ID reading sections 31, 32 has read the ID number pattern 4. Stage movement control unit 25 controls a stage 23 based on the arrangement state of the substrate 5, and moves a defective portion of the substrate 5 into the image pick-up region A according to an image pick-up 12. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：即使当移动的物体以任何布置状态安装在安装基座上时，提供能够将移动的物体移动到预定的目标位置的移动装置。 解决方案：将具有形成在预定位置的ID号码图案4的基板5安装在以第一和第二布置中的任一个在X方向上移动的基座34上。 当基板5安装在第一布置状态时，第一ID读取部31设置在可以读取ID号码图案5的位置。当基板5安装在第二布置状态时，第二ID读取部 31设置在能够读取ID号码图案4的位置。基板方向判断部分16基于第一和第二ID读取部分31,32中哪一个读取ID号码来判断基板5的布置状态 图案4.舞台移动控制单元25基于衬底5的布置状态来控制舞台23，并且根据图像拾取器12将衬底5的缺陷部分移动到摄像区域A.

版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2004054341A

公开(公告)日：2004-02-19

申请号：JP2002207059

申请日：2002-07-16

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: G05B19/418 ,  G05B23/02 ,  G06Q10/00 ,  G06Q10/06 ,  G06Q10/10 ,  G06Q50/00 ,  G06Q50/04 ,  G06Q50/10 ,  G06F17/60

CPC classification number: Y02P90/14 ,  Y02P90/30 ,  Y02P90/86

Abstract: PROBLEM TO BE SOLVED: To promptly take a measure to meet the situation when a trouble has occurred in a production equipment. SOLUTION: A production equipment management system 1 is provided with a storage device 23 registering troubles of the production equipment 10 and corresponding countermeasure, a user-side host computer 21 for detecting a trouble of the production equipment 10 and acquiring its solution from the storage device 23 or a production equipment maker-side host computer 30 to present the solution to a user, and the production equipment maker-side host computer 30. The user-side host computer 21 acquires the countermeasure from the storage device 23 if the countermeasure is registered in the storage device 23, and from the production equipment maker-side host computer 30 if the countermeasure is not registered in the storage device 23. The production equipment maker-side host computer 30 notifies the user-side host computer 21 of the countermeasure corresponding to a request from the user-side host computer 21, and registers the countermeasure in the storage device 23. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2010286786A

公开(公告)日：2010-12-24

申请号：JP2009142551

申请日：2009-06-15

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: G02F1/13 ,  G02F1/1368 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To provide a defect correction device that facilitates specifying a defect correction position with high accuracy. SOLUTION: The defect correction device includes: a defect part display observation means for displaying and observing a defect part in a substrate based on defect information in the substrate; a model recipe information acquisition means for acquiring information of a model recipe to recognize a model of the substrate in accordance with the substrate; a correction processing recipe candidate display means for displaying several correction processing recipe candidates for correcting the defect part in the substrate according to the model recipe; and an auxiliary image display means for displaying an auxiliary image showing a discharge position of a defect correcting material on the display part according to a selected correction processing recipe when a user selects one correction processing recipe for correcting the defect part among a plurality of correction processing recipe candidates. The auxiliary image is set to be optionally movable by the user on the display part. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种有助于高精度地指定缺陷校正位置的缺陷校正装置。 解决方案：缺陷校正装置包括：缺陷部分显示观察装置，用于基于衬底中的缺陷信息显示和观察衬底中的缺陷部分; 模型食谱信息获取装置，用于获取根据所述基板识别所述基板的模型的模型配方的信息; 校正处理配方候选显示装置，用于根据模型配方显示用于校正衬底中的缺陷部分的若干校正处理配方候选; 以及辅助图像显示装置，用于当用户选择用于校正多个校正处理中的缺陷部分的一个校正处理配方时，根据所选择的校正处理配置，在显示部分上显示示出缺陷校正材料的放电位置的辅助图像 食谱候选人 辅助图像被设置为可选地由用户在显示部分上移动。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2010079797A

公开(公告)日：2010-04-08

申请号：JP2008249820

申请日：2008-09-29

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: G05B19/404

Abstract: PROBLEM TO BE SOLVED: To provide a process processing apparatus which does not need an expensive and high-accuracy stage, is low in manufacturing cost, can reduce manufacturing cost of a product, and excels in processing accuracy.
SOLUTION: A section 17 for determining need for a displacement measurement determines the presence of displacement measurement of an actual position to a target position of a process processing section 3 in the subscanning direction 9. A section 18 of computing compensation movement amount computes a compensating movement amount in the subscanning direction 9 of the process processing section 3, based on a newly measured displacement or displacement stored beforehand based on the determination of the section 17 of determining the need for displacement measurement. A stage controller 13 controls the movement in the subscanning direction 9 of the process processing section 3, according to the compensation movement amount computed by the section 18 of computing compensating movement amount. A section of adjustment processing of camera position 20 controls movement of a section of adjustment of camera position 21 referring to a camera position storage section 11d according to scanning speed of a main scanning section 6.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了提供不需要昂贵且高精度级的处理处理装置，制造成本低，可以降低产品的制造成本，并且处理精度优异。 解决方案：用于确定对位移测量的需要的部分17确定在副扫描方向9处的处理处理部分3的实际位置到目标位置的位移测量的存在。计算补偿移动量的部分18计算 基于根据确定需要位移测量的部分17的确定，预先存储的新测量的位移或位移，处理处理部3的副扫描方向9的补偿移动量。 舞台控制器13根据由计算补偿移动量的部分18计算的补偿移动量来控制处理处理部分3的副扫描方向9的移动。 照相机位置20的调整处理的一部分，根据主扫描部6的扫描速度，参照摄像机位置存储部11d来控制摄像机位置21的调整部的移动。（C）2010，JPO＆INPIT

