公开(公告)号：JP2014005502A

公开(公告)日：2014-01-16

申请号：JP2012141859

申请日：2012-06-25

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TAMURA HISAHIRO ,  HIGUCHI KAORU

IPC: C23C16/44 ,  H01B13/00

Abstract: PROBLEM TO BE SOLVED: To improve property of a depositing object on which a transparent conductive film is deposited, by depositing the transparent conductive film more evenly.SOLUTION: A thin film deposition method for depositing a transparent conductive film on a depositing surface 72 of a glass substrate 70 includes a step of spraying mist, where an injection angle θ1 of each nozzle relative to the depositing surface 72 is 75° or more and 90° or less, a spraying distance L between each nozzle and the depositing surface 72 is 150 mm or more and 300 mm or less, and each nozzle sprays a raw material solution to be sprayed in a spray quantity of 10 ml/min or more and less than 30 ml/min per nozzle at a spraying gas pressure of 0.2 MPa or more and 0.4 MPa or less.

Abstract translation: 要解决的问题：为了提高沉积透明导电膜的沉积物的性能，通过更均匀地沉积透明导电膜来解决。解决方案：一种用于在透明导电膜的沉积表面72上沉积透明导电膜的薄膜沉积方法 玻璃基板70包括喷雾的步骤，每个喷嘴相对于沉积表面72的喷射角度＆amp; 1; 1为75°以上且90°以下，各喷嘴和沉积面72之间的喷射距离L为 150mm以上且300mm以下，各喷嘴以喷雾气体压力0.2MPa喷雾喷雾量为10ml / min以上且小于30ml / min的喷雾量的喷雾量， 大于0.4MPa以下。

公开(公告)号：JP2013095944A

公开(公告)日：2013-05-20

申请号：JP2011237948

申请日：2011-10-28

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TAMURA HISAHIRO ,  HIGUCHI KAORU

IPC: C23C16/40 ,  C03C17/25 ,  C03C17/27 ,  C03C17/34

CPC classification number: C03C17/3417 ,  C03C2218/1525

Abstract: PROBLEM TO BE SOLVED: To deposit a film of high quality by controlling generation of cracks and warp of a glass base material.SOLUTION: A film deposition method on a glass base material includes a first film deposition step of depositing a film of a first layer by spraying aqueous solution containing oxide precursors as solute on the glass base material at the temperature ≥300°C and below the first heating temperature lower than the strain point of glass, and a second film deposition step of depositing a film of a second layer by spraying aqueous solution containing oxide precursors as solute on the glass base material under the second heating temperature higher than the first heating temperature. The film deposition method further includes a strain-removing step of keeping the glass base material under the temperature above the slow-cooling point of the glass after the second film deposition step, and a slow-cooling step of slowly cooling the glass base material to the room temperature after the strain-removing step.

Abstract translation: 要解决的问题：通过控制玻璃基材的裂纹和翘曲的产生来沉积高质量的膜。 解决方案：玻璃基材上的成膜方法包括：第一膜沉积步骤，通过在温度≥300℃下将含氧化物前体作为溶质的水溶液喷涂在玻璃基材上，沉积第一层膜;以及 低于玻璃的应变点的第一加热温度;以及第二膜沉积步骤，通过在比第一加热温度高的第二加热温度下将含有氧化物前体的溶液作为溶质喷涂在玻璃基材上，沉积第二层膜 加热温度。 成膜方法还包括在第二膜沉积步骤之后将玻璃基材保持在高于玻璃的缓慢冷却点的温度的应变消除步骤，以及缓慢冷却玻璃基材的缓慢冷却步骤 应变去除步骤后的室温。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2010075892A

公开(公告)日：2010-04-08

申请号：JP2008249554

申请日：2008-09-29

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： NAKATANI MASAJI ,  HIGUCHI KAORU

