摘要:
PROBLEM TO BE SOLVED: To provide an application nozzle which makes a coated surface flat and smooth.SOLUTION: A nozzle 10 for applying a paint of high viscosity includes an introduction passage 17, an internal space 16 and a nozzle slit 15, these communicating with each other, and radially sprays a paint of high viscosity to a material to be coated from the nozzle slit 15. The nozzle slit 15 is an approximately fan-shaped one having a prescribed angle when viewed in planar view. When the nozzle slit 15 is regarded to be an approximately fan-shaped one, the approximately fan-shaped arc is made to be a nozzle slit outlet 15E, and the gap of the nozzle slit outlet 15E is made to be a slit height D. When the nozzle slit outlet 15E is regarded to be an arc, the chord of the arc is made to be a slit width W, the ratio of the slit height D to the slit width W is made to be a flatness rate F, the slit width W is at least 35 mm, and the flatness rate F is at most 0.01.
摘要:
PROBLEM TO BE SOLVED: To provide a processing-liquid supplying unit capable of maintaining processing liquid to be supplied to a nozzle at a constant temperature, and to provide a substrate-processing apparatus and method using the same. SOLUTION: The substrate-processing apparatus and the method adjust the temperature of a processing liquid in a processing-liquid pipe inside a nozzle arm on waiting at a standby position, on proceeding the process at a process position, and on moving in between the standby position and the process position; through heat transfer in between the nozzle arm and a standby port, and through the heat transfer in between the nozzle arm and a nozzle-moving unit. COPYRIGHT: (C)2010,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide a coater for coating a coating material, which can reduce and preferably can avoid drawbacks of the conventional coater, and to provide a coating method and a pump mechanism for a coater. SOLUTION: The drawbacks of the conventional coater can be solved by using a positive displacement transfer pump as a transfer pump having such a construction that a coating material can be transferred and returned through a return conduit from a pump outlet opening to a pump inlet opening. COPYRIGHT: (C)2006,JPO&NCIPI