公开(公告)号：JP2010015234A

公开(公告)日：2010-01-21

申请号：JP2008172325

申请日：2008-07-01

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: G05B19/404 ,  G02F1/13 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To provide a process processor for providing an inexpensive and highly precise device without preparing any expensive or highly precise stage, and for reducing the manufacturing costs of a product. SOLUTION: A displacement measurement necessity determination part 17 determines whether or not it is necessary to measure the displacement of an actual position with respect to the target position of a process processing part 3 in a sub-scanning direction 9 based on a predetermined criterion. When it is determined that it is necessary to measure the displacement by the displacement measurement necessity determination part 17, a corrected moving amount calculation part 18 calculates the corrected moving amounts of the sub-scanning direction 9 of the process processing part 3 based on the measured displacement, and when it is determined that it is not necessary to measure the displacement by the displacement measurement determination part 17, calculates the corrected moving amounts of the sub-scanning direction 9 of the process processing part 3 based on the displacement stored in advance. A stage control part 13 controls the movement of the sub-scanning direction 9 of the process processing part 3 according to the corrected moving amounts calculated by the corrected moving amount calculation part 18. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供一种用于提供廉价且高精度的装置的处理处理器，而不需要准备任何昂贵或高度精确的阶段，并且用于降低产品的制造成本。 解决方案：位移测量必要性确定部分17确定是否需要基于预定的位置来测量相对于处理处理部分3在副扫描方向9上的目标位置的实际位置的位移 标准。 当确定需要通过位移测量必要性确定部17测量位移时，校正移动量计算部18基于所测量的运动量计算部18计算处理处理部3的副扫描方向9的校正移动量 并且当确定不需要通过位移测量确定部17测量位移时，基于预先存储的位移来计算处理处理部3的副扫描方向9的校正移动量。 舞台控制部13根据由校正移动量计算部18计算的校正移动量来控制处理处理部3的副扫描方向9的移动。（C）2010，JPO＆INPIT

公开(公告)号：JP2005340645A

公开(公告)日：2005-12-08

申请号：JP2004159749

申请日：2004-05-28

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: G03F9/00 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To prevent the occurrence of errors in sensing alignment marks due to scratches or dirt on the marks or due to faulty drawing of the same. SOLUTION: The alignment mark searching unit comprises an imaging section for partially imaging the specimen surface, a locomotion section for changing the region for imaging by causing a relative movement between the specimen and the imaging section, a sensing section for sensing alignment marks in the image taken, a registration section for registering in advance the expected positions of three or more alignment marks, and an imaging controller for sequentially imaging the expected positions registered in the registration section by driving the imaging section and the locomotion section until a pair of alignment marks is sensed. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了防止由于标记上的划痕或污垢或由于其错误绘制而感测对准标记的错误。 解决方案：对准标记搜索单元包括用于部分地成像样本表面的成像部分，用于通过引起样本和成像部分之间的相对移动来改变用于成像的区域的移动部分，用于感测对准标记的感测部分 在所拍摄的图像中，预先登记三个或更多个对准标记的预期位置的登记部分和用于通过驱动成像部分和移动部分来依次对登记部分中登记的预期位置进行成像的成像控制器，直到一对 检测对准标记。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005302890A

公开(公告)日：2005-10-27

申请号：JP2004114404

申请日：2004-04-08

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI

IPC: H01L21/027

Abstract: PROBLEM TO BE SOLVED: To solve the problem, wherein the moving distance of a search becomes long according to the order of the search, and not only a long time is required for the search but also dust is generated from the device, in response to the moving distance and the defective generation ratio of products is increased, to improve the efficiency of the search, and to minimize the moving distance.
SOLUTION: An alignment-mark search device has an imaging section 3 sensing an image in the region of a specified area on a sample, a moving section successively changing an imaging region by relatively moving the sample and the imaging section, and a first storage 4, in which the order of an imaging is stored previously regarding a plurality of the imaging regions on the sample. The search device, further, has an imaging control unit for making the sample imaged, in the order of imaging, by driving the imaging section and the moving section, a detector 6 detecting an alignment mark from the sensed image, and a second storage in which the presence region of the alignment mark is stored. The search device has an arithmetic operation section 8 for computing the detection frequency of past alignment marks in each imaging region and the moving distance required by the moving section from the storage contents of the second storage and an imaging order decision 9 determining the new order of the imaging, on the basis of the result of the computation and updating the order of the imaging of the first storage into the new order of the imaging.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题为了解决根据搜索顺序搜索的移动距离变长的问题，不仅需要长时间的搜索，而且从设备产生灰尘， 响应于移动距离和产品的缺陷发生率增加，提高搜索效率，并使移动距离最小化。 解决方案：对准标记搜索装置具有成像部分3，其感测样本上指定区域的区域中的图像，通过相对移动样本和成像部分而依次改变成像区域的移动部分，以及 第一存储器4，其中先前存储关于样本上的多个成像区域的成像顺序。 此外，搜索装置具有成像控制单元，用于通过驱动成像部分和移动部分，以成像顺序使样本成像，检测器6检测来自感测图像的对准标记，以及第二存储器 存储对准标记的存在区域。 搜索装置具有算术运算部8，用于根据第二存储器的存储内容计算出每个成像区域中的过去对准标记的检测频率和移动部分所需的移动距离，以及确定新的顺序的成像顺序决定9 基于计算的结果并将第一存储器的成像顺序更新为成像的新顺序的成像。 版权所有（C）2006，JPO＆NCIPI