IPC: B05C5/00

Abstract: PROBLEM TO BE SOLVED: To provide an easy-to-maintain liquid ejection apparatus while suppressing the size enlargement and production cost of the apparatus body and to provide a drawing method using the liquid ejection apparatus.
SOLUTION: The liquid ejection apparatus 100 is provided with a plurality of liquid ejection heads 2, a head transfer mechanism 3 that transfers the plurality of the liquid ejection heads 2 to the second direction D2, a mount 5, and an ejecta transfer mechanism 6 that transfers the mount 5 to the first direction D1. The liquid ejection apparatus 100 is further provided with a plurality of maintenance units 12 in position opposite to the plurality of the liquid ejection heads 2 displaced to one end of the transfer range. According to this structure, the stroke of the head transfer mechanism 3 can be shortened, so that the production cost of the apparatus body can be reduced. Also, it is not necessary to form a large maintenance region in the apparatus body, so that the size enlargement of the apparatus body can be reduced. Also, the maintenance work can be easily performed.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了提供易于维护的液体喷射装置，同时抑制装置主体的尺寸扩大和生产成本，并提供使用液体喷射装置的拉拔方法。 解决方案：液体喷射装置100设置有多个液体喷射头2，将多个液体喷射头2传送到第二方向D2的头部传送机构3，安装件5和喷射传送 将安装件5传送到第一方向D1的机构6。 液体喷射装置100还设置有多个维修单元12，位于与移动范围的一端移位的多个液体喷射头2相对的位置。 根据该结构，能够缩短头转印机构3的行程，能够降低装置主体的制造成本。 此外，不需要在装置主体中形成大的维护区域，从而可以减小装置主体的尺寸扩大。 此外，可以容易地执行维护工作。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009128830A

公开(公告)日：2009-06-11

申请号：JP2007306629

申请日：2007-11-27

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： HIGUCHI KAORU ,  SASAKI MASATOSHI

IPC: G02F1/13 ,  G01B21/00 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of correcting an error by yawing or the like caused during scanning a substrate and capable of allowing a substrate processing means to accurately subject a predetermined position of the substrate to the process. SOLUTION: The substrate processing apparatus includes position measurement units 13a, 13b that measure the positions of substrate conveying sections 22a, 22c with respect to a base structure 2, the conveying sections away from each other in the Y-axis direction and mounting a substrate holding section 11 which fixes a substrate P, and thereby, indirectly measure the respective distances in the X-axis direction between a gantry 3 and two positions away from each other in the Y axis direction on the substrate P; a scan controlling section 5 controlling the substrate conveying sections 22a to 22d to equalize the two distances when the two distances measured by the position measuring units 13a, 13b are different from each other; and a relative position measuring section 29 measuring the distance in the X axis direction between the substrate P and the gantry 3. A head unit 25 mounted on the gantry 3 applies an ink to the substrate P according to the timing based on the distance measured by the relative position measuring section 29. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够通过在扫描基板期间产生的偏航等来校正误差的基板处理装置，并且能够使基板处理装置精确地对基板的预定位置进行处理。 基板处理装置包括位置测量单元13a，13b，其测量基板输送部22a，22c相对于基部结构2的位置，输送部在Y轴方向上彼此远离并安装 基板保持部11，其固定基板P，从而在基板P上沿Y轴方向彼此远离的台架3和两个位置间接测量X轴方向上的各个距离; 当由位置测量单元13a，13b测量的两个距离彼此不同时，控制基板传送部分22a至22d以使两个距离相等的扫描控制部分5; 以及相对位置测量部29，测量基板P和台架3之间的X轴方向的距离。安装在台架3上的头单元25根据基于由 相对位置测量部分29.版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2007106428A

公开(公告)日：2007-04-26

申请号：JP2005296948

申请日：2005-10-11

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： HIGUCHI KAORU ,  WATANABE KEIICHIRO

IPC: B65D30/02 ,  B05C5/00 ,  B41J2/175 ,  B65D33/38 ,  B65D75/26 ,  B65D77/00

Abstract: PROBLEM TO BE SOLVED: To provide an ink tank, and an inkjet applying device which are used at a low cost, and have a device constitution hardly restricted in usable ink.
SOLUTION: This bag-like ink tank is connected with an inkjet head by a passage and houses an ink which is discharged from the inkjet head. In the ink tank, a fluorine containing resin comprising an ethylene/tetrafluoroethylene/hexafluoro propylene copolymer, is used as a material for a section coming into contact with the ink. Also, an inkjet device is equipped with: the inkjet head; and the bag-like ink tank which is connected with the inkjet head by the passage, and houses the ink being discharged from the inkjet head. In the inkjet device, as the material for the section coming into contact with the ink of the ink tank, the fluorine containing resin comprising the ethylene/tetrafluoroethylene/hexafluoro propylene copolymer is used.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供以低成本使用并且在可用墨水中几乎不受限制的装置构造的墨水罐和喷墨施加装置。 解决方案：这种袋状墨水罐通过通道与喷墨头连接并容纳从喷墨头排出的墨水。 在墨水槽中，使用包含乙烯/四氟乙烯/六氟丙烯共聚物的含氟树脂作为与油墨接触的部分的材料。 此外，喷墨装置配备有：喷墨头; 以及通过通道与喷墨头连接的袋状墨水罐，并容纳从喷墨头排出的墨水。 在喷墨装置中，作为与油墨罐的油墨接触的部分的材料，使用包含乙烯/四氟乙烯/六氟丙烯共聚物的含氟树脂。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006062329A

公开(公告)日：2006-03-09

申请号：JP2004251059

申请日：2004-08-30

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： MUTO YOSHINORI ,  HIGUCHI KAORU

IPC: B41J2/175

CPC classification number: B41J2/175 ,  B41J2/17596

Abstract: PROBLEM TO BE SOLVED: To realize an inkjet head device in which an inkjet head can secure a suitable negative pressure and which has a small consumption amount of ink, and to provide an ink feeding method.
SOLUTION: In the inkjet head device 1, the inkjet head 11, a sub tank 13 and a main tank 14 are loaded to become higher in the order of description on a carriage 16. These inkjet head 12, sub tank 13 and main tank 14 are mutually connected by an ink tube 24 branched in three ways. A three-way selector valve 15 is disposed at a branching point of the ink tube 24, which alternatively switches a connection destination of the sub tank 13 between the main tank 14 and the inkjet head 11 without making the inkjet head 11 and the main tank 14 communicate with each other.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了实现喷墨头可以确保适当的负压并且具有小的墨水消耗量的喷墨头装置，并且提供一种墨水供给方法。 解决方案：在喷墨头装置1中，喷墨头11，副墨盒13和主墨盒14按照在滑架16上的描述顺序加载得更高。这些喷墨头12，副墨盒13和 主罐14通过三分支的墨管24相互连接。 三通换向阀15设置在油墨管24的分支点处，它们在不使喷墨头11和主油箱形成的情况下交替地将副油箱13的连接目的地切换到主油箱14与喷墨头11之间 14相互通信。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2014144391A

公开(公告)日：2014-08-14

申请号：JP2013013030

申请日：2013-01-28

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： OKADA TOSHINORI ,  HIGUCHI KAORU ,  YOSHII MOTOYASU ,  DOI KO

IPC: B05B17/06 ,  A61H33/12

Abstract: PROBLEM TO BE SOLVED: To provide a liquid spray device which stabilizes spraying by a simple structure at low costs.SOLUTION: In a tank (3), an air passage which circulates air in an external space into the tank (3) is formed. In the air passage, an external space opening (36) located at the external space side, an air circulation hole (30) located at the tank (3) interior side, and a resistance channel (34) which connects the external space opening (36) with the air circulation hole (30) are formed. A hole diameter of the air circulation hole (30) is formed so as to be larger than a hole diameter of a micropore of an elastic diaphragm (4).

Abstract translation: 要解决的问题：提供一种液体喷雾装置，其以低成本的简单结构稳定喷涂。解决方案：在罐（3）中，形成将外部空间中的空气循环进入罐（3）的空气通道。 在空气通道中，位于外部空间侧的外部空间开口（36），位于罐（3）内侧的空气循环孔（30）和连接外部空间开口（36）的阻力通道（34） 36）与空气循环孔（30）形成。 空气循环孔（30）的孔径形成为大于弹性膜（4）的微孔的孔径。

公开(公告)号：JP2014108367A

公开(公告)日：2014-06-12

申请号：JP2012262301

申请日：2012-11-30

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： YOSHII MOTOYASU ,  OKADA TOSHINORI ,  DOI KO ,  HIGUCHI KAORU

IPC: B05B17/06 ,  A45D34/04 ,  A61H33/12

Abstract: PROBLEM TO BE SOLVED: To provide a liquid spray device capable of stabilizing spraying with a simple structure at low costs, and to provide a cosmetic liquid spray device.SOLUTION: A cosmetic liquid spray device (1) includes: a tank (3) composed of a cylindrical protruding part (31) which has a liquid supply port (33) and is formed protruding and a liquid holding part (32) which holds the liquid (7); a case (2); an elastic diaphragm (4) which is supported by the case (2), is attached to the liquid supply port (33), and has a number of micropores; and an ultrasonic vibrator (5). The ultrasonic vibrator (5) causes ultrasonic vibrations in the elastic diaphragm (4) and a liquid (7) stored in the tank (3) is sprayed from the liquid supply port (33) through the number of micropores of the elastic diaphragm (4). An air circulation hole (30) which allows the interior of the tank to communicate with the exterior is formed at the cylindrical protruding part (31) of the tank (3). A bore diameter of the air circulation hole (30) is formed so as to be larger than a bore diameter of each micropore of the elastic diaphragm (4).

Abstract translation: 要解决的问题：提供一种液体喷雾装置，其能够以低成本以简单的结构稳定喷洒，并提供化妆品液体喷射装置。解决方案：一种化妆品液体喷洒装置（1）包括：罐（3），其组成 具有液体供给口（33）并形成突出的圆筒状的突出部（31）和保持液体（7）的液体保持部（32）。 情况（2）; 由所述壳体（2）支撑的弹性隔膜（4）附接到所述液体供给口（33），并具有多个微孔; 和超声波振子（5）。 超声波振动器（5）在弹性隔膜（4）中引起超声波振动，并且从液体供给口（33）喷射储存在储液罐（3）中的液体（7）通过弹性隔膜（4）的微孔数 ）。 在罐（3）的圆筒状的突出部（31）形成有允许罐内部与外部连通的空气循环孔（30）。 空气循环孔（30）的孔径形成为大于弹性隔膜（4）的每个微孔的孔径。

公开(公告)号：JP2013129867A

公开(公告)日：2013-07-04

申请号：JP2011279049

申请日：2011-12-20

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TAMURA HISAHIRO ,  HIGUCHI KAORU

IPC: C23C16/44 ,  H01L31/04

CPC classification number: C23C16/14 ,  C23C16/45595 ,  H01L31/0392 ,  H01L31/1884 ,  Y02E10/50

Abstract: PROBLEM TO BE SOLVED: To provide a device for forming a thin film, capable of forming a thin film with a uniform film quality at a high rate.SOLUTION: A thin film forming device 100 has a sprayer 4 for spraying a mist 9 onto a substrate 1, a cooling means for cooling a raw material solution 5 in the sprayer 4, and a heating unit 3 for heating the mist 9. A vertical distance Lb from a lower end of the sprayer 4 to an upper surface of the substrate 1 is 1/2 La to La, where La is a vertical distance from the upper surface of the substrate 1 to a top end of the heating unit 3.

Abstract translation: 要解决的问题：提供一种能够以高速率形成具有均匀膜质量的薄膜的薄膜形成装置。解决方案：薄膜形成装置100具有喷雾器4，用于将雾9喷射到 基板1，用于冷却喷雾器4中的原料溶液5的冷却装置，以及用于加热雾沫的加热单元3.从喷雾器4的下端到基板1的上表面的垂直距离Lb为 1/2 La至La，其中La是从衬底1的上表面到加热单元3的顶端的垂直距离。

公开(公告)号：JP2011173110A

公开(公告)日：2011-09-08

申请号：JP2010105922

申请日：2010-04-30

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： SASAKI MASATOSHI ,  HIGUCHI KAORU ,  YAMAMOTO KATSUHIRO ,  NAKA MASAMICHI

IPC: B05C11/00 ,  B05C11/10

Abstract: PROBLEM TO BE SOLVED: To provide a droplet discharge apparatus which is capable of heightening the working rate of a head, reducing the drying of the head surface due to droplets such as ink and the maintenance treatment time, maintaining the head in good conditions, reducing the amount of consumption of droplets by maintenance and enhancing the productivity, and to provide an alignment treatment method.
SOLUTION: An IJ/camera system control part 40 makes the direction of a substrate 2 placed on each placing stand 5 coincide with the standard straight line based on the alignment mark formed on the substrate 2. The drawing treatment to the substrate 2 placed on the placing stand 5 at the 5B side is simultaneously conducted while the alignment treatment to the placing stand 5 at the 5A side or the carrying-in and carrying-out treatment by a carrying system control part 30 is performed, and the drawing treatment to the substrate 2 placed on the placing stand 5 at the 5A side is simultaneously conducted while the alignment treatment to the placing stand 5 at the 5B side or the carrying-in and carrying-out treatment by the carrying system control part 30 is performed.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够提高头部加工速度的液滴喷射装置，减少由于液滴如油墨等导致的头部表面的干燥和维护处理时间，保持头部良好 条件，通过维护减少液滴的消耗量并提高生产率，并提供取向处理方法。 解决方案：IJ /照相机系统控制部件40使得放置在每个放置台5上的基板2的方向基于形成在基板2上的对准标记与标准直线重合。对基板2的拉伸处理 同时进行放置在5B侧的放置台5上，同时进行5A侧的放置台5的定位处理，或由搬运系统控制部30进行搬运和搬出处理，并进行拉拔处理 同时进行放置在5A侧的放置台5的基板2，同时进行在5B侧对放置台5的对准处理，或由搬送系统控制部30进行搬出处理。 版权所有（C）2011，JPO＆INPIT